DE602005022032D1 - Piezoelektrisches/Elektrostriktives Bauelement - Google Patents

Piezoelektrisches/Elektrostriktives Bauelement

Info

Publication number
DE602005022032D1
DE602005022032D1 DE200560022032 DE602005022032T DE602005022032D1 DE 602005022032 D1 DE602005022032 D1 DE 602005022032D1 DE 200560022032 DE200560022032 DE 200560022032 DE 602005022032 T DE602005022032 T DE 602005022032T DE 602005022032 D1 DE602005022032 D1 DE 602005022032D1
Authority
DE
Germany
Prior art keywords
piezoelectric
electrostrictive device
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200560022032
Other languages
German (de)
English (en)
Inventor
Tsutomu Nanataki
Kunihiko Yoshioka
Hirofumi Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE602005022032D1 publication Critical patent/DE602005022032D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
DE200560022032 2004-11-19 2005-11-18 Piezoelektrisches/Elektrostriktives Bauelement Expired - Lifetime DE602005022032D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004335750A JP2006147839A (ja) 2004-11-19 2004-11-19 圧電／電歪デバイス

Publications (1)

Publication Number Publication Date
DE602005022032D1 true DE602005022032D1 (de) 2010-08-12

Family

ID=35529354

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200560022032 Expired - Lifetime DE602005022032D1 (de) 2004-11-19 2005-11-18 Piezoelektrisches/Elektrostriktives Bauelement

Country Status (5)

Country Link
US (1) US7183694B2 (enExample)
EP (1) EP1659643B1 (enExample)
JP (1) JP2006147839A (enExample)
CN (1) CN1780009B (enExample)
DE (1) DE602005022032D1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4149444B2 (ja) * 2005-01-12 2008-09-10 富士通メディアデバイス株式会社 圧電薄膜共振子及びこれを用いたフィルタ
US7446542B2 (en) * 2005-03-04 2008-11-04 Omniprobe, Inc. Apparatus and method for automated stress testing of flip-chip packages
JP5088916B2 (ja) * 2005-10-28 2012-12-05 富士フイルム株式会社 無機膜基板の製造方法
US7629865B2 (en) * 2006-05-31 2009-12-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters
JP4965973B2 (ja) * 2006-11-08 2012-07-04 キヤノン株式会社 振動型アクチュエータ
JP4924336B2 (ja) * 2007-09-28 2012-04-25 ブラザー工業株式会社 液体移送装置及び圧電アクチュエータ
JP4715836B2 (ja) * 2007-11-15 2011-07-06 ソニー株式会社 圧電素子、角速度センサ、及び圧電素子の製造方法
US7915794B2 (en) 2007-11-15 2011-03-29 Sony Corporation Piezoelectric device having a tension stress, and angular velocity sensor
JP4735639B2 (ja) * 2007-11-15 2011-07-27 ソニー株式会社 圧電素子、角速度センサ、及び圧電素子の製造方法
JP5669452B2 (ja) * 2009-07-28 2015-02-12 キヤノン株式会社 振動体の製造方法
US8261618B2 (en) * 2010-11-22 2012-09-11 General Electric Company Device for measuring properties of working fluids
US20140184023A1 (en) * 2012-12-31 2014-07-03 Volcano Corporation Layout and Method of Singulating Miniature Ultrasonic Transducers
CN104237461B (zh) * 2014-07-31 2016-08-17 北京科技大学 一种充气预形变的电机械性能测试装置及测试方法
CN106291562A (zh) * 2015-05-30 2017-01-04 鸿富锦精密工业（深圳）有限公司 超声波感测器及其制造方法、超声波感测器阵列
CN205847241U (zh) * 2016-05-19 2016-12-28 瑞声科技(新加坡)有限公司 电子设备
CN107830877B (zh) * 2017-10-23 2019-06-28 大连理工大学 一种椭圆柔性基底的压电薄膜传感器
CN110240112B (zh) * 2018-03-09 2022-08-19 中国科学院苏州纳米技术与纳米仿生研究所 薄膜驱动结构、薄膜驱动结构的制造方法及喷墨装置
CN120880377B (zh) * 2025-09-28 2025-12-09 南京航空航天大学 机械谐振器、受迫谐振装置及制造方法与应用

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6049158A (en) * 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
JP3313531B2 (ja) * 1994-06-03 2002-08-12 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
CN1050229C (zh) * 1994-08-11 2000-03-08 日本碍子株式会社 压电/电致伸缩膜元件及其制作方法
CN1050008C (zh) * 1994-08-11 2000-03-01 日本碍子株式会社 压电/电致伸缩膜元件及其制作方法
JP3471447B2 (ja) * 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
JP3388060B2 (ja) 1994-11-25 2003-03-17 日本碍子株式会社 流体の特性測定用素子及び流体の特性測定装置
JP3501860B2 (ja) * 1994-12-21 2004-03-02 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
EP0810676B1 (en) * 1996-05-27 2002-08-28 Ngk Insulators, Ltd. Piezoelectric film-type element
JP3462400B2 (ja) 1998-09-14 2003-11-05 日本碍子株式会社 セラミックダイヤフラム構造体の製造方法
US6407481B1 (en) * 1999-03-05 2002-06-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having convexly curved diaphragm
JP2000351213A (ja) * 1999-06-14 2000-12-19 Minolta Co Ltd インクジェットヘッド及びインクジェット記録装置
JP3728623B2 (ja) 2001-03-02 2005-12-21 日本碍子株式会社 圧電／電歪膜型素子
JP3701902B2 (ja) * 2001-12-25 2005-10-05 株式会社Ｎｅｏｍａｘマテリアル 低比抵抗低熱膨張合金
JP2004119703A (ja) * 2002-09-26 2004-04-15 Matsushita Electric Ind Co Ltd 圧電素子の製造方法及びインクジェットヘッドの製造方法

Also Published As

Publication number Publication date
EP1659643A2 (en) 2006-05-24
US20060108897A1 (en) 2006-05-25
CN1780009A (zh) 2006-05-31
EP1659643B1 (en) 2010-06-30
EP1659643A3 (en) 2007-01-24
JP2006147839A (ja) 2006-06-08
US7183694B2 (en) 2007-02-27
CN1780009B (zh) 2010-05-05

Similar Documents

Publication Publication Date Title
DE602005022974D1 (de) Piezoelektrisches/Elektrostriktives Bauelement
EP1768256A4 (en) PIEZOELECTRIC COMPONENT
GB2431512B (en) Piezoelectric device
EP1814615A4 (en) Injection device
FR2900514B1 (fr) Vibrateur piezoelectrique
EP1882850A4 (en) Engine start device
DE602005016187D1 (de) Staubreduzierende Einrichtung
DE602005012730D1 (de) Lk-kommunikationsgerät
DE60335158D1 (de) Piezoelektrisches/elektrostriktives Bauelement
EP1884990A4 (en) Adhering apparatus
EP1887638A4 (en) PIEZOELECTRIC ELEMENT
DE602006002442D1 (de) Akustische oberflächenwellenvorrichtung
DE602005020028D1 (de) Piezoelektrischer aktuator und einrichtung
DE602005022032D1 (de) Piezoelektrisches/Elektrostriktives Bauelement
EP1760716A4 (en) TRAINING DEVICE
DE502006006917D1 (de) Antriebsvorrichtung
EP1760714A4 (en) CONTROL DEVICE
EP1791193A4 (en) PIEZOELECTRIC ACTUATOR
DE602005021277D1 (de) Piezoelektrisches/elektrostriktives filmartiges Bauelement
EP1858092A4 (en) PIEZOELECTRIC ELEMENT
DE502005007783D1 (de) Piezoelektrischen aktors
DE602004019009D1 (de) Mehrschichtiges piezoelektrisches/elektrostriktives Bauelement
DE502004011857D1 (de) Piezoaktor
DE502005000316D1 (de) Antriebsvorrichtung
DE602006013751D1 (de) Laminiertes piezoelektrisches/elektrostriktives Element