DE602005027306D1 - Winkelgeschwindigkeitssensor - Google Patents

Winkelgeschwindigkeitssensor

Info

Publication number
DE602005027306D1
DE602005027306D1 DE602005027306T DE602005027306T DE602005027306D1 DE 602005027306 D1 DE602005027306 D1 DE 602005027306D1 DE 602005027306 T DE602005027306 T DE 602005027306T DE 602005027306 T DE602005027306 T DE 602005027306T DE 602005027306 D1 DE602005027306 D1 DE 602005027306D1
Authority
DE
Germany
Prior art keywords
speed sensor
angle speed
angle
sensor
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005027306T
Other languages
English (en)
Inventor
Satoshi Ohuchi
Keisuke Kuroda
Takeshi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Publication of DE602005027306D1 publication Critical patent/DE602005027306D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
DE602005027306T 2004-01-13 2005-01-07 Winkelgeschwindigkeitssensor Active DE602005027306D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004005267A JP4529444B2 (ja) 2004-01-13 2004-01-13 角速度センサ
PCT/JP2005/000108 WO2005068937A1 (ja) 2004-01-13 2005-01-07 角速度センサ

Publications (1)

Publication Number Publication Date
DE602005027306D1 true DE602005027306D1 (de) 2011-05-19

Family

ID=34792091

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005027306T Active DE602005027306D1 (de) 2004-01-13 2005-01-07 Winkelgeschwindigkeitssensor

Country Status (6)

Country Link
US (1) US7107843B2 (de)
EP (1) EP1705457B1 (de)
JP (1) JP4529444B2 (de)
CN (1) CN100494895C (de)
DE (1) DE602005027306D1 (de)
WO (1) WO2005068937A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005227214A (ja) * 2004-02-16 2005-08-25 Matsushita Electric Ind Co Ltd 角速度センサ及びそれを用いた自動車
JP4599848B2 (ja) * 2004-02-18 2010-12-15 パナソニック株式会社 角速度センサ
JP4631329B2 (ja) * 2004-07-01 2011-02-16 パナソニック株式会社 角速度センサ及びその製造方法
JP2006023186A (ja) * 2004-07-08 2006-01-26 Matsushita Electric Ind Co Ltd 角速度センサおよびその製造方法
JP5208373B2 (ja) 2006-04-12 2013-06-12 パナソニック株式会社 慣性力センサ
JP5003101B2 (ja) * 2006-10-27 2012-08-15 トヨタ自動車株式会社 ヨーレートセンサの励振回路の異常監視方法、及び、異常監視回路
JP2008157701A (ja) * 2006-12-22 2008-07-10 Sony Corp 圧電素子、振動型ジャイロセンサ、電子機器及び圧電素子の製造方法
JP4687643B2 (ja) * 2006-12-22 2011-05-25 パナソニック株式会社 角速度センサ
JP4415997B2 (ja) * 2007-03-19 2010-02-17 セイコーエプソン株式会社 角速度センサおよび電子機器
WO2009034682A1 (ja) * 2007-09-13 2009-03-19 Panasonic Corporation 角速度センサ
US8381590B2 (en) * 2008-01-29 2013-02-26 Sumitomo Precision Products Co., Ltd. Vibrating gyroscope using piezoelectric film and method for manufacturing same
KR101200652B1 (ko) * 2008-06-10 2013-01-09 가부시키가이샤 무라타 세이사쿠쇼 외력검지장치 및 배선 파단 검출방법
JP5523755B2 (ja) * 2009-02-11 2014-06-18 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ及びその製造方法
TWI398097B (zh) * 2009-11-18 2013-06-01 Wafer Mems Co Ltd 音叉型石英晶體諧振器
TWI420811B (zh) * 2009-11-18 2013-12-21 Wafer Mems Co Ltd 音叉型石英晶體諧振器
JP4600590B2 (ja) * 2009-12-22 2010-12-15 パナソニック株式会社 角速度センサ
FR2954489B1 (fr) * 2009-12-23 2014-08-01 Onera (Off Nat Aerospatiale) Electrodes et circuits electroniques associes pour gyrometre vibrant pizoelectrique
US8283988B2 (en) * 2010-02-25 2012-10-09 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5209076B2 (ja) * 2011-03-29 2013-06-12 パナソニック株式会社 慣性力センサ
JP2015224893A (ja) * 2014-05-26 2015-12-14 Tdk株式会社 角速度センサ
EP3273210B1 (de) * 2016-07-18 2022-05-18 VEGA Grieshaber KG Vibrationsgrenzstandsschalter und verfahren zur herstellung eines vibrationsgrenzstandsschalter

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2666505B2 (ja) * 1990-01-31 1997-10-22 松下電器産業株式会社 角速度センサ駆動装置
US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
JPH0783951A (ja) * 1993-09-13 1995-03-31 Matsushita Electric Ind Co Ltd 角速度センサ
EP0751888B1 (de) * 1994-03-25 1998-05-27 Siemens Aktiengesellschaft Schaltungsanordnung zum auswerten der signale eines giergeschwindigkeitssensors
US5719460A (en) * 1994-11-28 1998-02-17 Nippondenso Co., Ltd Angular velocity sensor
US6705151B2 (en) * 1995-05-30 2004-03-16 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP3409565B2 (ja) * 1996-03-01 2003-05-26 日産自動車株式会社 角速度センサの自己診断方法
JPH10339637A (ja) * 1997-06-06 1998-12-22 Nippon Soken Inc 振動型角速度検出装置
JP3191742B2 (ja) * 1997-09-25 2001-07-23 株式会社村田製作所 振動ジャイロ
JP2000088584A (ja) * 1998-09-17 2000-03-31 Denso Corp 角速度センサ
JP2000088578A (ja) * 1998-09-10 2000-03-31 Matsushita Electric Ind Co Ltd 角速度センサ
JP4075152B2 (ja) * 1998-09-16 2008-04-16 松下電器産業株式会社 角速度センサ
DE19845185B4 (de) * 1998-10-01 2005-05-04 Eads Deutschland Gmbh Sensor mit Resonanzstruktur sowie Vorrichtung und Verfahren zum Selbsttest eines derartigen Sensors
JP4449110B2 (ja) * 1999-08-18 2010-04-14 パナソニック株式会社 角速度センサ
JP2001221637A (ja) * 2000-02-04 2001-08-17 Toyota Motor Corp 物理量検出装置
JP3674467B2 (ja) * 2000-06-27 2005-07-20 株式会社村田製作所 振動ジャイロ及びそれを用いた電子装置
JP2002139322A (ja) * 2000-10-31 2002-05-17 Murata Mfg Co Ltd 振動ジャイロの自己診断方法、及び、振動ジャイロ及びそれを用いた電子装置
US6792792B2 (en) * 2001-06-04 2004-09-21 Kelsey-Hayes Company Diagnostic test for a resonant micro electro mechanical system
JP3807437B2 (ja) * 2002-06-10 2006-08-09 松下電器産業株式会社 角速度センサ

Also Published As

Publication number Publication date
EP1705457A1 (de) 2006-09-27
US7107843B2 (en) 2006-09-19
CN100494895C (zh) 2009-06-03
EP1705457B1 (de) 2011-04-06
WO2005068937A1 (ja) 2005-07-28
CN1764821A (zh) 2006-04-26
JP2005201652A (ja) 2005-07-28
EP1705457A4 (de) 2010-07-14
US20060117851A1 (en) 2006-06-08
JP4529444B2 (ja) 2010-08-25

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