DE60128165D1 - Verfahren zur Herstellung einer Struktur mit nanometrischen Oberflächenaufrauhungen - Google Patents
Verfahren zur Herstellung einer Struktur mit nanometrischen OberflächenaufrauhungenInfo
- Publication number
- DE60128165D1 DE60128165D1 DE60128165T DE60128165T DE60128165D1 DE 60128165 D1 DE60128165 D1 DE 60128165D1 DE 60128165 T DE60128165 T DE 60128165T DE 60128165 T DE60128165 T DE 60128165T DE 60128165 D1 DE60128165 D1 DE 60128165D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- surface roughening
- nanometric surface
- nanometric
- roughening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Drying Of Semiconductors (AREA)
- Micromachines (AREA)
- ing And Chemical Polishing (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2000-0000363A KR100480772B1 (ko) | 2000-01-05 | 2000-01-05 | 나노 스케일의 표면 거칠기를 가지는 마이크로 구조물의형성방법 |
KR2000000363 | 2000-01-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60128165D1 true DE60128165D1 (de) | 2007-06-14 |
DE60128165T2 DE60128165T2 (de) | 2007-12-27 |
Family
ID=19636546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60128165T Expired - Lifetime DE60128165T2 (de) | 2000-01-05 | 2001-01-03 | Verfahren zur Herstellung einer Struktur mit nanometrischen Oberflächenaufrauhungen |
Country Status (5)
Country | Link |
---|---|
US (1) | US6468916B2 (de) |
EP (1) | EP1114791B1 (de) |
JP (1) | JP2001262376A (de) |
KR (1) | KR100480772B1 (de) |
DE (1) | DE60128165T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100480772B1 (ko) * | 2000-01-05 | 2005-04-06 | 삼성에스디아이 주식회사 | 나노 스케일의 표면 거칠기를 가지는 마이크로 구조물의형성방법 |
JP2002280354A (ja) * | 2001-03-19 | 2002-09-27 | Osaka Prefecture | 炭素薄膜のエッチング方法及びエッチング装置 |
FR2837813B1 (fr) * | 2002-03-29 | 2004-06-11 | Omnium Traitement Valorisa | Installation circulaire pour le traitement biologique des eaux usees |
US6767825B1 (en) * | 2003-02-03 | 2004-07-27 | United Microelectronics Corporation | Etching process for forming damascene structure of the semiconductor |
US7052618B2 (en) * | 2004-01-28 | 2006-05-30 | Agilent Technologies, Inc. | Nanostructures and methods of making the same |
DE102005037139A1 (de) * | 2005-08-06 | 2007-02-08 | Technische Universität Ilmenau | Verfahren zur Verbindung von Mikrobauteilen mit nanostrukturierten Siliziumoberflächen und Verfahren zur deren Herstellung |
GR1006890B (el) * | 2005-09-16 | 2010-07-19 | Ευαγγελος Γογγολιδης | Μεθοδος για την κατασκευη επιφανειων μεγαλου επιφανειακου λογου και μεγαλου λογου ασυμμετριας σε υποστρωματα. |
EP2170764A4 (de) * | 2007-06-21 | 2011-06-22 | 3M Innovative Properties Co | Verfahren zur herstellung von hierarchischen artikeln |
FI123691B (fi) | 2007-12-10 | 2013-09-30 | Beneq Oy | Menetelmä erittäin hydrofobisen pinnan tuottamiseksi |
FI20070953L (fi) * | 2007-12-10 | 2009-06-11 | Beneq Oy | Menetelmä ja laite pinnan strukturoimiseksi |
KR101100859B1 (ko) * | 2010-03-19 | 2012-01-02 | 포항공과대학교 산학협력단 | 다중 스케일 표면 가공 방법 및 이 방법에 의해 제조된 다중 스케일 표면을 가지는 고체 기재 |
CN102180438A (zh) * | 2011-03-28 | 2011-09-14 | 中国科学院光电技术研究所 | 一种可调谐三角形金属纳米粒子阵列结构的制作方法 |
CN107369668B (zh) * | 2011-07-22 | 2020-08-25 | 先进封装技术私人有限公司 | 用于制造半导体封装元件的半导体结构 |
CN103924241B (zh) * | 2014-04-14 | 2017-01-18 | 北京工业大学 | 一种大规模制备低表面应力的表面具备微纳结构的钨的方法 |
KR102567715B1 (ko) * | 2016-04-29 | 2023-08-17 | 삼성디스플레이 주식회사 | 트랜지스터 패널 및 그 제조 방법 |
CN109972115B (zh) * | 2017-12-28 | 2021-01-19 | 深圳先进技术研究院 | 具有微纳米金刚石涂层的硬质合金刀具及其制备方法 |
US11192782B1 (en) * | 2020-09-01 | 2021-12-07 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | Method for preparing silicon wafer with rough surface and silicon wafer |
US11305988B2 (en) * | 2020-09-01 | 2022-04-19 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | Method for preparing silicon wafer with rough surface and silicon wafer |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0117258B1 (de) * | 1983-02-23 | 1987-05-20 | Ibm Deutschland Gmbh | Verfahren zur Herstellung von haftfesten Metallschichten auf Kunststoffsubstraten |
JPS6218714A (ja) * | 1985-07-18 | 1987-01-27 | Nippon Telegr & Teleph Corp <Ntt> | アライメントマ−クの形成方法 |
JPH04216662A (ja) * | 1990-12-17 | 1992-08-06 | Mitsubishi Electric Corp | 半導体記憶装置の製造方法 |
US5564959A (en) * | 1993-09-08 | 1996-10-15 | Silicon Video Corporation | Use of charged-particle tracks in fabricating gated electron-emitting devices |
US5753420A (en) * | 1995-09-18 | 1998-05-19 | Texas Instruments Incorporated | Rough dielectric film by etchback of residue |
US5637189A (en) * | 1996-06-25 | 1997-06-10 | Xerox Corporation | Dry etch process control using electrically biased stop junctions |
US6193870B1 (en) * | 1997-05-01 | 2001-02-27 | The Regents Of The University Of California | Use of a hard mask for formation of gate and dielectric via nanofilament field emission devices |
KR100480772B1 (ko) * | 2000-01-05 | 2005-04-06 | 삼성에스디아이 주식회사 | 나노 스케일의 표면 거칠기를 가지는 마이크로 구조물의형성방법 |
KR100464314B1 (ko) * | 2000-01-05 | 2004-12-31 | 삼성에스디아이 주식회사 | 전계방출소자 및 그 제조방법 |
KR100480771B1 (ko) * | 2000-01-05 | 2005-04-06 | 삼성에스디아이 주식회사 | 전계방출소자 및 그 제조방법 |
-
2000
- 2000-01-05 KR KR10-2000-0000363A patent/KR100480772B1/ko not_active IP Right Cessation
-
2001
- 2001-01-03 EP EP01300023A patent/EP1114791B1/de not_active Expired - Lifetime
- 2001-01-03 DE DE60128165T patent/DE60128165T2/de not_active Expired - Lifetime
- 2001-01-05 JP JP2001000347A patent/JP2001262376A/ja active Pending
- 2001-01-05 US US09/754,274 patent/US6468916B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1114791B1 (de) | 2007-05-02 |
DE60128165T2 (de) | 2007-12-27 |
US6468916B2 (en) | 2002-10-22 |
JP2001262376A (ja) | 2001-09-26 |
KR20010068443A (ko) | 2001-07-23 |
KR100480772B1 (ko) | 2005-04-06 |
US20010006851A1 (en) | 2001-07-05 |
EP1114791A2 (de) | 2001-07-11 |
EP1114791A3 (de) | 2002-07-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |