DE60035447D1 - Herstellungsverfahren einer Elektronenemittierenden Vorrichtung - Google Patents

Herstellungsverfahren einer Elektronenemittierenden Vorrichtung

Info

Publication number
DE60035447D1
DE60035447D1 DE60035447T DE60035447T DE60035447D1 DE 60035447 D1 DE60035447 D1 DE 60035447D1 DE 60035447 T DE60035447 T DE 60035447T DE 60035447 T DE60035447 T DE 60035447T DE 60035447 D1 DE60035447 D1 DE 60035447D1
Authority
DE
Germany
Prior art keywords
electron
manufacturing
emitting device
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60035447T
Other languages
English (en)
Other versions
DE60035447T2 (de
Inventor
Miki Tamura
Toshikazu Ohnishi
Kazuhiro Jindai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE60035447D1 publication Critical patent/DE60035447D1/de
Application granted granted Critical
Publication of DE60035447T2 publication Critical patent/DE60035447T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE60035447T 1999-02-25 2000-02-24 Herstellungsverfahren einer Elektronenemittierenden Vorrichtung Expired - Lifetime DE60035447T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP4780399 1999-02-25
JP4780399 1999-02-25
JP2000047625A JP3323853B2 (ja) 1999-02-25 2000-02-24 電子放出素子、電子源及び画像形成装置の製造方法
JP2000047625 2000-02-24

Publications (2)

Publication Number Publication Date
DE60035447D1 true DE60035447D1 (de) 2007-08-23
DE60035447T2 DE60035447T2 (de) 2008-03-13

Family

ID=26387979

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60035447T Expired - Lifetime DE60035447T2 (de) 1999-02-25 2000-02-24 Herstellungsverfahren einer Elektronenemittierenden Vorrichtung

Country Status (6)

Country Link
US (2) US6419539B1 (de)
EP (1) EP1032013B1 (de)
JP (1) JP3323853B2 (de)
KR (1) KR100367247B1 (de)
CN (1) CN1249765C (de)
DE (1) DE60035447T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6612887B1 (en) * 1999-02-25 2003-09-02 Canon Kabushiki Kaisha Method for manufacturing electron source and image-forming apparatus
EP1032013B1 (de) * 1999-02-25 2007-07-11 Canon Kabushiki Kaisha Herstellungsverfahren einer Elektronenemittierenden Vorrichtung
JP3754883B2 (ja) * 2000-03-23 2006-03-15 キヤノン株式会社 画像表示装置の製造法
JP3793014B2 (ja) * 2000-10-03 2006-07-05 キヤノン株式会社 電子源の製造装置、電子源の製造方法及び画像形成装置の製造方法
US6837768B2 (en) * 2001-03-05 2005-01-04 Canon Kabushiki Kaisha Method of fabricating electron source substrate and image forming apparatus
JP4551586B2 (ja) * 2001-05-22 2010-09-29 キヤノン株式会社 電圧印加プローブ、電子源の製造装置及び製造方法
JP3689683B2 (ja) * 2001-05-25 2005-08-31 キヤノン株式会社 電子放出素子、電子源および画像形成装置の製造方法
JP4366054B2 (ja) * 2001-08-03 2009-11-18 キヤノン株式会社 マトリクス配線の製造方法、及び、電子源、画像形成装置の製造方法
JP2003092061A (ja) * 2001-09-17 2003-03-28 Canon Inc 電圧印加装置、電子源の製造装置及び製造方法
CN100419939C (zh) * 2003-01-21 2008-09-17 佳能株式会社 通电处理方法和电子源衬底的制造方法
JP4920925B2 (ja) * 2005-07-25 2012-04-18 キヤノン株式会社 電子放出素子及びそれを用いた電子源並びに画像表示装置および情報表示再生装置とそれらの製造方法
US20070238261A1 (en) * 2006-04-05 2007-10-11 Asml Netherlands B.V. Device, lithographic apparatus and device manufacturing method
CN101512036B (zh) * 2006-09-11 2011-11-02 株式会社爱发科 真空蒸气处理装置
WO2009122581A1 (ja) * 2008-04-03 2009-10-08 パイオニア株式会社 回路装置の駆動方法及び回路装置
RU2515937C1 (ru) * 2012-12-11 2014-05-20 Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток" (ФГУП "НПП "Исток") Высоковакуумный пост для откачки электровакуумных приборов

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5066883A (en) * 1987-07-15 1991-11-19 Canon Kabushiki Kaisha Electron-emitting device with electron-emitting region insulated from electrodes
JPS6431332A (en) * 1987-07-28 1989-02-01 Canon Kk Electron beam generating apparatus and its driving method
JP2610160B2 (ja) * 1988-05-10 1997-05-14 キヤノン株式会社 画像表示装置
US5076205A (en) * 1989-01-06 1991-12-31 General Signal Corporation Modular vapor processor system
JP2782224B2 (ja) * 1989-03-30 1998-07-30 キヤノン株式会社 画像形成装置の駆動方法
JP3633154B2 (ja) * 1996-03-22 2005-03-30 株式会社日立製作所 薄膜型電子源および薄膜型電子源応用機器
JP3200284B2 (ja) 1994-06-20 2001-08-20 キヤノン株式会社 電子源及び画像形成装置の製造方法
CA2418595C (en) * 1993-12-27 2006-11-28 Canon Kabushiki Kaisha Electron-emitting device and method of manufacturing the same as well as electron source and image-forming apparatus
JP3416266B2 (ja) 1993-12-28 2003-06-16 キヤノン株式会社 電子放出素子とその製造方法、及び該電子放出素子を用いた電子源及び画像形成装置
JP3062990B2 (ja) * 1994-07-12 2000-07-12 キヤノン株式会社 電子放出素子及びそれを用いた電子源並びに画像形成装置の製造方法と、電子放出素子の活性化装置
US6246168B1 (en) * 1994-08-29 2001-06-12 Canon Kabushiki Kaisha Electron-emitting device, electron source and image-forming apparatus as well as method of manufacturing the same
JP2916887B2 (ja) * 1994-11-29 1999-07-05 キヤノン株式会社 電子放出素子、電子源、画像形成装置の製造方法
JP2967334B2 (ja) * 1995-03-13 1999-10-25 キヤノン株式会社 電子放出素子の製造方法、並びにそれを用いた電子源及び画像形成装置の製造方法
US5998924A (en) * 1996-04-03 1999-12-07 Canon Kabushiki Kaisha Image/forming apparatus including an organic substance at low pressure
JP3546606B2 (ja) 1996-08-05 2004-07-28 双葉電子工業株式会社 電界放出素子の製造方法
WO1998044497A1 (fr) * 1997-03-31 1998-10-08 Matsushita Electric Industrial Co., Ltd. Support d'enregistrement optique et son procede de fabrication
DE69820945T2 (de) * 1997-09-16 2004-10-21 Canon Kk Verfahren zur Herstellung einer Elektronenquelle und Vorrichtung zur Herstellung einer Elektronenquelle
EP1032013B1 (de) * 1999-02-25 2007-07-11 Canon Kabushiki Kaisha Herstellungsverfahren einer Elektronenemittierenden Vorrichtung
DE60041845D1 (de) * 1999-02-25 2009-05-07 Canon Kk Elektronen emittierende Einrichtung,Elektronenquelle und Verfahren zur Herstellung eines Bilderzeugungsgerätes

Also Published As

Publication number Publication date
KR100367247B1 (ko) 2003-01-09
EP1032013B1 (de) 2007-07-11
KR20000062641A (ko) 2000-10-25
EP1032013A2 (de) 2000-08-30
US6780073B2 (en) 2004-08-24
US6419539B1 (en) 2002-07-16
CN1267078A (zh) 2000-09-20
JP3323853B2 (ja) 2002-09-09
EP1032013A3 (de) 2002-01-23
CN1249765C (zh) 2006-04-05
US20020127941A1 (en) 2002-09-12
DE60035447T2 (de) 2008-03-13
JP2000311598A (ja) 2000-11-07

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Legal Events

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