ATE310960T1 - Positionierer für elektronische testköpfe - Google Patents

Positionierer für elektronische testköpfe

Info

Publication number
ATE310960T1
ATE310960T1 AT01968911T AT01968911T ATE310960T1 AT E310960 T1 ATE310960 T1 AT E310960T1 AT 01968911 T AT01968911 T AT 01968911T AT 01968911 T AT01968911 T AT 01968911T AT E310960 T1 ATE310960 T1 AT E310960T1
Authority
AT
Austria
Prior art keywords
test head
positioner
electronic test
test heads
slider
Prior art date
Application number
AT01968911T
Other languages
English (en)
Inventor
Naum Gudin
Original Assignee
Intest Ip Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Ip Corp filed Critical Intest Ip Corp
Application granted granted Critical
Publication of ATE310960T1 publication Critical patent/ATE310960T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Recording Or Reproducing By Magnetic Means (AREA)
  • Pivots And Pivotal Connections (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Chair Legs, Seat Parts, And Backrests (AREA)
  • Golf Clubs (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
AT01968911T 2000-09-20 2001-09-17 Positionierer für elektronische testköpfe ATE310960T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23403700P 2000-09-20 2000-09-20
PCT/US2001/028985 WO2002024400A2 (en) 2000-09-20 2001-09-17 Electronic test head positioner

Publications (1)

Publication Number Publication Date
ATE310960T1 true ATE310960T1 (de) 2005-12-15

Family

ID=22879613

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01968911T ATE310960T1 (de) 2000-09-20 2001-09-17 Positionierer für elektronische testköpfe

Country Status (11)

Country Link
US (1) US6975105B2 (de)
EP (1) EP1322964B1 (de)
JP (1) JP2004509344A (de)
KR (1) KR20030032030A (de)
CN (1) CN1234501C (de)
AT (1) ATE310960T1 (de)
AU (1) AU2001289116A1 (de)
DE (1) DE60115268T2 (de)
MY (1) MY131871A (de)
TW (1) TWI266880B (de)
WO (1) WO2002024400A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005019564B4 (de) 2005-04-27 2007-10-31 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
JP3976276B2 (ja) * 2005-06-10 2007-09-12 日本航空電子工業株式会社 検査装置
US8704543B2 (en) 2008-07-14 2014-04-22 Advantest Corporation Test head moving apparatus and electronic component testing apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973015A (en) * 1987-09-17 1990-11-27 Schlumberger Technologies, Inc. Manipulator apparatus for test head support and orientation
US5030869A (en) * 1990-07-25 1991-07-09 Intest Corporation Device testing system with cable pivot
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5600258A (en) 1993-09-15 1997-02-04 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
US5912555A (en) * 1995-04-10 1999-06-15 Tokyo Electron Limited Probe apparatus
US5608334A (en) * 1995-04-20 1997-03-04 Intest Corporation Device testing system with cable pivot and method of installation

Also Published As

Publication number Publication date
MY131871A (en) 2007-09-28
WO2002024400A3 (en) 2002-06-13
CN1474945A (zh) 2004-02-11
TWI266880B (en) 2006-11-21
DE60115268T2 (de) 2006-06-01
DE60115268D1 (de) 2005-12-29
CN1234501C (zh) 2006-01-04
AU2001289116A1 (en) 2002-04-02
KR20030032030A (ko) 2003-04-23
EP1322964A2 (de) 2003-07-02
US20040032248A1 (en) 2004-02-19
US6975105B2 (en) 2005-12-13
EP1322964B1 (de) 2005-11-23
WO2002024400A2 (en) 2002-03-28
JP2004509344A (ja) 2004-03-25

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties