DE60037188D1 - Verfahren zum Betreiben eines Suszeptors für Halbleiterscheiben - Google Patents
Verfahren zum Betreiben eines Suszeptors für HalbleiterscheibenInfo
- Publication number
- DE60037188D1 DE60037188D1 DE60037188T DE60037188T DE60037188D1 DE 60037188 D1 DE60037188 D1 DE 60037188D1 DE 60037188 T DE60037188 T DE 60037188T DE 60037188 T DE60037188 T DE 60037188T DE 60037188 D1 DE60037188 D1 DE 60037188D1
- Authority
- DE
- Germany
- Prior art keywords
- susceptor
- operating
- semiconductor wafers
- wafers
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 235000012431 wafers Nutrition 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00118670A EP1184894B1 (de) | 2000-08-29 | 2000-08-29 | Verfahren zum Betreiben eines Suszeptors für Halbleiterscheiben |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60037188D1 true DE60037188D1 (de) | 2008-01-03 |
DE60037188T2 DE60037188T2 (de) | 2008-10-02 |
Family
ID=8169684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60037188T Expired - Lifetime DE60037188T2 (de) | 2000-08-29 | 2000-08-29 | Verfahren zum Betreiben eines Suszeptors für Halbleiterscheiben |
Country Status (4)
Country | Link |
---|---|
US (1) | US20020023590A1 (de) |
EP (1) | EP1184894B1 (de) |
JP (1) | JP2002134591A (de) |
DE (1) | DE60037188T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3595853B2 (ja) * | 1999-03-18 | 2004-12-02 | 日本エー・エス・エム株式会社 | プラズマcvd成膜装置 |
US7070660B2 (en) * | 2002-05-03 | 2006-07-04 | Asm America, Inc. | Wafer holder with stiffening rib |
JP2004146568A (ja) * | 2002-10-24 | 2004-05-20 | Sumitomo Electric Ind Ltd | 半導体製造装置用セラミックスヒーター |
US7560144B2 (en) * | 2005-03-22 | 2009-07-14 | Asm Japan K.K. | Method of stabilizing film quality of low-dielectric constant film |
US10896842B2 (en) | 2009-10-20 | 2021-01-19 | Tokyo Electron Limited | Manufacturing method of sample table |
US11085112B2 (en) | 2011-10-28 | 2021-08-10 | Asm Ip Holding B.V. | Susceptor with ring to limit backside deposition |
US9576830B2 (en) * | 2012-05-18 | 2017-02-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for adjusting wafer warpage |
WO2014024216A1 (ja) * | 2012-08-06 | 2014-02-13 | パイオニア株式会社 | ドライエッチング装置およびドライエッチング方法 |
US9022392B2 (en) * | 2012-08-31 | 2015-05-05 | United Microelectronics Corporation | Chuck and semiconductor process using the same |
US10361097B2 (en) | 2012-12-31 | 2019-07-23 | Globalwafers Co., Ltd. | Apparatus for stressing semiconductor substrates |
WO2015119744A1 (en) * | 2014-02-07 | 2015-08-13 | Applied Materials, Inc. | Chucking capability for bowed wafers on dsa |
JP5927260B2 (ja) * | 2014-10-02 | 2016-06-01 | 東京エレクトロン株式会社 | 試料台及びマイクロ波プラズマ処理装置 |
US10068787B2 (en) * | 2016-12-30 | 2018-09-04 | Sunpower Corporation | Bowing semiconductor wafers |
TW202129832A (zh) | 2020-01-21 | 2021-08-01 | 荷蘭商Asm Ip 控股公司 | 用於均勻沉積之具有側壁隆起的基座及處理結晶基材之方法 |
TWI786408B (zh) * | 2020-05-28 | 2022-12-11 | 環球晶圓股份有限公司 | 晶圓承載台及晶圓鑲埋結構的形成方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100294062B1 (ko) * | 1992-10-27 | 2001-10-24 | 조셉 제이. 스위니 | 웨이퍼 처리 챔버에서의 돔형 페데스탈용 클램프 링 |
US5580388A (en) * | 1993-01-21 | 1996-12-03 | Moore Epitaxial, Inc. | Multi-layer susceptor for rapid thermal process reactors |
US6025099A (en) * | 1994-04-29 | 2000-02-15 | Slonaker; Steven Douglas | Field curvature correction utilizing smoothly curved chuck for substrate exposure in electronics manufacturing |
JP3586031B2 (ja) * | 1996-03-27 | 2004-11-10 | 株式会社東芝 | サセプタおよび熱処理装置および熱処理方法 |
US5872694A (en) * | 1997-12-23 | 1999-02-16 | Siemens Aktiengesellschaft | Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage |
-
2000
- 2000-08-29 EP EP00118670A patent/EP1184894B1/de not_active Expired - Lifetime
- 2000-08-29 DE DE60037188T patent/DE60037188T2/de not_active Expired - Lifetime
-
2001
- 2001-08-29 JP JP2001260027A patent/JP2002134591A/ja active Pending
- 2001-08-29 US US09/941,824 patent/US20020023590A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
DE60037188T2 (de) | 2008-10-02 |
EP1184894A1 (de) | 2002-03-06 |
EP1184894B1 (de) | 2007-11-21 |
US20020023590A1 (en) | 2002-02-28 |
JP2002134591A (ja) | 2002-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |