DE602008005959D1 - Vom Substrat isolierter Finfet-Feldeffekttransistor - Google Patents
Vom Substrat isolierter Finfet-FeldeffekttransistorInfo
- Publication number
- DE602008005959D1 DE602008005959D1 DE602008005959T DE602008005959T DE602008005959D1 DE 602008005959 D1 DE602008005959 D1 DE 602008005959D1 DE 602008005959 T DE602008005959 T DE 602008005959T DE 602008005959 T DE602008005959 T DE 602008005959T DE 602008005959 D1 DE602008005959 D1 DE 602008005959D1
- Authority
- DE
- Germany
- Prior art keywords
- isolated
- field effect
- effect transistor
- substrate
- finfet field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005669 field effect Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
- H01L29/7851—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with the body tied to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/90—MOSFET type gate sidewall insulating spacer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/902—FET with metal source region
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0704568A FR2918211A1 (fr) | 2007-06-26 | 2007-06-26 | Transistor a effet de champ de type finfet isole du substrat |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602008005959D1 true DE602008005959D1 (de) | 2011-05-19 |
Family
ID=38959679
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602008005959T Active DE602008005959D1 (de) | 2007-06-26 | 2008-06-19 | Vom Substrat isolierter Finfet-Feldeffekttransistor |
Country Status (4)
Country | Link |
---|---|
US (2) | US7781315B2 (de) |
EP (1) | EP2009682B1 (de) |
DE (1) | DE602008005959D1 (de) |
FR (1) | FR2918211A1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8507948B2 (en) * | 2010-12-23 | 2013-08-13 | Intel Corporation | Junctionless accumulation-mode devices on prominent architectures, and methods of making same |
US8420459B1 (en) | 2011-10-20 | 2013-04-16 | International Business Machines Corporation | Bulk fin-field effect transistors with well defined isolation |
CN103187286B (zh) * | 2011-12-29 | 2016-08-10 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管的制作方法 |
US9236267B2 (en) * | 2012-02-09 | 2016-01-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cut-mask patterning process for fin-like field effect transistor (FinFET) device |
KR20130096953A (ko) * | 2012-02-23 | 2013-09-02 | 삼성전자주식회사 | 반도체 장치의 제조 방법 |
US11037923B2 (en) * | 2012-06-29 | 2021-06-15 | Intel Corporation | Through gate fin isolation |
US8946035B2 (en) | 2012-09-27 | 2015-02-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Replacement channels for semiconductor devices and methods for forming the same using dopant concentration boost |
US9082853B2 (en) | 2012-10-31 | 2015-07-14 | International Business Machines Corporation | Bulk finFET with punchthrough stopper region and method of fabrication |
KR101983633B1 (ko) | 2012-11-30 | 2019-05-29 | 삼성전자 주식회사 | 반도체 장치 및 그 제조 방법 |
US9006055B2 (en) * | 2013-01-30 | 2015-04-14 | Globalfoundries Singapore Pte. Ltd. | High voltage FINFET structure |
CN104078332A (zh) * | 2013-03-26 | 2014-10-01 | 中国科学院微电子研究所 | 鳍制造方法 |
US8975168B2 (en) | 2013-05-28 | 2015-03-10 | Stmicroelectronics, Inc. | Method for the formation of fin structures for FinFET devices |
US9793378B2 (en) | 2013-05-31 | 2017-10-17 | Stmicroelectronics, Inc. | Fin field effect transistor device with reduced overlap capacitance and enhanced mechanical stability |
US20140374807A1 (en) * | 2013-06-19 | 2014-12-25 | International Business Machines Corporation | METHOD OF DEVICE ISOLATION IN CLADDING Si THROUGH IN SITU DOPING |
US9000498B2 (en) * | 2013-06-28 | 2015-04-07 | Stmicroelectronics, Inc. | FinFET with multiple concentration percentages |
US9006077B2 (en) * | 2013-08-21 | 2015-04-14 | GlobalFoundries, Inc. | Gate length independent silicon-on-nothing (SON) scheme for bulk FinFETs |
US9418902B2 (en) | 2013-10-10 | 2016-08-16 | Globalfoundries Inc. | Forming isolated fins from a substrate |
US9496257B2 (en) | 2014-06-30 | 2016-11-15 | International Business Machines Corporation | Removal of semiconductor growth defects |
US20160005849A1 (en) * | 2014-07-01 | 2016-01-07 | Qualcomm Incorporated | Method and apparatus for 3d concurrent multiple parallel 2d quantum wells |
US10276718B2 (en) * | 2017-08-31 | 2019-04-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | FinFET having a relaxation prevention anchor |
US11257932B2 (en) * | 2020-01-30 | 2022-02-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fin field effect transistor device structure and method for forming the same |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020011612A1 (en) * | 2000-07-31 | 2002-01-31 | Kabushiki Kaisha Toshiba | Semiconductor device and method for manufacturing the same |
US6645797B1 (en) | 2002-12-06 | 2003-11-11 | Advanced Micro Devices, Inc. | Method for forming fins in a FinFET device using sacrificial carbon layer |
US7863674B2 (en) * | 2003-09-24 | 2011-01-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multiple-gate transistors formed on bulk substrates |
US7385247B2 (en) * | 2004-01-17 | 2008-06-10 | Samsung Electronics Co., Ltd. | At least penta-sided-channel type of FinFET transistor |
US7009250B1 (en) * | 2004-08-20 | 2006-03-07 | Micron Technology, Inc. | FinFET device with reduced DIBL |
JP2006237376A (ja) * | 2005-02-25 | 2006-09-07 | Toshiba Corp | 半導体装置およびその製造方法 |
US20060252191A1 (en) * | 2005-05-03 | 2006-11-09 | Advanced Micro Devices, Inc. | Methodology for deposition of doped SEG for raised source/drain regions |
-
2007
- 2007-06-26 FR FR0704568A patent/FR2918211A1/fr not_active Withdrawn
-
2008
- 2008-06-19 EP EP08158608A patent/EP2009682B1/de not_active Expired - Fee Related
- 2008-06-19 DE DE602008005959T patent/DE602008005959D1/de active Active
- 2008-06-25 US US12/146,166 patent/US7781315B2/en active Active
-
2010
- 2010-07-15 US US12/837,318 patent/US7960734B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20100276693A1 (en) | 2010-11-04 |
US20090001463A1 (en) | 2009-01-01 |
US7781315B2 (en) | 2010-08-24 |
FR2918211A1 (fr) | 2009-01-02 |
EP2009682B1 (de) | 2011-04-06 |
US7960734B2 (en) | 2011-06-14 |
EP2009682A1 (de) | 2008-12-31 |
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