JP2006147839A - 圧電／電歪デバイス - Google Patents

圧電／電歪デバイス Download PDF

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Publication number
JP2006147839A
JP2006147839A JP2004335750A JP2004335750A JP2006147839A JP 2006147839 A JP2006147839 A JP 2006147839A JP 2004335750 A JP2004335750 A JP 2004335750A JP 2004335750 A JP2004335750 A JP 2004335750A JP 2006147839 A JP2006147839 A JP 2006147839A
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JP
Japan
Prior art keywords
piezoelectric
electrostrictive
diaphragm portion
thin diaphragm
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004335750A
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English (en)
Japanese (ja)
Other versions
JP2006147839A5 (enExample
Inventor
Tsutomu Nanataki
七瀧　　努
Kunihiko Yoshioka
邦彦 吉岡
Hirofumi Yamaguchi
浩文 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP2004335750A priority Critical patent/JP2006147839A/ja
Priority to CN2005101166452A priority patent/CN1780009B/zh
Priority to US11/282,013 priority patent/US7183694B2/en
Priority to DE200560022032 priority patent/DE602005022032D1/de
Priority to EP20050257120 priority patent/EP1659643B1/en
Publication of JP2006147839A publication Critical patent/JP2006147839A/ja
Publication of JP2006147839A5 publication Critical patent/JP2006147839A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2004335750A 2004-11-19 2004-11-19 圧電／電歪デバイス Pending JP2006147839A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004335750A JP2006147839A (ja) 2004-11-19 2004-11-19 圧電／電歪デバイス
CN2005101166452A CN1780009B (zh) 2004-11-19 2005-10-26 压电/电致伸缩设备
US11/282,013 US7183694B2 (en) 2004-11-19 2005-11-17 Piezoelectric/electrostrictive device
DE200560022032 DE602005022032D1 (de) 2004-11-19 2005-11-18 Piezoelektrisches/Elektrostriktives Bauelement
EP20050257120 EP1659643B1 (en) 2004-11-19 2005-11-18 Piezoelectric/Electrostrictive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004335750A JP2006147839A (ja) 2004-11-19 2004-11-19 圧電／電歪デバイス

Publications (2)

Publication Number Publication Date
JP2006147839A true JP2006147839A (ja) 2006-06-08
JP2006147839A5 JP2006147839A5 (enExample) 2007-12-13

Family

ID=35529354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004335750A Pending JP2006147839A (ja) 2004-11-19 2004-11-19 圧電／電歪デバイス

Country Status (5)

Country Link
US (1) US7183694B2 (enExample)
EP (1) EP1659643B1 (enExample)
JP (1) JP2006147839A (enExample)
CN (1) CN1780009B (enExample)
DE (1) DE602005022032D1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009123974A (ja) * 2007-11-15 2009-06-04 Sony Corp 圧電素子、角速度センサ、及び圧電素子の製造方法
JP2009123973A (ja) * 2007-11-15 2009-06-04 Sony Corp 圧電素子、角速度センサ、及び圧電素子の製造方法
US7915794B2 (en) 2007-11-15 2011-03-29 Sony Corporation Piezoelectric device having a tension stress, and angular velocity sensor
CN104237461A (zh) * 2014-07-31 2014-12-24 北京科技大学 一种充气预形变的电机械性能测试装置及测试方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4149444B2 (ja) * 2005-01-12 2008-09-10 富士通メディアデバイス株式会社 圧電薄膜共振子及びこれを用いたフィルタ
US7446542B2 (en) * 2005-03-04 2008-11-04 Omniprobe, Inc. Apparatus and method for automated stress testing of flip-chip packages
JP5088916B2 (ja) * 2005-10-28 2012-12-05 富士フイルム株式会社 無機膜基板の製造方法
US7629865B2 (en) * 2006-05-31 2009-12-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters
JP4965973B2 (ja) * 2006-11-08 2012-07-04 キヤノン株式会社 振動型アクチュエータ
JP4924336B2 (ja) * 2007-09-28 2012-04-25 ブラザー工業株式会社 液体移送装置及び圧電アクチュエータ
JP5669452B2 (ja) * 2009-07-28 2015-02-12 キヤノン株式会社 振動体の製造方法
US8261618B2 (en) * 2010-11-22 2012-09-11 General Electric Company Device for measuring properties of working fluids
US20140184023A1 (en) * 2012-12-31 2014-07-03 Volcano Corporation Layout and Method of Singulating Miniature Ultrasonic Transducers
CN106291562A (zh) * 2015-05-30 2017-01-04 鸿富锦精密工业（深圳）有限公司 超声波感测器及其制造方法、超声波感测器阵列
CN205847241U (zh) * 2016-05-19 2016-12-28 瑞声科技(新加坡)有限公司 电子设备
CN107830877B (zh) * 2017-10-23 2019-06-28 大连理工大学 一种椭圆柔性基底的压电薄膜传感器
CN110240112B (zh) * 2018-03-09 2022-08-19 中国科学院苏州纳米技术与纳米仿生研究所 薄膜驱动结构、薄膜驱动结构的制造方法及喷墨装置
CN120880377B (zh) * 2025-09-28 2025-12-09 南京航空航天大学 机械谐振器、受迫谐振装置及制造方法与应用

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0851241A (ja) * 1994-06-03 1996-02-20 Ngk Insulators Ltd 圧電／電歪膜型素子及びその製造方法
JPH08201265A (ja) * 1994-11-25 1996-08-09 Ngk Insulators Ltd 粘度測定装置及び流体の特性測定装置
JP2002249852A (ja) * 2001-12-25 2002-09-06 Sumitomo Special Metals Co Ltd 低比抵抗低熱膨張合金
JP2002261347A (ja) * 2001-03-02 2002-09-13 Ngk Insulators Ltd 圧電／電歪膜型素子
JP2004119703A (ja) * 2002-09-26 2004-04-15 Matsushita Electric Ind Co Ltd 圧電素子の製造方法及びインクジェットヘッドの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6049158A (en) * 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
CN1050229C (zh) * 1994-08-11 2000-03-08 日本碍子株式会社 压电/电致伸缩膜元件及其制作方法
CN1050008C (zh) * 1994-08-11 2000-03-01 日本碍子株式会社 压电/电致伸缩膜元件及其制作方法
JP3471447B2 (ja) * 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
JP3501860B2 (ja) * 1994-12-21 2004-03-02 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
EP0810676B1 (en) * 1996-05-27 2002-08-28 Ngk Insulators, Ltd. Piezoelectric film-type element
JP3462400B2 (ja) * 1998-09-14 2003-11-05 日本碍子株式会社 セラミックダイヤフラム構造体の製造方法
US6407481B1 (en) * 1999-03-05 2002-06-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having convexly curved diaphragm
JP2000351213A (ja) * 1999-06-14 2000-12-19 Minolta Co Ltd インクジェットヘッド及びインクジェット記録装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0851241A (ja) * 1994-06-03 1996-02-20 Ngk Insulators Ltd 圧電／電歪膜型素子及びその製造方法
JPH08201265A (ja) * 1994-11-25 1996-08-09 Ngk Insulators Ltd 粘度測定装置及び流体の特性測定装置
JP2002261347A (ja) * 2001-03-02 2002-09-13 Ngk Insulators Ltd 圧電／電歪膜型素子
JP2002249852A (ja) * 2001-12-25 2002-09-06 Sumitomo Special Metals Co Ltd 低比抵抗低熱膨張合金
JP2004119703A (ja) * 2002-09-26 2004-04-15 Matsushita Electric Ind Co Ltd 圧電素子の製造方法及びインクジェットヘッドの製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009123974A (ja) * 2007-11-15 2009-06-04 Sony Corp 圧電素子、角速度センサ、及び圧電素子の製造方法
JP2009123973A (ja) * 2007-11-15 2009-06-04 Sony Corp 圧電素子、角速度センサ、及び圧電素子の製造方法
US7915794B2 (en) 2007-11-15 2011-03-29 Sony Corporation Piezoelectric device having a tension stress, and angular velocity sensor
CN104237461A (zh) * 2014-07-31 2014-12-24 北京科技大学 一种充气预形变的电机械性能测试装置及测试方法
CN104237461B (zh) * 2014-07-31 2016-08-17 北京科技大学 一种充气预形变的电机械性能测试装置及测试方法

Also Published As

Publication number Publication date
DE602005022032D1 (de) 2010-08-12
US20060108897A1 (en) 2006-05-25
EP1659643B1 (en) 2010-06-30
CN1780009B (zh) 2010-05-05
US7183694B2 (en) 2007-02-27
CN1780009A (zh) 2006-05-31
EP1659643A3 (en) 2007-01-24
EP1659643A2 (en) 2006-05-24

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