DE60043300D1 - - Google Patents

Info

Publication number
DE60043300D1
DE60043300D1 DE60043300T DE60043300T DE60043300D1 DE 60043300 D1 DE60043300 D1 DE 60043300D1 DE 60043300 T DE60043300 T DE 60043300T DE 60043300 T DE60043300 T DE 60043300T DE 60043300 D1 DE60043300 D1 DE 60043300D1
Authority
DE
Germany
Prior art keywords
methyl
substrate
plasma
etching
radicals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60043300T
Other languages
German (de)
English (en)
Inventor
Srinivasan Anand
Carl-Fredrik Carlstrom
Gunnar Landgren
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE9902344A external-priority patent/SE9902344D0/xx
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Application granted granted Critical
Publication of DE60043300D1 publication Critical patent/DE60043300D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H10P50/246—
    • H10P50/242—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H01L21/30612—Etching of AIIIBV compounds
    • H01L21/30621—Vapour phase etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
DE60043300T 1999-06-21 2000-06-21 Expired - Lifetime DE60043300D1 (enExample)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9902344A SE9902344D0 (sv) 1999-06-21 1999-06-21 Dry etching process of III-V-semiconductor
SE9903213A SE9903213D0 (sv) 1999-06-21 1999-09-10 Dry etching process of compound semiconductor materials
PCT/GB2000/002255 WO2000079578A1 (en) 1999-06-21 2000-06-21 Improvements relating to plasma etching

Publications (1)

Publication Number Publication Date
DE60043300D1 true DE60043300D1 (enExample) 2009-12-24

Family

ID=26663600

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60043300T Expired - Lifetime DE60043300D1 (enExample) 1999-06-21 2000-06-21

Country Status (8)

Country Link
US (1) US6933242B1 (enExample)
EP (1) EP1188180B1 (enExample)
JP (1) JP4979167B2 (enExample)
KR (1) KR100731849B1 (enExample)
AT (1) ATE448566T1 (enExample)
DE (1) DE60043300D1 (enExample)
SE (1) SE9903213D0 (enExample)
WO (1) WO2000079578A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6820570B2 (en) 2001-08-15 2004-11-23 Nobel Biocare Services Ag Atomic layer deposition reactor
KR100759808B1 (ko) 2005-12-08 2007-09-20 한국전자통신연구원 Ｉｉｉ－ｖ 족 반도체 다층구조의 식각 방법 및 이를이용한 수직공진형 표면방출 레이저 제조 방법
US20080239428A1 (en) * 2007-04-02 2008-10-02 Inphase Technologies, Inc. Non-ft plane angular filters
JP5723377B2 (ja) * 2009-11-09 2015-05-27 スリーエム イノベイティブ プロパティズ カンパニー 半導体のためのエッチングプロセス
KR102306979B1 (ko) 2014-04-01 2021-09-30 에베 그룹 에. 탈너 게엠베하 기질의 표면 처리를 위한 방법 및 장치
JP2017022368A (ja) * 2015-06-05 2017-01-26 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ ＧａＮ及びその他のＩＩＩ−Ｖ材料の原子層エッチング
US10096487B2 (en) 2015-08-19 2018-10-09 Lam Research Corporation Atomic layer etching of tungsten and other metals
US9991128B2 (en) 2016-02-05 2018-06-05 Lam Research Corporation Atomic layer etching in continuous plasma
US10566212B2 (en) 2016-12-19 2020-02-18 Lam Research Corporation Designer atomic layer etching
KR102733594B1 (ko) * 2019-12-18 2024-11-25 주식회사 원익아이피에스 기판 처리 방법
TW202247248A (zh) 2021-02-03 2022-12-01 美商蘭姆研究公司 原子層蝕刻中的蝕刻選擇性控制

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201820A (ja) * 1993-12-28 1995-08-04 Fujitsu Ltd 水銀カドミウムテルル基板のエッチング方法
US5527425A (en) * 1995-07-21 1996-06-18 At&T Corp. Method of making in-containing III/V semiconductor devices
JPH10303181A (ja) * 1997-04-28 1998-11-13 Mitsui Chem Inc 乾式プロセスガス
JPH1116896A (ja) * 1997-06-27 1999-01-22 Fujitsu Ltd 化合物半導体装置の製造方法

Also Published As

Publication number Publication date
EP1188180B1 (en) 2009-11-11
KR20020041333A (ko) 2002-06-01
ATE448566T1 (de) 2009-11-15
SE9903213D0 (sv) 1999-09-10
KR100731849B1 (ko) 2007-06-25
EP1188180A1 (en) 2002-03-20
JP4979167B2 (ja) 2012-07-18
JP2003502860A (ja) 2003-01-21
US6933242B1 (en) 2005-08-23
WO2000079578A1 (en) 2000-12-28

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