DE602005006599D1 - Vorrichtung zur erzeugung von extremem uv-licht und anwendung auf eine lithografiequelle mit extremer uv-strahlung - Google Patents
Vorrichtung zur erzeugung von extremem uv-licht und anwendung auf eine lithografiequelle mit extremer uv-strahlungInfo
- Publication number
- DE602005006599D1 DE602005006599D1 DE602005006599T DE602005006599T DE602005006599D1 DE 602005006599 D1 DE602005006599 D1 DE 602005006599D1 DE 602005006599 T DE602005006599 T DE 602005006599T DE 602005006599 T DE602005006599 T DE 602005006599T DE 602005006599 D1 DE602005006599 D1 DE 602005006599D1
- Authority
- DE
- Germany
- Prior art keywords
- target
- laser beams
- focused
- extreme
- collection axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
- G03F7/70166—Capillary or channel elements, e.g. nested extreme ultraviolet [EUV] mirrors or shells, optical fibers or light guides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- X-Ray Techniques (AREA)
- Photoreceptors In Electrophotography (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0406429A FR2871622B1 (fr) | 2004-06-14 | 2004-06-14 | Dispositif de generation de lumiere dans l'extreme ultraviolet et application a une source de lithographie par rayonnement dans l'extreme ultraviolet |
PCT/FR2005/001465 WO2006000718A1 (fr) | 2004-06-14 | 2005-06-14 | Dispositif de generation de lumiere dans l' extreme ultraviolet et application a une source de lithographie par rayonnement dans l'extreme ultraviolet |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005006599D1 true DE602005006599D1 (de) | 2008-06-19 |
Family
ID=34946881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005006599T Active DE602005006599D1 (de) | 2004-06-14 | 2005-06-14 | Vorrichtung zur erzeugung von extremem uv-licht und anwendung auf eine lithografiequelle mit extremer uv-strahlung |
Country Status (10)
Country | Link |
---|---|
US (1) | US7399981B2 (de) |
EP (1) | EP1800188B1 (de) |
JP (1) | JP2008503078A (de) |
KR (1) | KR20070058386A (de) |
CN (1) | CN100541336C (de) |
AT (1) | ATE394708T1 (de) |
DE (1) | DE602005006599D1 (de) |
FR (1) | FR2871622B1 (de) |
RU (1) | RU2006143322A (de) |
WO (1) | WO2006000718A1 (de) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7439530B2 (en) * | 2005-06-29 | 2008-10-21 | Cymer, Inc. | LPP EUV light source drive laser system |
US7034320B2 (en) * | 2003-03-20 | 2006-04-25 | Intel Corporation | Dual hemispherical collectors |
US7482609B2 (en) * | 2005-02-28 | 2009-01-27 | Cymer, Inc. | LPP EUV light source drive laser system |
EP2083328B1 (de) * | 2008-01-28 | 2013-06-19 | Media Lario s.r.l. | Kollektor für streifenden Strahlungseinfall geeignet für lasererzeugte Plasmaquellen |
EP2083327B1 (de) * | 2008-01-28 | 2017-11-29 | Media Lario s.r.l. | Optische Systeme mit verbessertem Kollektor mit streifendem Einfall für EUV- und Röntgenstrahlungsanwendungen |
JP5368764B2 (ja) * | 2008-10-16 | 2013-12-18 | ギガフォトン株式会社 | 極端紫外光源装置及び極端紫外光の生成方法 |
EP2182412A1 (de) * | 2008-11-04 | 2010-05-05 | ASML Netherlands B.V. | Strahlungsquelle und lithografische Vorrichtung |
DE102009047712A1 (de) * | 2009-12-09 | 2011-06-16 | Carl Zeiss Smt Gmbh | EUV-Lichtquelle für eine Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage |
JP2013519211A (ja) | 2010-02-09 | 2013-05-23 | エナジェティック・テクノロジー・インコーポレーテッド | レーザー駆動の光源 |
US8587768B2 (en) | 2010-04-05 | 2013-11-19 | Media Lario S.R.L. | EUV collector system with enhanced EUV radiation collection |
DE102010028655A1 (de) | 2010-05-06 | 2011-11-10 | Carl Zeiss Smt Gmbh | EUV-Kollektor |
US20120050706A1 (en) * | 2010-08-30 | 2012-03-01 | Media Lario S.R.L | Source-collector module with GIC mirror and xenon ice EUV LPP target system |
US20120050707A1 (en) * | 2010-08-30 | 2012-03-01 | Media Lario S.R.L | Source-collector module with GIC mirror and tin wire EUV LPP target system |
US8258485B2 (en) * | 2010-08-30 | 2012-09-04 | Media Lario Srl | Source-collector module with GIC mirror and xenon liquid EUV LPP target system |
DE102010047419B4 (de) * | 2010-10-01 | 2013-09-05 | Xtreme Technologies Gmbh | Verfahren und Vorrichtung zur Erzeugung von EUV-Strahlung aus einem Gasentladungsplasma |
WO2013029895A1 (en) | 2011-09-02 | 2013-03-07 | Asml Netherlands B.V. | Radiation source |
KR101958857B1 (ko) | 2011-09-02 | 2019-03-15 | 에이에스엠엘 네델란즈 비.브이. | 방사선 소스 |
US8895946B2 (en) | 2012-02-11 | 2014-11-25 | Media Lario S.R.L. | Source-collector modules for EUV lithography employing a GIC mirror and a LPP source |
CN103079327B (zh) * | 2013-01-05 | 2015-09-09 | 中国科学院微电子研究所 | 一种靶源预整形增强的极紫外光发生装置 |
US9127981B2 (en) * | 2013-08-06 | 2015-09-08 | Cymer, Llc | System and method for return beam metrology with optical switch |
IL234729B (en) | 2013-09-20 | 2021-02-28 | Asml Netherlands Bv | A light source operated by a laser and a method using a mode mixer |
IL234727B (en) | 2013-09-20 | 2020-09-30 | Asml Netherlands Bv | A light source operated by a laser in an optical system corrected for deviations and the method of manufacturing the system as mentioned |
US9723703B2 (en) * | 2014-04-01 | 2017-08-01 | Kla-Tencor Corporation | System and method for transverse pumping of laser-sustained plasma |
US10186416B2 (en) | 2014-05-15 | 2019-01-22 | Excelitas Technologies Corp. | Apparatus and a method for operating a variable pressure sealed beam lamp |
EP3457429B1 (de) | 2014-05-15 | 2023-11-08 | Excelitas Technologies Corp. | Lasergesteuerte abgedichtete strahllampe mit einstellbarem druck |
US9741553B2 (en) | 2014-05-15 | 2017-08-22 | Excelitas Technologies Corp. | Elliptical and dual parabolic laser driven sealed beam lamps |
KR102211898B1 (ko) * | 2014-11-27 | 2021-02-05 | 삼성전자주식회사 | 노광 장치용 액체 누출 감지 장치 및 방법 |
US10034362B2 (en) * | 2014-12-16 | 2018-07-24 | Kla-Tencor Corporation | Plasma-based light source |
WO2016148608A1 (ru) * | 2015-03-16 | 2016-09-22 | Игорь Георгиевич РУДОЙ | Источник широкополосного оптического излучения с высокой яркостью |
US9576785B2 (en) | 2015-05-14 | 2017-02-21 | Excelitas Technologies Corp. | Electrodeless single CW laser driven xenon lamp |
US10008378B2 (en) | 2015-05-14 | 2018-06-26 | Excelitas Technologies Corp. | Laser driven sealed beam lamp with improved stability |
US10057973B2 (en) | 2015-05-14 | 2018-08-21 | Excelitas Technologies Corp. | Electrodeless single low power CW laser driven plasma lamp |
CN104914680B (zh) * | 2015-05-25 | 2017-03-08 | 中国科学院上海光学精密机械研究所 | 基于溶胶射流靶的lpp‑euv光源系统 |
DE102016205893A1 (de) * | 2016-04-08 | 2017-10-12 | Carl Zeiss Smt Gmbh | EUV-Kollektor zum Einsatz in einer EUV-Projektionsbelichtungsanlage |
RU2658314C1 (ru) * | 2016-06-14 | 2018-06-20 | Общество С Ограниченной Ответственностью "Эуф Лабс" | Высокояркостный источник эуф-излучения и способ генерации излучения из лазерной плазмы |
US9996009B2 (en) | 2016-07-27 | 2018-06-12 | Samsung Electronics Co., Ltd. | Extreme ultraviolet (EUV) exposure system and method of manufacturing semiconductor device using the same |
US10959318B2 (en) * | 2018-01-10 | 2021-03-23 | Kla-Tencor Corporation | X-ray metrology system with broadband laser produced plasma illuminator |
US10109473B1 (en) | 2018-01-26 | 2018-10-23 | Excelitas Technologies Corp. | Mechanically sealed tube for laser sustained plasma lamp and production method for same |
US20200235544A1 (en) * | 2019-01-22 | 2020-07-23 | Coherent, Inc. | Diode-pumped solid-state laser apparatus for laser annealing |
US11086226B1 (en) * | 2020-06-03 | 2021-08-10 | Lawrence Livermore National Security, Llc | Liquid tamped targets for extreme ultraviolet lithography |
RU2765486C1 (ru) * | 2021-06-07 | 2022-01-31 | Федеральное государственное бюджетное учреждение науки Физико-технический институт им. А.Ф. Иоффе Российской академии наук | Термоядерная мишень непрямого инициирования |
CN113433805B (zh) * | 2021-07-26 | 2023-04-14 | 广东省智能机器人研究院 | 极紫外光光刻方法和系统 |
CN113433804B (zh) * | 2021-07-26 | 2023-04-14 | 广东省智能机器人研究院 | 极紫外光光刻方法和系统 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4063088A (en) * | 1974-02-25 | 1977-12-13 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of and means for testing a glancing-incidence mirror system of an X-ray telescope |
US4704718A (en) * | 1985-11-01 | 1987-11-03 | Princeton University | Apparatus and method for generating soft X-ray lasing action in a confined plasma column through the use of a picosecond laser |
JPH0675200B2 (ja) * | 1990-05-18 | 1994-09-21 | 株式会社オーク製作所 | 露光装置用冷却構造 |
WO1999063790A1 (fr) * | 1998-05-29 | 1999-12-09 | Nikon Corporation | Source lumineuse plasmatique excitee au laser, appareil d'exposition et son procede de fabrication, et procede de fabrication d'un dispositif |
US6307913B1 (en) * | 1998-10-27 | 2001-10-23 | Jmar Research, Inc. | Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation |
US6831963B2 (en) * | 2000-10-20 | 2004-12-14 | University Of Central Florida | EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
FR2802311B1 (fr) * | 1999-12-08 | 2002-01-18 | Commissariat Energie Atomique | Dispositif de lithographie utilisant une source de rayonnement dans le domaine extreme ultraviolet et des miroirs multicouches a large bande spectrale dans ce domaine |
FR2823949A1 (fr) * | 2001-04-18 | 2002-10-25 | Commissariat Energie Atomique | Procede et dispositif de generation de lumiere dans l'extreme ultraviolet notamment pour la lithographie |
US6633048B2 (en) * | 2001-05-03 | 2003-10-14 | Northrop Grumman Corporation | High output extreme ultraviolet source |
JP3944008B2 (ja) * | 2002-06-28 | 2007-07-11 | キヤノン株式会社 | 反射ミラー装置及び露光装置及びデバイス製造方法 |
KR100589236B1 (ko) * | 2002-08-15 | 2006-06-14 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 투영장치 및 상기 장치에 사용하는 반사기조립체 |
US6973164B2 (en) * | 2003-06-26 | 2005-12-06 | University Of Central Florida Research Foundation, Inc. | Laser-produced plasma EUV light source with pre-pulse enhancement |
EP1658615B1 (de) * | 2003-08-27 | 2009-10-14 | Carl Zeiss SMT AG | Schiefspiegliges normal-incidence-kollektorsystem für lichtquellen, insbesondere euv-plasmaentladungsquellen |
-
2004
- 2004-06-14 FR FR0406429A patent/FR2871622B1/fr not_active Expired - Fee Related
-
2005
- 2005-06-13 US US11/151,696 patent/US7399981B2/en not_active Expired - Fee Related
- 2005-06-14 EP EP05777195A patent/EP1800188B1/de not_active Not-in-force
- 2005-06-14 KR KR1020067027662A patent/KR20070058386A/ko not_active Application Discontinuation
- 2005-06-14 DE DE602005006599T patent/DE602005006599D1/de active Active
- 2005-06-14 AT AT05777195T patent/ATE394708T1/de not_active IP Right Cessation
- 2005-06-14 JP JP2007515990A patent/JP2008503078A/ja not_active Withdrawn
- 2005-06-14 RU RU2006143322/28A patent/RU2006143322A/ru not_active Application Discontinuation
- 2005-06-14 WO PCT/FR2005/001465 patent/WO2006000718A1/fr active IP Right Grant
- 2005-06-14 CN CNB2005800195526A patent/CN100541336C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ATE394708T1 (de) | 2008-05-15 |
KR20070058386A (ko) | 2007-06-08 |
CN100541336C (zh) | 2009-09-16 |
FR2871622A1 (fr) | 2005-12-16 |
EP1800188B1 (de) | 2008-05-07 |
US20060039435A1 (en) | 2006-02-23 |
EP1800188A1 (de) | 2007-06-27 |
CN101019078A (zh) | 2007-08-15 |
JP2008503078A (ja) | 2008-01-31 |
RU2006143322A (ru) | 2008-07-20 |
FR2871622B1 (fr) | 2008-09-12 |
US7399981B2 (en) | 2008-07-15 |
WO2006000718A1 (fr) | 2006-01-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |