DE60045165D1 - Vorrichtung zum Beschichten von Bahnmaterial - Google Patents

Vorrichtung zum Beschichten von Bahnmaterial

Info

Publication number
DE60045165D1
DE60045165D1 DE60045165T DE60045165T DE60045165D1 DE 60045165 D1 DE60045165 D1 DE 60045165D1 DE 60045165 T DE60045165 T DE 60045165T DE 60045165 T DE60045165 T DE 60045165T DE 60045165 D1 DE60045165 D1 DE 60045165D1
Authority
DE
Germany
Prior art keywords
web material
coating web
coating
web
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60045165T
Other languages
English (en)
Inventor
Kiyoshi Iseki
Seiichiro Yokoyama
Takahiro Kubota
Hiroshi Fujita
Tsukasa Ohshima
Shuji Hidaka
Yoshinori Takada
Yozo Yamada
Shinji Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11032129A external-priority patent/JP2000230819A/ja
Priority claimed from JP11036605A external-priority patent/JP2000239832A/ja
Priority claimed from JP11189536A external-priority patent/JP2001020059A/ja
Application filed by Toyobo Co Ltd filed Critical Toyobo Co Ltd
Application granted granted Critical
Publication of DE60045165D1 publication Critical patent/DE60045165D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/906—Roll or coil
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
    • Y10T428/1317—Multilayer [continuous layer]
    • Y10T428/1321—Polymer or resin containing [i.e., natural or synthetic]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
DE60045165T 1999-02-10 2000-02-09 Vorrichtung zum Beschichten von Bahnmaterial Expired - Lifetime DE60045165D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11032129A JP2000230819A (ja) 1999-02-10 1999-02-10 厚みモニタ装置
JP11036605A JP2000239832A (ja) 1999-02-16 1999-02-16 真空蒸着装置
JP11189536A JP2001020059A (ja) 1999-07-02 1999-07-02 透明ガスバリアフィルムロール

Publications (1)

Publication Number Publication Date
DE60045165D1 true DE60045165D1 (de) 2010-12-09

Family

ID=27287593

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60020999T Expired - Lifetime DE60020999T2 (de) 1999-02-10 2000-02-09 Beschichtetes Bahnmaterial und dessen Herstellung
DE60045165T Expired - Lifetime DE60045165D1 (de) 1999-02-10 2000-02-09 Vorrichtung zum Beschichten von Bahnmaterial

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE60020999T Expired - Lifetime DE60020999T2 (de) 1999-02-10 2000-02-09 Beschichtetes Bahnmaterial und dessen Herstellung

Country Status (4)

Country Link
US (1) US7666490B1 (de)
EP (2) EP1028174B1 (de)
KR (1) KR100715702B1 (de)
DE (2) DE60020999T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI293091B (en) * 2001-09-26 2008-02-01 Tohcello Co Ltd Deposited film and process for producing the same
US8927051B2 (en) * 2007-09-12 2015-01-06 Flisom Ag Method for manufacturing a compound film
WO2012072120A1 (en) * 2010-11-30 2012-06-07 Applied Materials Inc. Apparatus and method for monitoring a deposition of one or more layers in a deposition device
WO2013000570A1 (fr) * 2011-06-30 2013-01-03 Bobst Mex Sa Procede et machine d' enduction d' un substrat en bande continue et dispositif de determination de la qualite d' enduction
EP2777929B1 (de) * 2011-11-11 2016-10-19 Mitsubishi Gas Chemical Company, Inc. Verfahren zur herstellung einer transparenten hitzebeständigen gassperrfolie
JP2014152362A (ja) * 2013-02-08 2014-08-25 Nitto Denko Corp 透明ガスバリアフィルムの製造方法、及び透明ガスバリアフィルムの製造装置
JP6132053B2 (ja) * 2016-06-10 2017-05-24 東洋紡株式会社 無機層積層プラスチックフィルムを連続的に製造する方法
WO2018033786A1 (en) * 2016-08-16 2018-02-22 Flisom Ag Deposition system
EP3666922A4 (de) * 2017-08-10 2021-05-05 Toyobo Co., Ltd. Verfahren zur herstellung von gasbarrierefolien
WO2019057272A1 (en) * 2017-09-20 2019-03-28 Applied Materials, Inc. METHOD AND TREATMENT SYSTEM FOR REGULATING A THICKNESS OF A CERAMIC LAYER ON A SUBSTRATE

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3281265A (en) 1963-09-17 1966-10-25 United States Steel Corp Method and apparatus for controlling coating thickness by electron beam evaporation
GB1336157A (en) * 1969-12-09 1973-11-07 Matsushita Electric Ind Co Ltd Magnetic tape duplicating apparatus
JPS57165252A (en) * 1981-04-06 1982-10-12 Fuji Photo Film Co Ltd Antistatic plastic film
JPS6061649A (ja) 1983-09-16 1985-04-09 Rigaku Denki Kogyo Kk 螢光ｘ線分析の補正方法
JPS60215760A (ja) 1984-04-10 1985-10-29 Mitsubishi Electric Corp 蒸着装置
JPH01113234A (ja) 1987-10-27 1989-05-01 Sumitomo Electric Ind Ltd 金属とゴムの複合物
US5230923A (en) * 1987-12-17 1993-07-27 Toyo Ink Manufacturing Co., Ltd. Process and apparatus for the substantially continuous manufacture of a silicon oxide deposition film on a flexible plastic film
US5792550A (en) * 1989-10-24 1998-08-11 Flex Products, Inc. Barrier film having high colorless transparency and method
US5242500A (en) 1990-08-27 1993-09-07 Leybold Aktiengesellschaft Apparatus for the continuous coating of band-type substrate
JP3018043B2 (ja) 1990-09-07 2000-03-13 セイコーインスツルメンツ株式会社 膜厚測定用検量線作成方法
JPH04354872A (ja) 1991-05-31 1992-12-09 Toppan Printing Co Ltd 真空製膜方法及び真空製膜装置
EP0812779B1 (de) 1991-12-26 2000-08-09 Toyo Boseki Kabushiki Kaisha Gassperrfilm
JPH05311412A (ja) 1992-05-11 1993-11-22 Toppan Printing Co Ltd 蒸着材料および透明バリヤーフィルムの製造方法
US5462779A (en) * 1992-10-02 1995-10-31 Consorzio Ce.Te.V. Centro Tecnologie Del Vuoto Thin film multilayer structure as permeation barrier on plastic film
JP3399570B2 (ja) 1993-02-10 2003-04-21 石川島播磨重工業株式会社 連続真空蒸着装置
JPH06330318A (ja) 1993-05-20 1994-11-29 Toyobo Co Ltd ガスバリアフィルムの製造方法及び製造装置
US5529832A (en) * 1994-11-10 1996-06-25 Teijin Limited Biaxially oriented laminated polyester film
WO1996028299A1 (fr) * 1995-03-14 1996-09-19 Daicel Chemical Industries, Ltd. Film-barriere composite et son procede de production
JP4118509B2 (ja) 1997-10-02 2008-07-16 協和醗酵工業株式会社 プレススルーパック、プレススルーパック用封緘シート及び錠剤の調剤方法
DE19817842A1 (de) * 1998-04-22 1999-10-28 Hoechst Diafoil Gmbh Einschichtige, biaxial orientierte Polyesterfolie, Verfahren zu ihrer Herstellung und ihre Verwendung
JP4354872B2 (ja) 2004-05-19 2009-10-28 西川ゴム工業株式会社 断熱性金型構造

Also Published As

Publication number Publication date
EP1507024A2 (de) 2005-02-16
EP1507024A3 (de) 2005-06-01
EP1507024B1 (de) 2010-10-27
DE60020999T2 (de) 2006-05-04
KR20000057978A (ko) 2000-09-25
EP1028174B1 (de) 2005-06-29
DE60020999D1 (de) 2005-08-04
US7666490B1 (en) 2010-02-23
KR100715702B1 (ko) 2007-05-08
EP1028174A1 (de) 2000-08-16

Similar Documents

Publication Publication Date Title
DE59800298D1 (de) Vorrichtung zum Bearbeiten einer Materialbahn
DE69902467D1 (de) Vorrichtung zum zerstäuben von proben
DE69911676D1 (de) Vorrichtung zum Zuführen von blattförmigem Material
DE69817499D1 (de) Vorrichtung zum Transport von kontinuierlichen Bahnen aus langgestrecktem Material
DE69610756T2 (de) Vorrichtung zum Ausrichten von Bahnen
DE60111607D1 (de) Anlage zum spritzen von beschichtungsmaterial
DE69505990T2 (de) Vorrichtung zum beschichten von bahnmaterial
DE59804574D1 (de) Vorrichtung zum Glätten von Hemden
DE60045165D1 (de) Vorrichtung zum Beschichten von Bahnmaterial
DE60026246D1 (de) Vorrichtung zur Beschichtung von blattförmigem Material
DE69918371D1 (de) Vorrichtung zum Fördern von Teilen
DE69908743D1 (de) Vorrichtung zum Drehen von flachen Gegenständen
DE60223678D1 (de) Vorrichtung zum verteilen von klebstoffmaterial
DE50007330D1 (de) Vorrichtung zum Entkeimen von Packstoffbahnen
DE29811053U1 (de) Vorrichtung zum Aufwickeln von bahnförmigem Gut
DE50010951D1 (de) Vorrichtung zum Überziehen von Warenstücken
DE59808044D1 (de) Vorrichtung zum Querschneiden von Materialbahnen
DE50008066D1 (de) Vorrichtung zum Glätten von Hemden
DE29714234U1 (de) Vorrichtung zum Trocknen von flächigem Gut
DE29807059U1 (de) Vorrichtung zum Zerstäuben von flüssigem Material
DE29814981U1 (de) Vorrichtung zum Halten von Rollschuhen
DE59909905D1 (de) Vorrichtung zum Befeuchten von bahnförmigem Material
DE29704095U1 (de) Vorrichtung zum Trocknen von flächigem Gut
DE29600034U1 (de) Vorrichtung zum Glätten von zähflüssigem Material
ATA199A (de) Vorrichtung zum entdeckeln von honigwaben