DE60138381D1 - Dichtung für einen hermetisch geschlossenen Container - Google Patents

Dichtung für einen hermetisch geschlossenen Container

Info

Publication number
DE60138381D1
DE60138381D1 DE60138381T DE60138381T DE60138381D1 DE 60138381 D1 DE60138381 D1 DE 60138381D1 DE 60138381 T DE60138381 T DE 60138381T DE 60138381 T DE60138381 T DE 60138381T DE 60138381 D1 DE60138381 D1 DE 60138381D1
Authority
DE
Germany
Prior art keywords
seal
hermetically sealed
sealed container
container
hermetically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60138381T
Other languages
English (en)
Inventor
Masato Takahashi
Yoshiaki Fujimori
Yoshio Azuma
Yasuyuki Nishimura
Naohiro Horita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Mitsubishi Cable Industries Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Mitsubishi Cable Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001174401A external-priority patent/JP3556185B2/ja
Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co Ltd, Mitsubishi Cable Industries Ltd filed Critical Shin Etsu Polymer Co Ltd
Application granted granted Critical
Publication of DE60138381D1 publication Critical patent/DE60138381D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D53/00—Sealing or packing elements; Sealings formed by liquid or plastics material
    • B65D53/02—Collars or rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/921—Closure or weather strip seal

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cookers (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
DE60138381T 2001-06-08 2001-12-11 Dichtung für einen hermetisch geschlossenen Container Expired - Lifetime DE60138381D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001174401A JP3556185B2 (ja) 2000-06-13 2001-06-08 シール部材、密封容器及びそのシール方法

Publications (1)

Publication Number Publication Date
DE60138381D1 true DE60138381D1 (de) 2009-05-28

Family

ID=19015691

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60138381T Expired - Lifetime DE60138381D1 (de) 2001-06-08 2001-12-11 Dichtung für einen hermetisch geschlossenen Container

Country Status (5)

Country Link
US (1) US7413099B2 (de)
EP (1) EP1291287B1 (de)
KR (2) KR20020095007A (de)
DE (1) DE60138381D1 (de)
TW (1) TW522529B (de)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002329540A (ja) * 2001-05-01 2002-11-15 Shin Etsu Polymer Co Ltd 携帯電話の圧接型コネクタ及びその接続構造
US7157270B2 (en) * 2002-04-24 2007-01-02 Genx International Inc. Lightweight chamber having variable configurations and a method for making such
US7578407B2 (en) * 2004-04-18 2009-08-25 Entegris, Inc. Wafer container with sealable door
EP1737762A2 (de) * 2004-04-18 2007-01-03 Entegris, Inc. Waferbehälter mit abdichtbarer tür
KR100716041B1 (ko) * 2004-06-02 2007-05-09 어플라이드 머티어리얼스, 인코포레이티드 챔버를 밀봉하기 위한 방법 및 장치
US8648977B2 (en) 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
DE102004028199A1 (de) * 2004-06-04 2005-12-22 Wabco Gmbh & Co.Ohg Elektronikgehäuse
JP4634772B2 (ja) * 2004-10-14 2011-02-16 ミライアル株式会社 収納容器
JP4482655B2 (ja) * 2005-04-22 2010-06-16 ゴールド工業株式会社 精密基板収納容器のガスケット
US8037847B2 (en) * 2005-05-13 2011-10-18 Tecniplast, S.p.A. Closure system for a cage containing laboratory animals and methods thereof
JP2007062804A (ja) * 2005-08-31 2007-03-15 Miraial Kk シール部材
JP2007221042A (ja) * 2006-02-20 2007-08-30 Tdk Corp インターフェースシール
JPWO2007138913A1 (ja) * 2006-05-29 2009-10-01 信越ポリマー株式会社 基板収納容器
US7581372B2 (en) * 2006-08-17 2009-09-01 Microtome Precision, Inc. High cleanliness article transport system
WO2008106996A1 (de) * 2007-03-07 2008-09-12 Siemens Aktiengesellscahft Vorrichtung und verfahren zum herstellen einer dichtung
FR2919702A1 (fr) 2007-08-02 2009-02-06 Dominique Leroy Production Soc Joint de fermeture et d'etancheite
US7975870B2 (en) * 2007-08-29 2011-07-12 Ti Group Automotive Systems, L.L.C. Ring seal having sealing lobes
US8226131B1 (en) 2007-09-04 2012-07-24 Augmentix Corporation System, method and apparatus for door latching using a spring latch
TWI331123B (en) * 2008-03-06 2010-10-01 Gudeng Prec Ind Co Ltd Reticle pod and method for keeping reticle clean and dry
JP5264555B2 (ja) * 2008-03-06 2013-08-14 キヤノン株式会社 走査光学装置
JP5173732B2 (ja) * 2008-10-23 2013-04-03 Ｎｏｋ株式会社 ガスケット
US20100117309A1 (en) 2008-11-13 2010-05-13 Applied Materials, Inc. Sealing apparatus for a process chamber
US8899443B2 (en) * 2008-12-15 2014-12-02 Wki Holding Company, Inc. Container assembly with flexible seal
US20110103728A1 (en) * 2009-10-15 2011-05-05 Roller Bearing Company Of America, Inc. Seal for bearings to accommodate large deformations
JP5281697B2 (ja) * 2010-01-26 2013-09-04 ミライアル株式会社 半導体ウエハ収納容器
JP5834233B2 (ja) * 2010-02-17 2015-12-16 パナソニックＩｐマネジメント株式会社 蓋シール構造およびそれを備えた電子機器
US8376181B2 (en) 2010-05-21 2013-02-19 Wki Holding Company, Inc. Container assembly with flexible lid seal and releasing arrangement
KR101899614B1 (ko) * 2010-10-20 2018-09-17 엔테그리스, 아이엔씨. 도어 가이드 및 밀봉부를 갖는 웨이퍼 컨테이너
ES2653157T3 (es) * 2011-03-03 2018-02-06 Biserkon Holdings Ltd. Cápsula para preparar una bebida por extracción
US9988734B2 (en) 2011-08-15 2018-06-05 Lam Research Corporation Lipseals and contact elements for semiconductor electroplating apparatuses
US9108776B2 (en) * 2012-03-09 2015-08-18 Wki Holding Company, Inc. Lid, and container system and lid
USD675057S1 (en) 2012-03-09 2013-01-29 Wki Holding Company, Inc. Lid
US8733550B2 (en) 2012-03-09 2014-05-27 Wki Holding Company, Inc. Nesting container lids with snap on wings
USD673807S1 (en) 2012-03-10 2013-01-08 Wki Holding Company, Inc. Container lid
USD673808S1 (en) 2012-03-10 2013-01-08 Wki Holding Company, Inc. Container lid
JP5240594B1 (ja) * 2012-04-12 2013-07-17 Ｎｏｋ株式会社 ガスケット
KR101383668B1 (ko) * 2012-04-27 2014-04-10 주식회사 테라세미콘 실링부재 및 이를 사용한 기판 처리 장치
JP2015521377A (ja) * 2012-05-04 2015-07-27 インテグリス・インコーポレーテッド ドア接点シールを有するウェハ容器
CA2825673A1 (en) * 2012-08-30 2014-02-28 Rick Miller Sealed pneumatic carrier with slam-latch
JP6177248B2 (ja) * 2012-10-12 2017-08-09 ミライアル株式会社 基板収納容器
JP6119287B2 (ja) * 2013-02-14 2017-04-26 株式会社Sumco ウェーハ収納容器梱包用緩衝材
US9097346B1 (en) * 2013-03-15 2015-08-04 Sypris Technologies, Inc. Closure lip seal relief
KR101988880B1 (ko) * 2014-11-25 2019-06-13 이구루코교 가부시기가이샤 용량 제어 밸브
US20160159565A1 (en) * 2014-12-05 2016-06-09 Den Hartog Industries, Inc. Double wall liquid storage tank with sealing gasket and compression fitting
CN104653509A (zh) * 2015-02-05 2015-05-27 镇江市丹徒区粮机厂有限公司 Tlgf-hy-45-ⅱ型高密封性能物料气力输送风机
JP6539355B2 (ja) * 2015-11-26 2019-07-03 ミライアル株式会社 基板収納容器
WO2018004544A1 (en) * 2016-06-28 2018-01-04 Hewlett-Packard Development Company, L.P. A seal for an electronic device
DE102016215154A1 (de) * 2016-08-15 2018-02-15 Festo Ag & Co. Kg Abdichtungssystem
US11302548B2 (en) * 2017-06-01 2022-04-12 Shin-Etsu Polymer Co., Ltd. Substrate storage container
WO2019009065A1 (ja) * 2017-07-07 2019-01-10 信越ポリマー株式会社 基板収納容器
TWM565877U (zh) * 2017-08-25 2018-08-21 中勤實業股份有限公司 Wafer box
EP3546154B1 (de) * 2018-03-29 2022-06-01 Braun GmbH Elektrischer rasierapparat
CN112005358A (zh) * 2018-04-19 2020-11-27 信越聚合物株式会社 基板收纳容器
EP3629426A1 (de) * 2018-09-27 2020-04-01 Tyco Electronics Japan G.K. Dichtungselement und verbinderanordnung
JP6996475B2 (ja) * 2018-11-01 2022-01-17 信越半導体株式会社 ウェーハ収納容器の洗浄方法およびその洗浄装置
DE102019000133A1 (de) * 2019-01-11 2020-07-16 Zwilling J. A. Henckels Aktiengesellschaft Frischhalte-Unterdruckbehälter für Lebensmittel
JP7139280B2 (ja) * 2019-04-19 2022-09-20 マブチモーター株式会社 ギヤボックスの防水構造および減速機付きモータ
US11148888B1 (en) 2020-06-05 2021-10-19 Translogic Corporation Low force sealing pneumatic carrier
KR102294415B1 (ko) * 2021-06-09 2021-08-26 (주)상아프론테크 웨이퍼 수납 용기
EP4356420A1 (de) * 2021-06-14 2024-04-24 Entegris, Inc. Substratbehälter mit türdichtung

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US431131A (en) * 1890-07-01 Apparatus for drilling wells
US2528264A (en) * 1946-09-18 1950-10-31 Gen Motors Corp Weatherstrip
US2782887A (en) * 1952-02-09 1957-02-26 Zimmermann Friedrich Window construction
US3334774A (en) * 1964-11-27 1967-08-08 Johns Manville Fluid seal
US3339934A (en) 1965-02-23 1967-09-05 Jet Spray Cooler Inc Sealing grommet
FR1590975A (de) * 1968-11-08 1970-04-20
US3640424A (en) * 1969-03-24 1972-02-08 Ricoh Kk Sealing for underwater camera housing
US3799501A (en) 1971-12-27 1974-03-26 T Hartman Elastomers in shear force transfer systems
US4311317A (en) 1979-08-20 1982-01-19 Bartels Harold U Lip and radial seal
DE8015672U1 (de) * 1980-06-13 1980-09-18 Vorwerk & Co Interholding Gmbh, 5600 Wuppertal Dichtungsanordnung fuer rohrstuecke an bodenpflegegeraeten
JPS5734141A (en) 1980-08-07 1982-02-24 Sumitomo Rubber Ind Ltd Rubber composition for external layer of side wall
IT8068705A0 (it) 1980-11-07 1980-11-07 Firestone Europa S P A Giunto smontabile a innesto e metodo per il collegamento a tenuta di un elemento in foglio ad un supporto
US4396199A (en) * 1981-05-15 1983-08-02 Honeywell Inc. Fluid pressure sealing member for a valve
JPS5882366A (ja) 1981-11-11 1983-05-17 Hitachi Ltd 高速フ−リエ変換演算装置
JPS5882366U (ja) * 1981-11-28 1983-06-03 株式会社エジリ− 密閉容器のシ−ル部材
JPS58156648A (ja) 1982-03-12 1983-09-17 東急建設株式会社 ブレ−ス構造
JPS59762A (ja) 1982-04-05 1984-01-05 テキサス・インスツルメンツ・インコ−ポレイテツド デイジタル・プロセツサ・システム
JPS58156648U (ja) * 1982-04-15 1983-10-19 タケヤ化学工業株式会社 密封容器
JPS60189631U (ja) * 1984-05-25 1985-12-16 アイシン精機株式会社 ピンスライド型デイスクブレ−キにおけるピンブ−ツ
CA1333181C (en) * 1985-01-10 1994-11-22 Hidemi Sugiura Plastic boots and method of manufacturing the same
DE3626457A1 (de) * 1986-08-05 1988-02-18 Metzeler Kautschuk Dichtungsprofil
US4758004A (en) * 1986-10-02 1988-07-19 Casket Shells, Inc. Casket sealing gasket having sealing ridges of different heights
JP2634169B2 (ja) * 1987-07-07 1997-07-23 理想科学工業株式会社 簡易印刷装置
JPH0273151A (ja) 1988-09-09 1990-03-13 Japan Puroobu Kk 超音波探触子
DE59002612D1 (de) 1989-05-25 1993-10-14 Phoenix Ag Dichtung für Container, insbesondere Kühlcontainer.
US5009036A (en) * 1989-09-21 1991-04-23 Pennsylvania Rail Car Company Box car door seal
JPH0416025A (ja) 1990-05-08 1992-01-21 Samsung Electron Co Ltd 二相符号化データの復号装置及び方法
JP2979177B2 (ja) 1990-05-28 1999-11-15 日本電信電話株式会社 光空間分配器
JPH0416025U (de) * 1990-05-31 1992-02-10
US5112065A (en) * 1991-03-14 1992-05-12 Westinghouse Electric Corp. Double directional gasket
US5469963A (en) * 1992-04-08 1995-11-28 Asyst Technologies, Inc. Sealable transportable container having improved liner
JP2567367B2 (ja) 1992-08-31 1996-12-25 理研軽金属工業株式会社 圧力調理器
JP2946450B2 (ja) * 1993-04-27 1999-09-06 コマツ電子金属株式会社 半導体ウェーハ包装容器
JPH0748200A (ja) 1993-08-04 1995-02-21 Natl Space Dev Agency Japan<Nasda> 単結晶の製造方法
JPH08266411A (ja) 1995-03-31 1996-10-15 Toshiba Home Technol Corp 蓋パッキング装置
US5653447A (en) * 1995-07-26 1997-08-05 Cress; Steven B. Vacuum/pressure seal method and apparatus
DE29512401U1 (de) 1995-08-01 1996-12-05 Semperit Ag Holding, Wien Strangförmiges Dichtungsprofil
US5792427A (en) 1996-02-09 1998-08-11 Forma Scientific, Inc. Controlled atmosphere incubator
JP3041847B2 (ja) 1997-01-17 2000-05-15 ツインバード工業株式会社 電気ポット
JP3569860B2 (ja) 1997-04-09 2004-09-29 恭子 溝口 電子レンジ用容器
FR2770106B1 (fr) 1997-10-24 1999-12-31 Oreal Boitier de maquillage a organe d'etancheite soutenu par une piece de support
JPH11189267A (ja) 1997-12-26 1999-07-13 Mitsubishi Materials Corp 板状部材収納容器
US6474474B2 (en) * 1998-02-06 2002-11-05 Sumitomo Metal Industries, Ltd. Sheet support container
JPH11299646A (ja) 1998-04-16 1999-11-02 Nikkei Products:Kk 真空調理鍋
KR100516067B1 (ko) 1998-08-03 2005-11-25 삼성전자주식회사 액정 표시 장치용 패널
US6116615A (en) * 1998-08-04 2000-09-12 Lucent Technologies, Inc Composite weather and electromagnetic radiation gasket for electronic cabinets
KR20000021473A (ko) 1998-09-29 2000-04-25 윤종용 웨이퍼 맵핑 시스템
US6354601B1 (en) 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
JP3066604U (ja) * 1999-08-14 2000-03-03 末吉 岡 密閉容器
US6364152B1 (en) * 2000-04-12 2002-04-02 Dart Industries Inc. Food storage container

Also Published As

Publication number Publication date
US7413099B2 (en) 2008-08-19
TW522529B (en) 2003-03-01
KR20020095007A (ko) 2002-12-20
KR100904799B1 (ko) 2009-06-25
KR20090023427A (ko) 2009-03-04
EP1291287B1 (de) 2009-04-15
US20020195455A1 (en) 2002-12-26
EP1291287A2 (de) 2003-03-12
EP1291287A3 (de) 2005-04-06

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