DE60115268D1 - Positionierer für elektronische testköpfe - Google Patents

Positionierer für elektronische testköpfe

Info

Publication number
DE60115268D1
DE60115268D1 DE60115268T DE60115268T DE60115268D1 DE 60115268 D1 DE60115268 D1 DE 60115268D1 DE 60115268 T DE60115268 T DE 60115268T DE 60115268 T DE60115268 T DE 60115268T DE 60115268 D1 DE60115268 D1 DE 60115268D1
Authority
DE
Germany
Prior art keywords
test head
positioner
electronic test
test heads
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60115268T
Other languages
English (en)
Other versions
DE60115268T2 (de
Inventor
Naum Gudin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InTest Corp
Original Assignee
InTest IP Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InTest IP Corp filed Critical InTest IP Corp
Application granted granted Critical
Publication of DE60115268D1 publication Critical patent/DE60115268D1/de
Publication of DE60115268T2 publication Critical patent/DE60115268T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Recording Or Reproducing By Magnetic Means (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Pivots And Pivotal Connections (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Chair Legs, Seat Parts, And Backrests (AREA)
  • Golf Clubs (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
DE60115268T 2000-09-20 2001-09-17 Positionierer für elektronische testköpfe Expired - Lifetime DE60115268T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US23403700P 2000-09-20 2000-09-20
US234037P 2000-09-20
PCT/US2001/028985 WO2002024400A2 (en) 2000-09-20 2001-09-17 Electronic test head positioner

Publications (2)

Publication Number Publication Date
DE60115268D1 true DE60115268D1 (de) 2005-12-29
DE60115268T2 DE60115268T2 (de) 2006-06-01

Family

ID=22879613

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60115268T Expired - Lifetime DE60115268T2 (de) 2000-09-20 2001-09-17 Positionierer für elektronische testköpfe

Country Status (11)

Country Link
US (1) US6975105B2 (de)
EP (1) EP1322964B1 (de)
JP (1) JP2004509344A (de)
KR (1) KR20030032030A (de)
CN (1) CN1234501C (de)
AT (1) ATE310960T1 (de)
AU (1) AU2001289116A1 (de)
DE (1) DE60115268T2 (de)
MY (1) MY131871A (de)
TW (1) TWI266880B (de)
WO (1) WO2002024400A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005019564B4 (de) * 2005-04-27 2007-10-31 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
JP3976276B2 (ja) 2005-06-10 2007-09-12 日本航空電子工業株式会社 検査装置
JP5226072B2 (ja) * 2008-07-14 2013-07-03 株式会社アドバンテスト テストヘッド移動装置及び電子部品試験装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973015A (en) * 1987-09-17 1990-11-27 Schlumberger Technologies, Inc. Manipulator apparatus for test head support and orientation
US5030869A (en) 1990-07-25 1991-07-09 Intest Corporation Device testing system with cable pivot
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5600258A (en) 1993-09-15 1997-02-04 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
US5912555A (en) * 1995-04-10 1999-06-15 Tokyo Electron Limited Probe apparatus
US5608334A (en) * 1995-04-20 1997-03-04 Intest Corporation Device testing system with cable pivot and method of installation

Also Published As

Publication number Publication date
EP1322964B1 (de) 2005-11-23
JP2004509344A (ja) 2004-03-25
CN1234501C (zh) 2006-01-04
US6975105B2 (en) 2005-12-13
ATE310960T1 (de) 2005-12-15
DE60115268T2 (de) 2006-06-01
EP1322964A2 (de) 2003-07-02
AU2001289116A1 (en) 2002-04-02
KR20030032030A (ko) 2003-04-23
WO2002024400A3 (en) 2002-06-13
TWI266880B (en) 2006-11-21
MY131871A (en) 2007-09-28
WO2002024400A2 (en) 2002-03-28
CN1474945A (zh) 2004-02-11
US20040032248A1 (en) 2004-02-19

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: INTEST CORP.(N. D. GES.D.STAATES DELAWARE), CHERRY

8364 No opposition during term of opposition