FR2862629B1 - Dispositif de refroidissement d'un circuit integre - Google Patents

Dispositif de refroidissement d'un circuit integre

Info

Publication number
FR2862629B1
FR2862629B1 FR0350910A FR0350910A FR2862629B1 FR 2862629 B1 FR2862629 B1 FR 2862629B1 FR 0350910 A FR0350910 A FR 0350910A FR 0350910 A FR0350910 A FR 0350910A FR 2862629 B1 FR2862629 B1 FR 2862629B1
Authority
FR
France
Prior art keywords
integrated circuit
cooling device
cooling
integrated
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0350910A
Other languages
English (en)
Other versions
FR2862629A1 (fr
Inventor
Guillaume Bouche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0350910A priority Critical patent/FR2862629B1/fr
Priority to US10/580,324 priority patent/US8164183B2/en
Priority to JP2006540554A priority patent/JP2007512468A/ja
Priority to EP04805827A priority patent/EP1687535A1/fr
Priority to PCT/FR2004/050584 priority patent/WO2005052371A1/fr
Publication of FR2862629A1 publication Critical patent/FR2862629A1/fr
Application granted granted Critical
Publication of FR2862629B1 publication Critical patent/FR2862629B1/fr
Priority to US13/436,583 priority patent/US8804300B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0083—Temperature control
    • B81B7/009—Maintaining a constant temperature by heating or cooling
    • B81B7/0093—Maintaining a constant temperature by heating or cooling by cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/036—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
FR0350910A 2003-11-25 2003-11-25 Dispositif de refroidissement d'un circuit integre Expired - Fee Related FR2862629B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0350910A FR2862629B1 (fr) 2003-11-25 2003-11-25 Dispositif de refroidissement d'un circuit integre
US10/580,324 US8164183B2 (en) 2003-11-25 2004-11-12 Integrated circuit cooling device
JP2006540554A JP2007512468A (ja) 2003-11-25 2004-11-12 集積回路のための冷却装置
EP04805827A EP1687535A1 (fr) 2003-11-25 2004-11-12 Dispositif de refroidissement d un circuit integre
PCT/FR2004/050584 WO2005052371A1 (fr) 2003-11-25 2004-11-12 Dispositif de refroidissement d'un circuit integre
US13/436,583 US8804300B2 (en) 2003-11-25 2012-03-30 Method of forming a cooling device for an integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0350910A FR2862629B1 (fr) 2003-11-25 2003-11-25 Dispositif de refroidissement d'un circuit integre

Publications (2)

Publication Number Publication Date
FR2862629A1 FR2862629A1 (fr) 2005-05-27
FR2862629B1 true FR2862629B1 (fr) 2006-02-17

Family

ID=34531395

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0350910A Expired - Fee Related FR2862629B1 (fr) 2003-11-25 2003-11-25 Dispositif de refroidissement d'un circuit integre

Country Status (5)

Country Link
US (2) US8164183B2 (fr)
EP (1) EP1687535A1 (fr)
JP (1) JP2007512468A (fr)
FR (1) FR2862629B1 (fr)
WO (1) WO2005052371A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2890229B1 (fr) * 2005-08-31 2007-11-09 St Microelectronics Sa Procede de formation d'un condensateur variable
DE102008006832A1 (de) * 2008-01-30 2009-08-13 Eads Deutschland Gmbh Elektromagnetischer Membran-Mikroaktor
US9214622B2 (en) * 2011-10-17 2015-12-15 Stmicroelectronics, Inc. Size-controllable opening and method of making same
US20200016590A1 (en) * 2016-10-07 2020-01-16 Boehringer Ingelheim Vetmedica Gmbh Analysis device, cartridge and method for testing a sample
TWI626627B (zh) * 2017-08-31 2018-06-11 研能科技股份有限公司 致動傳感模組
EP4327368A2 (fr) * 2021-04-23 2024-02-28 The General Hospital Corporation Transistors fluidiques et utilisations associées

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5367878A (en) * 1991-11-08 1994-11-29 University Of Southern California Transient energy release microdevices and methods
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US5901037A (en) * 1997-06-18 1999-05-04 Northrop Grumman Corporation Closed loop liquid cooling for semiconductor RF amplifier modules
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6032923A (en) * 1998-01-08 2000-03-07 Xerox Corporation Fluid valves having cantilevered blocking films
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
SG105459A1 (en) * 2000-07-24 2004-08-27 Micron Technology Inc Mems heat pumps for integrated circuit heat dissipation
DE10054484A1 (de) * 2000-11-03 2002-05-08 Bosch Gmbh Robert Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
US6729856B2 (en) * 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
US7082024B2 (en) * 2004-11-29 2006-07-25 Stmicroelectronics S.A. Component comprising a variable capacitor

Also Published As

Publication number Publication date
US20070278663A1 (en) 2007-12-06
US20120187519A1 (en) 2012-07-26
FR2862629A1 (fr) 2005-05-27
JP2007512468A (ja) 2007-05-17
US8804300B2 (en) 2014-08-12
WO2005052371A1 (fr) 2005-06-09
US8164183B2 (en) 2012-04-24
EP1687535A1 (fr) 2006-08-09

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20060731