DE60032535D1 - Resonator mit akustischen Volumenwellen mit verbesserter lateralen Modeunterdrückung - Google Patents

Resonator mit akustischen Volumenwellen mit verbesserter lateralen Modeunterdrückung

Info

Publication number
DE60032535D1
DE60032535D1 DE60032535T DE60032535T DE60032535D1 DE 60032535 D1 DE60032535 D1 DE 60032535D1 DE 60032535 T DE60032535 T DE 60032535T DE 60032535 T DE60032535 T DE 60032535T DE 60032535 D1 DE60032535 D1 DE 60032535D1
Authority
DE
Germany
Prior art keywords
resonator
acoustic waves
bulk acoustic
mode rejection
lateral mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60032535T
Other languages
English (en)
Other versions
DE60032535T2 (de
Inventor
John D Larson
Richard C Ruby
Paul Bradley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Avago Technologies Wireless IP Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avago Technologies Wireless IP Singapore Pte Ltd filed Critical Avago Technologies Wireless IP Singapore Pte Ltd
Publication of DE60032535D1 publication Critical patent/DE60032535D1/de
Application granted granted Critical
Publication of DE60032535T2 publication Critical patent/DE60032535T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE60032535T 1999-03-30 2000-02-08 Resonator mit akustischen Volumenwellen mit verbesserter lateralen Modeunterdrückung Expired - Lifetime DE60032535T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/282,082 US6215375B1 (en) 1999-03-30 1999-03-30 Bulk acoustic wave resonator with improved lateral mode suppression
US282082 1999-03-30

Publications (2)

Publication Number Publication Date
DE60032535D1 true DE60032535D1 (de) 2007-02-08
DE60032535T2 DE60032535T2 (de) 2007-10-04

Family

ID=23080044

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60032535T Expired - Lifetime DE60032535T2 (de) 1999-03-30 2000-02-08 Resonator mit akustischen Volumenwellen mit verbesserter lateralen Modeunterdrückung

Country Status (4)

Country Link
US (1) US6215375B1 (de)
EP (1) EP1041717B1 (de)
JP (1) JP4653868B2 (de)
DE (1) DE60032535T2 (de)

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EP1041717A3 (de) 2000-12-20
JP4653868B2 (ja) 2011-03-16
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US6215375B1 (en) 2001-04-10
EP1041717B1 (de) 2006-12-27
JP2000332568A (ja) 2000-11-30

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