DE60038258D1 - Lasermustergenerator - Google Patents

Lasermustergenerator

Info

Publication number
DE60038258D1
DE60038258D1 DE60038258T DE60038258T DE60038258D1 DE 60038258 D1 DE60038258 D1 DE 60038258D1 DE 60038258 T DE60038258 T DE 60038258T DE 60038258 T DE60038258 T DE 60038258T DE 60038258 D1 DE60038258 D1 DE 60038258D1
Authority
DE
Germany
Prior art keywords
pattern generator
laser pattern
laser
generator
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60038258T
Other languages
English (en)
Other versions
DE60038258T2 (de
Inventor
Paul C Allen
Michael J Bohan
Morris H Green
Henry Christopher Hamaker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE60038258D1 publication Critical patent/DE60038258D1/de
Publication of DE60038258T2 publication Critical patent/DE60038258T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • H04N1/053—Detection, control or error compensation of scanning velocity or position in main scanning direction, e.g. synchronisation of line start or picture elements in a line
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Printer (AREA)
DE60038258T 1999-03-19 2000-03-17 Lasermustergenerator Expired - Lifetime DE60038258T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/273,115 US6731320B1 (en) 1999-03-19 1999-03-19 Laser pattern generator
US273115 2008-11-18

Publications (2)

Publication Number Publication Date
DE60038258D1 true DE60038258D1 (de) 2008-04-17
DE60038258T2 DE60038258T2 (de) 2008-12-04

Family

ID=23042620

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60038258T Expired - Lifetime DE60038258T2 (de) 1999-03-19 2000-03-17 Lasermustergenerator
DE60040636T Expired - Lifetime DE60040636D1 (de) 1999-03-19 2000-03-17 Lasermustergenerator

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60040636T Expired - Lifetime DE60040636D1 (de) 1999-03-19 2000-03-17 Lasermustergenerator

Country Status (8)

Country Link
US (2) US6731320B1 (de)
EP (2) EP1078506B1 (de)
JP (2) JP3998421B2 (de)
KR (1) KR100451452B1 (de)
AU (1) AU4015300A (de)
CA (1) CA2330122A1 (de)
DE (2) DE60038258T2 (de)
WO (1) WO2000057629A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483196B2 (en) * 2003-09-23 2009-01-27 Applied Materials, Inc. Apparatus for multiple beam deflection and intensity stabilization
JP4393361B2 (ja) * 2004-11-30 2010-01-06 キヤノン株式会社 画像形成装置及び画像形成方法、プログラム
JP4929738B2 (ja) * 2005-04-18 2012-05-09 セイコーエプソン株式会社 光走査装置、光走査装置の制御方法及び画像表示装置
CN100368864C (zh) * 2005-04-18 2008-02-13 精工爱普生株式会社 光扫描装置、其控制方法及图像显示装置
US7551359B2 (en) * 2006-09-14 2009-06-23 3M Innovative Properties Company Beam splitter apparatus and system
DE102006059818B4 (de) * 2006-12-11 2017-09-14 Kleo Ag Belichtungsanlage
US8037736B2 (en) 2008-01-14 2011-10-18 International Business Machines Corporation Non-linearity determination of positioning scanner of measurement tool
US8537416B2 (en) 2009-03-06 2013-09-17 Micronic Laser Systems Ab Rotor optics imaging method and system with variable dose during sweep
DE102009032210B4 (de) 2009-07-03 2011-06-09 Kleo Ag Bearbeitungsanlage
JP2014116518A (ja) * 2012-12-11 2014-06-26 Canon Inc 描画装置及び物品の製造方法
KR102381348B1 (ko) * 2020-10-29 2022-03-30 한국전기연구원 탄화규소 웨이퍼의 tsd와 ted 결함 비파괴 분석법

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56110960A (en) * 1980-02-06 1981-09-02 Canon Inc Recorder
US4686542A (en) * 1986-04-03 1987-08-11 Xerox Corporation High speed, high resolution raster output scanner
US4692877A (en) * 1986-06-27 1987-09-08 Ibm Corporation Digital timing control system with memory look ahead
JPS63217763A (ja) * 1987-03-06 1988-09-09 Hitachi Ltd 光プリンタ
US4733252A (en) * 1987-03-30 1988-03-22 Xerox Corporation Beam splitter for multibeam A/O modulators and printer systems
DE68922046T2 (de) * 1988-08-30 1996-07-04 Tokyo Electric Co Ltd Optischer Abtaster.
US4900130A (en) * 1988-10-07 1990-02-13 Eastman Kodak Company Method of scanning
JPH02105110A (ja) * 1988-10-14 1990-04-17 Asahi Optical Co Ltd 複数ビーム走査方法
JPH07113706B2 (ja) * 1988-12-16 1995-12-06 大日本スクリーン製造株式会社 光ビーム走査用レンズ
JPH02232616A (ja) * 1988-12-23 1990-09-14 Xerox Corp ディジタルプリンタ
US5117243A (en) * 1990-04-06 1992-05-26 S&R Tech Development, Inc. Scanner with electronic non-linearity compensation and method of processing image data
JP2572300B2 (ja) * 1990-08-21 1997-01-16 大日本スクリーン製造株式会社 画像走査装置
JP2667590B2 (ja) * 1991-03-12 1997-10-27 三田工業株式会社 レーザビームを用いた画像形成装置の水平同期信号生成装置
US5477330A (en) * 1992-10-16 1995-12-19 Printware, Inc. Synchronization to a start-of-scan detection, and digital generation of variable frequencies, from a fixed-frequency fixed-phase frequency source in an image generator in order to highly accurately time the placement of pixels upon a scan line
US5386221A (en) 1992-11-02 1995-01-31 Etec Systems, Inc. Laser pattern generation apparatus
EP0617541B1 (de) * 1993-02-25 1999-04-14 Konica Corporation Bilderzeugungsgerät zum Erzeugen einer Abbildung mit Hilfe von mehreren Laserstrahlabtastern
WO1994020301A1 (en) * 1993-03-10 1994-09-15 Pease Richard W Light beam image recording and input apparatus and method
US5631762A (en) * 1993-06-04 1997-05-20 Hitachi Koki Co., Ltd. Multi-beam generating element and optical printing apparatus therewith
US5504462A (en) * 1993-09-10 1996-04-02 Xerox Corporation Apparatus for enhancing pixel addressability in a pulse width and position modulated system
US5923359A (en) * 1997-03-14 1999-07-13 Cymbolic Sciences International Inc. Internal drum scophony raster recording device
JP3703587B2 (ja) * 1996-12-06 2005-10-05 富士写真フイルム株式会社 光ビーム走査装置およびその制御方法

Also Published As

Publication number Publication date
EP1078506B1 (de) 2008-10-29
EP1078506A1 (de) 2001-02-28
EP1725013A1 (de) 2006-11-22
US6897888B2 (en) 2005-05-24
KR20010025044A (ko) 2001-03-26
US20040165056A1 (en) 2004-08-26
CA2330122A1 (en) 2000-09-28
DE60038258T2 (de) 2008-12-04
JP4212487B2 (ja) 2009-01-21
EP1725013B1 (de) 2008-03-05
AU4015300A (en) 2000-10-09
US6731320B1 (en) 2004-05-04
WO2000057629A1 (en) 2000-09-28
WO2000057629A9 (en) 2002-03-14
JP2004230899A (ja) 2004-08-19
JP2002540608A (ja) 2002-11-26
KR100451452B1 (ko) 2004-10-06
JP3998421B2 (ja) 2007-10-24
DE60040636D1 (de) 2008-12-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition