DE602005011699D1 - Teilchenoptisches Gerät ausgerüstet mit Linsen mit permanentmagnetisches Material - Google Patents

Teilchenoptisches Gerät ausgerüstet mit Linsen mit permanentmagnetisches Material

Info

Publication number
DE602005011699D1
DE602005011699D1 DE602005011699T DE602005011699T DE602005011699D1 DE 602005011699 D1 DE602005011699 D1 DE 602005011699D1 DE 602005011699 T DE602005011699 T DE 602005011699T DE 602005011699 T DE602005011699 T DE 602005011699T DE 602005011699 D1 DE602005011699 D1 DE 602005011699D1
Authority
DE
Germany
Prior art keywords
lenses
particle
magnetic material
permanent magnetic
device equipped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005011699T
Other languages
English (en)
Inventor
Bart Buijsse
Theodorus Hubertus J Bisschops
Mark Theo Meuwese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of DE602005011699D1 publication Critical patent/DE602005011699D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/143—Permanent magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE602005011699T 2004-04-22 2005-04-15 Teilchenoptisches Gerät ausgerüstet mit Linsen mit permanentmagnetisches Material Active DE602005011699D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1026006A NL1026006C2 (nl) 2004-04-22 2004-04-22 Deeltjes-optisch apparaat voorzien van lenzen met permanent magnetisch materiaal.

Publications (1)

Publication Number Publication Date
DE602005011699D1 true DE602005011699D1 (de) 2009-01-29

Family

ID=34938176

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005011699T Active DE602005011699D1 (de) 2004-04-22 2005-04-15 Teilchenoptisches Gerät ausgerüstet mit Linsen mit permanentmagnetisches Material

Country Status (6)

Country Link
US (2) US7064325B2 (de)
EP (1) EP1589561B1 (de)
JP (1) JP2005310778A (de)
CN (1) CN1716512B (de)
DE (1) DE602005011699D1 (de)
NL (1) NL1026006C2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6897443B2 (en) * 2003-06-02 2005-05-24 Harald Gross Portable scanning electron microscope
NL1026006C2 (nl) * 2004-04-22 2005-10-25 Fei Co Deeltjes-optisch apparaat voorzien van lenzen met permanent magnetisch materiaal.
EP2267754B1 (de) 2005-11-28 2012-11-21 Carl Zeiss SMT GmbH Teilchenoptisches Inspektionssystem
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
KR101118692B1 (ko) * 2006-10-11 2012-03-12 전자빔기술센터 주식회사 자기 렌즈층을 포함한 전자 칼럼
JP4920370B2 (ja) * 2006-10-30 2012-04-18 株式会社日立製作所 透過型電子顕微鏡の情報伝達限界測定法およびこの測定法が適用された透過型電子顕微鏡
CA2725544C (en) * 2008-05-30 2017-12-19 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University A radio-frequency-free hybrid electrostatic/magnetostatic cell for transporting, trapping, and dissociating ions in mass spectrometers
JP5259688B2 (ja) 2010-12-09 2013-08-07 本田技研工業株式会社 走査型電子顕微鏡
US8319181B2 (en) * 2011-01-30 2012-11-27 Fei Company System and method for localization of large numbers of fluorescent markers in biological samples
CN103474308A (zh) * 2013-09-30 2013-12-25 桂林狮达机电技术工程有限公司 带有电磁合轴装置的电子枪
JP6258474B2 (ja) 2014-04-28 2018-01-10 株式会社日立ハイテクノロジーズ 電子線装置
TWI502616B (zh) * 2014-08-08 2015-10-01 Nat Univ Tsing Hua 桌上型電子顯微鏡以及其廣域可調式磁透鏡
US10338002B1 (en) 2016-02-01 2019-07-02 Kla-Tencor Corporation Methods and systems for selecting recipe for defect inspection
US10211021B2 (en) * 2016-04-11 2019-02-19 Kla-Tencor Corporation Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability
JP6718782B2 (ja) * 2016-09-21 2020-07-08 日本電子株式会社 対物レンズおよび透過電子顕微鏡
US10410827B2 (en) * 2017-05-03 2019-09-10 Fei Company Gun lens design in a charged particle microscope
CN111033676B (zh) * 2017-09-04 2022-08-30 株式会社日立高新技术 带电粒子线装置
WO2020099095A1 (en) * 2018-11-16 2020-05-22 Asml Netherlands B.V. Electromagnetic compound lens and charged particle optical system with such a lens
US11417493B2 (en) * 2020-12-18 2022-08-16 Fei Company Counter pole with permanent magnets

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE689388C (de) * 1934-07-30 1940-03-19 Lorenz Akt Ges C Anordnung zur Ablenkung des Kathodenstrahls in Braunschen Roehren
US3755706A (en) 1972-03-20 1973-08-28 Varian Associates Miniaturized traveling wave tube
DE2333441C3 (de) 1973-06-30 1975-12-18 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Lauffeldröhre
GB2079035A (en) * 1980-06-10 1982-01-13 Philips Electronic Associated Deflection system for charged-particle beam
JPS6091544A (ja) * 1983-10-24 1985-05-22 Anelva Corp オ−ジエ分析装置
JPS61101944A (ja) * 1984-10-25 1986-05-20 Nippon Telegr & Teleph Corp <Ntt> 荷電粒子ビ−ム用集束装置
JPH01246755A (ja) * 1988-03-29 1989-10-02 Shinko Electric Co Ltd 電子ビーム発生装置
US5374817A (en) * 1988-05-11 1994-12-20 Symbol Technologies, Inc. Pre-objective scanner with flexible optical support
JPH01296549A (ja) * 1988-05-25 1989-11-29 Hitachi Ltd 荷電粒子光学系
CA1308203C (en) * 1989-06-01 1992-09-29 Nanoquest (Canada) Inc. Magnification compensation apparatus
JP2957610B2 (ja) * 1989-10-23 1999-10-06 株式会社日立製作所 走査形電子顕微鏡
US5146090A (en) * 1990-06-11 1992-09-08 Siemens Aktiengesellschaft Particle beam apparatus having an immersion lens arranged in an intermediate image of the beam
US5300776A (en) * 1992-09-16 1994-04-05 Gatan, Inc. Autoadjusting electron microscope
SG74599A1 (en) * 1997-09-27 2000-08-22 Inst Of Material Res & Enginee Portable high resolution scanning electron microscope column using permanent magnet electron lenses
JP2000173889A (ja) * 1998-12-02 2000-06-23 Canon Inc 電子線露光装置、電子レンズ、ならびにデバイス製造方法
JP3849353B2 (ja) * 1999-06-21 2006-11-22 株式会社日立製作所 透過型電子顕微鏡
US6891167B2 (en) * 2000-06-15 2005-05-10 Kla-Tencor Technologies Apparatus and method for applying feedback control to a magnetic lens
WO2001097245A2 (en) * 2000-06-15 2001-12-20 Kla-Tencor, Inc. Sectored magnetic lens and method of use
US6552340B1 (en) * 2000-10-12 2003-04-22 Nion Co. Autoadjusting charged-particle probe-forming apparatus
JP2003346697A (ja) * 2002-05-24 2003-12-05 Technex Lab Co Ltd 永久磁石レンズを使用した走査電子顕微鏡
NL1023260C1 (nl) * 2003-04-24 2004-10-27 Fei Co Deeltjes-optisch apparaat met een permanent magnetische lens en een elektrostatische lens.
NL1026006C2 (nl) * 2004-04-22 2005-10-25 Fei Co Deeltjes-optisch apparaat voorzien van lenzen met permanent magnetisch materiaal.
JP4215006B2 (ja) * 2005-02-09 2009-01-28 株式会社デンソーウェーブ 光学情報読取装置

Also Published As

Publication number Publication date
US7285785B2 (en) 2007-10-23
CN1716512A (zh) 2006-01-04
EP1589561B1 (de) 2008-12-17
EP1589561A1 (de) 2005-10-26
US7064325B2 (en) 2006-06-20
JP2005310778A (ja) 2005-11-04
NL1026006C2 (nl) 2005-10-25
US20050236568A1 (en) 2005-10-27
CN1716512B (zh) 2011-07-06
US20060197030A1 (en) 2006-09-07

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