DE602005015374D1 - Verfahren zur Herstellung eines piezoelektrischen Films, laminierte Struktur aus Substrat und piezoelektrischem Film, piezoelektrischer Aktor und Verfahren zu seiner Herstellung - Google Patents
Verfahren zur Herstellung eines piezoelektrischen Films, laminierte Struktur aus Substrat und piezoelektrischem Film, piezoelektrischer Aktor und Verfahren zu seiner HerstellungInfo
- Publication number
- DE602005015374D1 DE602005015374D1 DE200560015374 DE602005015374T DE602005015374D1 DE 602005015374 D1 DE602005015374 D1 DE 602005015374D1 DE 200560015374 DE200560015374 DE 200560015374 DE 602005015374 T DE602005015374 T DE 602005015374T DE 602005015374 D1 DE602005015374 D1 DE 602005015374D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- piezoelectric film
- piezoelectric
- substrate
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 2
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004099006A JP4849432B2 (ja) | 2004-03-30 | 2004-03-30 | 圧電膜の製造方法、基板と圧電膜との積層構造、圧電アクチュエータおよびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005015374D1 true DE602005015374D1 (de) | 2009-08-27 |
Family
ID=34879963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200560015374 Active DE602005015374D1 (de) | 2004-03-30 | 2005-03-24 | Verfahren zur Herstellung eines piezoelektrischen Films, laminierte Struktur aus Substrat und piezoelektrischem Film, piezoelektrischer Aktor und Verfahren zu seiner Herstellung |
Country Status (5)
Country | Link |
---|---|
US (1) | US7506441B2 (de) |
EP (1) | EP1583162B1 (de) |
JP (1) | JP4849432B2 (de) |
CN (1) | CN100476033C (de) |
DE (1) | DE602005015374D1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005011009A1 (ja) * | 2003-07-28 | 2005-02-03 | Kyocera Corporation | 積層型電子部品とその製造方法及び積層型圧電素子 |
JP2008252071A (ja) | 2007-03-06 | 2008-10-16 | Fujifilm Corp | 圧電素子とその製造方法、及び液体吐出装置 |
KR100834515B1 (ko) * | 2007-03-07 | 2008-06-02 | 삼성전기주식회사 | 금속 나노입자 에어로졸을 이용한 포토레지스트 적층기판의형성방법, 절연기판의 도금방법, 회로기판의 금속층의표면처리방법 및 적층 세라믹 콘덴서의 제조방법 |
JP2009164312A (ja) | 2007-12-29 | 2009-07-23 | Brother Ind Ltd | 圧電アクチュエータの製造方法及び液体吐出ヘッドの製造方法 |
JP2009184195A (ja) * | 2008-02-05 | 2009-08-20 | Brother Ind Ltd | フィルタの製造方法及び液体移送装置の製造方法 |
JP2010199508A (ja) * | 2009-02-27 | 2010-09-09 | Brother Ind Ltd | 圧電アクチュエータの製造方法、及び、液体移送装置の製造方法 |
PL2504149T3 (pl) * | 2009-11-24 | 2020-11-30 | Kalwar Cft Fusions-Technik Gmbh | Sposób obróbki powierzchni podłoża i urządzenie do realizacji sposobu |
DE102010055042B4 (de) * | 2010-12-17 | 2013-06-06 | Eads Deutschland Gmbh | Verfahren und Vorrichtung zur Bildung eines Elektrolytfilmes auf einer Elektrodenoberfläche |
WO2016007249A1 (en) * | 2014-06-05 | 2016-01-14 | University Of Florida Research Foundation, Inc. | Laterally curved actuators of shape memory materials |
JP6912463B2 (ja) * | 2015-10-28 | 2021-08-04 | コーボ ユーエス,インコーポレイティド | バルク音波(baw)共振器と基板を貫通する流体ビアを有するセンサー装置 |
DE102016216278A1 (de) * | 2016-08-30 | 2018-03-01 | Siemens Aktiengesellschaft | Verfahren zur Aerosoldeposition und Verfahren zur Herstellung eines Keramikteils und Vorrichtung zur Herstellung von Schichten |
FR3130073A1 (fr) * | 2021-12-06 | 2023-06-09 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procédé de transfert d’une couche |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2825366B2 (ja) * | 1991-05-23 | 1998-11-18 | 松下電器産業株式会社 | 圧電セラミックス |
US5221870A (en) * | 1991-09-30 | 1993-06-22 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device |
JP3162584B2 (ja) * | 1994-02-14 | 2001-05-08 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
KR0157924B1 (ko) * | 1995-12-23 | 1998-12-15 | 문정환 | 데이타 전송 시스템 및 그 방법 |
JPH09184080A (ja) * | 1995-12-27 | 1997-07-15 | Vacuum Metallurgical Co Ltd | 超微粒子による薄膜形成方法、およびその薄膜形成装置 |
US5945293A (en) * | 1997-10-09 | 1999-08-31 | Coulter International Corp. | Protein-colloidal metal-aminodextran coated particle and methods of preparation and use |
JP3308492B2 (ja) | 1998-05-13 | 2002-07-29 | セイコーインスツルメンツ株式会社 | 圧電アクチュエータ |
US6013311A (en) * | 1998-06-08 | 2000-01-11 | Eastman Kodak Company | Using morphological changes to make piezoelectric transducers |
JP4357659B2 (ja) * | 1998-10-26 | 2009-11-04 | セイコーインスツル株式会社 | 圧電体装置及びその製造方法 |
DE60040107D1 (de) * | 1999-01-29 | 2008-10-09 | Seiko Epson Corp | Piezoelektrischer Transducer und Anzeigevorrichtung mit elektrophoretischer Tinte, die den piezoelektrischen Transducer benutzt |
US6531187B2 (en) * | 1999-04-23 | 2003-03-11 | Agency Of Industrial Science And Technology | Method of forming a shaped body of brittle ultra fine particles with mechanical impact force and without heating |
US6827634B2 (en) * | 2000-05-22 | 2004-12-07 | Agency Of Industrial Science And Technology | Ultra fine particle film forming method and apparatus |
JP2000328223A (ja) | 1999-05-25 | 2000-11-28 | Agency Of Ind Science & Technol | 積層構造体及びその原料粉、及び、圧電アクチュエータ |
JP2002235181A (ja) * | 1999-10-12 | 2002-08-23 | National Institute Of Advanced Industrial & Technology | 複合構造物及びその製造方法並びに作製装置 |
CN1243848C (zh) * | 1999-10-12 | 2006-03-01 | 东陶机器株式会社 | 复合构造物及其制作方法和制作装置 |
JP2001152360A (ja) * | 1999-11-25 | 2001-06-05 | Ricoh Co Ltd | セラミックス誘電体膜の形成方法、セラミックス誘電体膜/基板の積層構造体、及び電気−機械変換素子 |
JP3835960B2 (ja) * | 1999-11-26 | 2006-10-18 | 株式会社リコー | 圧電セラミックス厚膜構造 |
US6801958B2 (en) * | 1999-12-15 | 2004-10-05 | Texas Instruments Incorporated | Method and system for data transfer |
JP3338422B2 (ja) * | 2000-07-06 | 2002-10-28 | 独立行政法人産業技術総合研究所 | 超微粒子材料吹き付け成膜方法 |
US6799200B1 (en) * | 2000-07-18 | 2004-09-28 | International Business Machines Corporaiton | Mechanisms for efficient message passing with copy avoidance in a distributed system |
US6297579B1 (en) * | 2000-11-13 | 2001-10-02 | Sandia National Laboratories | Electron gun controlled smart structure |
JP4118589B2 (ja) * | 2001-04-12 | 2008-07-16 | 独立行政法人産業技術総合研究所 | 樹脂と脆性材料との複合構造物及びその作製方法 |
JP2004085974A (ja) * | 2002-08-28 | 2004-03-18 | Matsushita Electric Ind Co Ltd | 空間光変調器 |
-
2004
- 2004-03-30 JP JP2004099006A patent/JP4849432B2/ja not_active Expired - Lifetime
-
2005
- 2005-03-24 EP EP20050006659 patent/EP1583162B1/de not_active Expired - Fee Related
- 2005-03-24 DE DE200560015374 patent/DE602005015374D1/de active Active
- 2005-03-28 US US11/090,201 patent/US7506441B2/en not_active Expired - Fee Related
- 2005-03-30 CN CNB2005100588442A patent/CN100476033C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1583162A3 (de) | 2006-04-19 |
CN100476033C (zh) | 2009-04-08 |
JP4849432B2 (ja) | 2012-01-11 |
US20050225208A1 (en) | 2005-10-13 |
JP2005286153A (ja) | 2005-10-13 |
US7506441B2 (en) | 2009-03-24 |
CN1676667A (zh) | 2005-10-05 |
EP1583162A2 (de) | 2005-10-05 |
EP1583162B1 (de) | 2009-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |