DE602004021314D1 - Piezoelektrisches/elektrostriktives Filmbauelement und piezoelektrische/elektrostriktive Keramikzusammensetzung - Google Patents

Piezoelektrisches/elektrostriktives Filmbauelement und piezoelektrische/elektrostriktive Keramikzusammensetzung

Info

Publication number
DE602004021314D1
DE602004021314D1 DE200460021314 DE602004021314T DE602004021314D1 DE 602004021314 D1 DE602004021314 D1 DE 602004021314D1 DE 200460021314 DE200460021314 DE 200460021314 DE 602004021314 T DE602004021314 T DE 602004021314T DE 602004021314 D1 DE602004021314 D1 DE 602004021314D1
Authority
DE
Germany
Prior art keywords
piezoelectric
electrostrictive
ceramic composition
film device
electrostrictive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE200460021314
Other languages
English (en)
Inventor
Toshikatsu Kashiwaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE602004021314D1 publication Critical patent/DE602004021314D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE200460021314 2003-03-31 2004-03-17 Piezoelektrisches/elektrostriktives Filmbauelement und piezoelektrische/elektrostriktive Keramikzusammensetzung Expired - Fee Related DE602004021314D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003096313A JP3999156B2 (ja) 2003-03-31 2003-03-31 圧電／電歪膜型素子及び圧電／電歪磁器組成物

Publications (1)

Publication Number Publication Date
DE602004021314D1 true DE602004021314D1 (de) 2009-07-16

Family

ID=32959544

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460021314 Expired - Fee Related DE602004021314D1 (de) 2003-03-31 2004-03-17 Piezoelektrisches/elektrostriktives Filmbauelement und piezoelektrische/elektrostriktive Keramikzusammensetzung

Country Status (4)

Country Link
US (1) US7019441B2 (de)
EP (1) EP1471584B1 (de)
JP (1) JP3999156B2 (de)
DE (1) DE602004021314D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005170693A (ja) 2003-12-08 2005-06-30 Ngk Insulators Ltd 圧電／電歪磁器組成物、圧電／電歪体、及び圧電／電歪膜型素子
US7276462B2 (en) * 2004-08-25 2007-10-02 Ngk Insulators, Ltd. Dielectric composition and dielectric film element
JP4782412B2 (ja) * 2004-12-24 2011-09-28 日本碍子株式会社 圧電／電歪体、圧電／電歪積層体、及び圧電／電歪膜型アクチュエータ
JP4782413B2 (ja) * 2004-12-24 2011-09-28 日本碍子株式会社 圧電／電歪体、圧電／電歪積層体、及び圧電／電歪膜型アクチュエータ
JP4537212B2 (ja) 2005-01-11 2010-09-01 日本碍子株式会社 圧電／電歪素子の製造方法
JP2007001838A (ja) * 2005-06-27 2007-01-11 Ngk Insulators Ltd 圧電／電歪磁器組成物、圧電／電歪体、及び圧電／電歪膜型素子
FR2895986B1 (fr) * 2006-01-06 2008-09-05 Centre Nat Rech Scient Preparation de microcomposants multicouches par la methode de la couche epaisse sacrificielle
US7545084B2 (en) * 2006-07-20 2009-06-09 Ngk Insulators, Ltd. Piezoelectric/electrostrictive ceramic composition, piezoelectric/electrostrictive device, and method of producing the same
US7911113B1 (en) * 2009-09-02 2011-03-22 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and method of manufacturing piezoelectric/electrostrictive element
US20140184023A1 (en) * 2012-12-31 2014-07-03 Volcano Corporation Layout and Method of Singulating Miniature Ultrasonic Transducers
CN112174663B (zh) * 2020-09-21 2022-10-18 李茂洪 一种高性能压电陶瓷及其制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06191941A (ja) 1992-12-25 1994-07-12 Sumitomo Metal Ind Ltd 圧電材料
US5825121A (en) * 1994-07-08 1998-10-20 Seiko Epson Corporation Thin film piezoelectric device and ink jet recording head comprising the same
JP3471447B2 (ja) * 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
EP0727832B1 (de) * 1995-02-20 2001-11-28 Seiko Epson Corporation Verfahren zur Herstellung einer piezoelektrischen Dünnschicht
US6140746A (en) * 1995-04-03 2000-10-31 Seiko Epson Corporation Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film
US6091183A (en) * 1995-06-06 2000-07-18 Kasei Optonix, Ltd. Piezoelectric element and method for driving the same
JP3890634B2 (ja) * 1995-09-19 2007-03-07 セイコーエプソン株式会社 圧電体薄膜素子及びインクジェット式記録ヘッド
JP3260116B2 (ja) 1997-05-12 2002-02-25 松下電器産業株式会社 圧電材料およびその製造方法およびそれを用いた圧電振動子および圧電発音体
JP4327942B2 (ja) * 1999-05-20 2009-09-09 Ｔｄｋ株式会社 薄膜圧電素子
JP4100847B2 (ja) 1999-12-28 2008-06-11 Ｔｄｋ株式会社 圧電セラミック組成物
EP1273099A1 (de) * 2000-04-06 2003-01-08 Koninklijke Philips Electronics N.V. Abstimmbare filteranordnung mit resonatoren
US6610427B2 (en) * 2000-09-20 2003-08-26 Ngk Insulators, Ltd. Piezoelectric element and process for production thereof
JP3512379B2 (ja) * 2000-09-20 2004-03-29 日本碍子株式会社 圧電体素子、及びその製造方法
JP3953806B2 (ja) * 2001-12-20 2007-08-08 日本碍子株式会社 圧電素子、及びその製造方法
WO2003067673A1 (fr) 2002-02-08 2003-08-14 Ngk Insulators, Ltd. Element piezoelectrique multicouche et son procede de fabrication

Also Published As

Publication number Publication date
US20040189152A1 (en) 2004-09-30
EP1471584A2 (de) 2004-10-27
JP2004304018A (ja) 2004-10-28
JP3999156B2 (ja) 2007-10-31
US7019441B2 (en) 2006-03-28
EP1471584B1 (de) 2009-06-03
EP1471584A3 (de) 2006-03-22

Similar Documents

Publication Publication Date Title
DE602005020028D1 (de) Piezoelektrischer aktuator und einrichtung
DE602004001903D1 (de) Piezoelektrischer und magnetostriktiver Hybrid-Aktor
DE602005022974D1 (de) Piezoelektrisches/Elektrostriktives Bauelement
DE602005000585D1 (de) Piezoelektrischer Aktor und Bauelement
DE60225362D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE602005022032D1 (de) Piezoelektrisches/Elektrostriktives Bauelement
DE602004023399D1 (de) Thermischer stellantrieb und flüssigkeitstropfenabgabevorrichtung
DE60335158D1 (de) Piezoelektrisches/elektrostriktives Bauelement
DE602005020725D1 (de) Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement
DE60329196D1 (de) Piezoelektrische Flüssigkeitstrugheitsschwingungsbeseitigungs-Vorrichtung
DE602005025022D1 (de) Piezoelektrisches Resonatorelement und piezoelektrische Vorrichtung
DE602004030308D1 (de) HF-Messer und Endoskopiegerät
DK1560787T3 (da) Mikroelektromekanisk systemindretning med piezoelektrisk tyndfilmaktuator
DE60327484D1 (de) Piezoelektrisches und elektrostriktives Bauelement
DE602005000833D1 (de) Piezoelektrisches Betätigungsglied, Uhr und elektronisches Gerät
DE602005008494D1 (de) Piezoelektrische/elektrostriktive keramische Zusammensetzung und piezoelektrisches/elektrostriktives Dünnschichtbauteil
DE60128964D1 (de) Piezoelektrisches stellglied und informationsspeichereinrichtung
DE602006016882D1 (de) Piezoelektrischer Aktor und Flüssigkeitsfördervorrichtung
DE602004031510D1 (de) Silikonharzzusammensetzung und formkörper daraus
DE60127780D1 (de) Piezoelektrisches/elektrostriktives Bauelement
DE60226297D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60120040D1 (de) Piezoelektrisches/elektrostriktives schichtartiges Bauelement
AT6961U3 (de) Verstell- und fixiervorrichtung
DE602004021314D1 (de) Piezoelektrisches/elektrostriktives Filmbauelement und piezoelektrische/elektrostriktive Keramikzusammensetzung
FR2830129B1 (fr) Element piezo-electrique

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee