DE60118126D1 - Verfahren zur Herstellung einer Spiegelstruktur - Google Patents
Verfahren zur Herstellung einer SpiegelstrukturInfo
- Publication number
- DE60118126D1 DE60118126D1 DE60118126T DE60118126T DE60118126D1 DE 60118126 D1 DE60118126 D1 DE 60118126D1 DE 60118126 T DE60118126 T DE 60118126T DE 60118126 T DE60118126 T DE 60118126T DE 60118126 D1 DE60118126 D1 DE 60118126D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- mirror structure
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
- B81C1/0065—Mechanical properties
- B81C1/00666—Treatments for controlling internal stress or strain in MEMS structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/04—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/675,093 US6632373B1 (en) | 2000-09-28 | 2000-09-28 | Method for an optical switch on a substrate |
US675093 | 2000-09-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60118126D1 true DE60118126D1 (de) | 2006-05-11 |
DE60118126T2 DE60118126T2 (de) | 2006-09-07 |
Family
ID=24709023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60118126T Expired - Lifetime DE60118126T2 (de) | 2000-09-28 | 2001-09-07 | Verfahren zur Herstellung einer Spiegelstruktur |
Country Status (4)
Country | Link |
---|---|
US (1) | US6632373B1 (de) |
EP (1) | EP1193527B1 (de) |
JP (1) | JP2002162582A (de) |
DE (1) | DE60118126T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6706202B1 (en) * | 2000-09-28 | 2004-03-16 | Xerox Corporation | Method for shaped optical MEMS components with stressed thin films |
JP2002221673A (ja) * | 2001-01-26 | 2002-08-09 | Olympus Optical Co Ltd | アクチュエータを備えた光学ユニット |
US20090065429A9 (en) * | 2001-10-22 | 2009-03-12 | Dickensheets David L | Stiffened surface micromachined structures and process for fabricating the same |
FR2835062B1 (fr) * | 2002-01-18 | 2004-06-25 | Teem Photonics | Commutateur optique a micro-miroir et son procede de realisation |
JP4038208B2 (ja) | 2002-06-21 | 2008-01-23 | 富士通株式会社 | マイクロミラーユニット及びその製造方法並びに該マイクロミラーユニットを用いた光スイッチ |
US6778716B1 (en) | 2003-02-19 | 2004-08-17 | Lockeed Martin Corporation | Method and apparatus for MEMS optical sensing using micromirrors |
DE10358967B4 (de) * | 2003-12-15 | 2006-11-16 | Universität Kassel | Mikrospiegelarray |
US7072090B2 (en) * | 2004-04-22 | 2006-07-04 | Micronic Laser Systems Ab | Addressing of an SLM |
US7771803B2 (en) * | 2004-10-27 | 2010-08-10 | Palo Alto Research Center Incorporated | Oblique parts or surfaces |
JP4473210B2 (ja) * | 2005-12-02 | 2010-06-02 | アンリツ株式会社 | ミラー装置 |
US7550855B2 (en) * | 2005-12-02 | 2009-06-23 | Palo Alto Research Center Incorporated | Vertically spaced plural microsprings |
US8614742B2 (en) * | 2007-06-06 | 2013-12-24 | Palo Alto Research Center Incorporated | Miniature low cost pan/tilt magnetic actuation for portable and stationary video cameras |
JP2009229916A (ja) * | 2008-03-24 | 2009-10-08 | Nippon Telegr & Teleph Corp <Ntt> | マイクロミラー素子およびマイクロミラーアレイ |
US8079820B2 (en) | 2008-12-18 | 2011-12-20 | General Electric Company | Blade module, a modular rotor blade and a method for assembling a modular rotor blade |
JP2010237273A (ja) * | 2009-03-30 | 2010-10-21 | Nec Corp | ミラーチルトアクチュエーター |
JP5577742B2 (ja) | 2010-02-23 | 2014-08-27 | セイコーエプソン株式会社 | 光スキャナーおよび画像形成装置 |
JP5381801B2 (ja) * | 2010-02-23 | 2014-01-08 | セイコーエプソン株式会社 | 画像形成装置 |
US8519534B2 (en) | 2010-09-22 | 2013-08-27 | Palo Alto Research Center Incorporated | Microsprings partially embedded in a laminate structure and methods for producing same |
US8441808B2 (en) | 2010-09-22 | 2013-05-14 | Palo Alto Research Center Incorporated | Interposer with microspring contacts |
JP5598296B2 (ja) * | 2010-12-08 | 2014-10-01 | セイコーエプソン株式会社 | アクチュエーター、光スキャナーおよび画像形成装置 |
US8525353B2 (en) | 2011-12-19 | 2013-09-03 | Palo Alto Research Center Incorporated | Microspring structures adapted for target device cooling |
DE102013209234B4 (de) | 2013-05-17 | 2018-04-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung mit einem schwingfähig aufgehängten optischen Element |
JP5614478B2 (ja) * | 2013-07-22 | 2014-10-29 | 日本電気株式会社 | ミラーチルトアクチュエーター |
JP5867547B2 (ja) * | 2014-05-22 | 2016-02-24 | セイコーエプソン株式会社 | 光スキャナーおよび画像形成装置 |
US11535511B2 (en) | 2017-08-02 | 2022-12-27 | United States Of America As Represented By The Secretary Of The Air Force | Post-processing techniques on mems foundry fabricated devices for large angle beamsteering |
US11163152B2 (en) | 2017-08-02 | 2021-11-02 | United States Of America As Represented By The Secretary Of The Air Force | MEMS electrothermal actuator for large angle beamsteering |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0756531B2 (ja) * | 1984-07-31 | 1995-06-14 | テキサス インスツルメンツ インコーポレイテツド | 空間光変調器とその製法 |
US5633552A (en) * | 1993-06-04 | 1997-05-27 | The Regents Of The University Of California | Cantilever pressure transducer |
US5673139A (en) * | 1993-07-19 | 1997-09-30 | Medcom, Inc. | Microelectromechanical television scanning device and method for making the same |
US5753134A (en) * | 1994-01-04 | 1998-05-19 | Siemens Aktiengesellschaft | Method for producing a layer with reduced mechanical stresses |
US5613861A (en) * | 1995-06-07 | 1997-03-25 | Xerox Corporation | Photolithographically patterned spring contact |
JPH0990249A (ja) * | 1995-09-25 | 1997-04-04 | Olympus Optical Co Ltd | 光偏向子及びその製造方法 |
US6061323A (en) | 1996-07-30 | 2000-05-09 | Seagate Technology, Inc. | Data storage system having an improved surface micro-machined mirror |
US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
JPH1114933A (ja) * | 1997-06-24 | 1999-01-22 | Toshiba Corp | ガルバノミラーおよびこれを用いた光ディスク装置 |
US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
US6392221B1 (en) * | 1997-12-22 | 2002-05-21 | Agere Systems Guardian Corp. | Micro-electro-mechanical optical device |
KR100703140B1 (ko) * | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | 간섭 변조기 및 그 제조 방법 |
US5979892A (en) * | 1998-05-15 | 1999-11-09 | Xerox Corporation | Controlled cilia for object manipulation |
JP2000164105A (ja) * | 1998-11-25 | 2000-06-16 | Omron Corp | マイクロマシン、マイクロアクチュエータ及びマイクロリレー |
JP2000162538A (ja) * | 1998-11-30 | 2000-06-16 | Mitsubishi Electric Corp | マイクロミラー装置 |
US6091537A (en) * | 1998-12-11 | 2000-07-18 | Xerox Corporation | Electro-actuated microlens assemblies |
US6271958B1 (en) * | 1998-12-15 | 2001-08-07 | At&T Corp. | Method and apparatus for curvature-resistant micro-mirror structures to reduce light beam loss in free-space micro-machined optical switches |
US6267605B1 (en) * | 1999-11-15 | 2001-07-31 | Xerox Corporation | Self positioning, passive MEMS mirror structures |
US6360036B1 (en) | 2000-01-14 | 2002-03-19 | Corning Incorporated | MEMS optical switch and method of manufacture |
US20020071169A1 (en) * | 2000-02-01 | 2002-06-13 | Bowers John Edward | Micro-electro-mechanical-system (MEMS) mirror device |
US6545385B2 (en) * | 2000-04-11 | 2003-04-08 | Sandia Corporation | Microelectromechanical apparatus for elevating and tilting a platform |
US6283601B1 (en) | 2000-04-14 | 2001-09-04 | C Speed Corporation | Optical mirror system with multi-axis rotational control |
US6300665B1 (en) * | 2000-09-28 | 2001-10-09 | Xerox Corporation | Structure for an optical switch on a silicon on insulator substrate |
-
2000
- 2000-09-28 US US09/675,093 patent/US6632373B1/en not_active Expired - Fee Related
-
2001
- 2001-09-07 DE DE60118126T patent/DE60118126T2/de not_active Expired - Lifetime
- 2001-09-07 EP EP01307609A patent/EP1193527B1/de not_active Expired - Lifetime
- 2001-09-20 JP JP2001286787A patent/JP2002162582A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP1193527A2 (de) | 2002-04-03 |
EP1193527B1 (de) | 2006-03-22 |
EP1193527A3 (de) | 2003-08-13 |
DE60118126T2 (de) | 2006-09-07 |
JP2002162582A (ja) | 2002-06-07 |
US6632373B1 (en) | 2003-10-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |