TWI266880B - Apparatus for coupling a test head to a mounting unit and method of balancing a test head - Google Patents
Apparatus for coupling a test head to a mounting unit and method of balancing a test headInfo
- Publication number
- TWI266880B TWI266880B TW090123211A TW90123211A TWI266880B TW I266880 B TWI266880 B TW I266880B TW 090123211 A TW090123211 A TW 090123211A TW 90123211 A TW90123211 A TW 90123211A TW I266880 B TWI266880 B TW I266880B
- Authority
- TW
- Taiwan
- Prior art keywords
- test head
- mounting unit
- coupling
- balancing
- slider
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
- Pivots And Pivotal Connections (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Chair Legs, Seat Parts, And Backrests (AREA)
- Golf Clubs (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23403700P | 2000-09-20 | 2000-09-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
TWI266880B true TWI266880B (en) | 2006-11-21 |
Family
ID=22879613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW090123211A TWI266880B (en) | 2000-09-20 | 2001-09-20 | Apparatus for coupling a test head to a mounting unit and method of balancing a test head |
Country Status (11)
Country | Link |
---|---|
US (1) | US6975105B2 (zh) |
EP (1) | EP1322964B1 (zh) |
JP (1) | JP2004509344A (zh) |
KR (1) | KR20030032030A (zh) |
CN (1) | CN1234501C (zh) |
AT (1) | ATE310960T1 (zh) |
AU (1) | AU2001289116A1 (zh) |
DE (1) | DE60115268T2 (zh) |
MY (1) | MY131871A (zh) |
TW (1) | TWI266880B (zh) |
WO (1) | WO2002024400A2 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005019564B4 (de) | 2005-04-27 | 2007-10-31 | Hubertus Heigl | Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung |
JP3976276B2 (ja) | 2005-06-10 | 2007-09-12 | 日本航空電子工業株式会社 | 検査装置 |
US8704543B2 (en) * | 2008-07-14 | 2014-04-22 | Advantest Corporation | Test head moving apparatus and electronic component testing apparatus |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4943020A (en) * | 1987-09-17 | 1990-07-24 | Schlumberger Technologies, Inc. | Manipulator apparatus |
US5030869A (en) * | 1990-07-25 | 1991-07-09 | Intest Corporation | Device testing system with cable pivot |
US5241870A (en) * | 1991-07-22 | 1993-09-07 | Intest Corporation | Test head manipulator |
US5600258A (en) | 1993-09-15 | 1997-02-04 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
US5912555A (en) * | 1995-04-10 | 1999-06-15 | Tokyo Electron Limited | Probe apparatus |
US5608334A (en) * | 1995-04-20 | 1997-03-04 | Intest Corporation | Device testing system with cable pivot and method of installation |
-
2001
- 2001-09-17 DE DE60115268T patent/DE60115268T2/de not_active Expired - Lifetime
- 2001-09-17 US US10/380,313 patent/US6975105B2/en not_active Expired - Lifetime
- 2001-09-17 WO PCT/US2001/028985 patent/WO2002024400A2/en active IP Right Grant
- 2001-09-17 EP EP01968911A patent/EP1322964B1/en not_active Expired - Lifetime
- 2001-09-17 JP JP2002528452A patent/JP2004509344A/ja active Pending
- 2001-09-17 AU AU2001289116A patent/AU2001289116A1/en not_active Abandoned
- 2001-09-17 AT AT01968911T patent/ATE310960T1/de not_active IP Right Cessation
- 2001-09-17 CN CNB01818751XA patent/CN1234501C/zh not_active Expired - Fee Related
- 2001-09-17 KR KR10-2003-7003757A patent/KR20030032030A/ko not_active Application Discontinuation
- 2001-09-19 MY MYPI20014371A patent/MY131871A/en unknown
- 2001-09-20 TW TW090123211A patent/TWI266880B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2004509344A (ja) | 2004-03-25 |
US20040032248A1 (en) | 2004-02-19 |
CN1474945A (zh) | 2004-02-11 |
US6975105B2 (en) | 2005-12-13 |
WO2002024400A3 (en) | 2002-06-13 |
ATE310960T1 (de) | 2005-12-15 |
MY131871A (en) | 2007-09-28 |
EP1322964A2 (en) | 2003-07-02 |
AU2001289116A1 (en) | 2002-04-02 |
WO2002024400A2 (en) | 2002-03-28 |
DE60115268T2 (de) | 2006-06-01 |
CN1234501C (zh) | 2006-01-04 |
KR20030032030A (ko) | 2003-04-23 |
DE60115268D1 (de) | 2005-12-29 |
EP1322964B1 (en) | 2005-11-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |