DE60030178D1 - Herstellungsverfahren für eine optische Nahfeldsonde - Google Patents
Herstellungsverfahren für eine optische NahfeldsondeInfo
- Publication number
- DE60030178D1 DE60030178D1 DE60030178T DE60030178T DE60030178D1 DE 60030178 D1 DE60030178 D1 DE 60030178D1 DE 60030178 T DE60030178 T DE 60030178T DE 60030178 T DE60030178 T DE 60030178T DE 60030178 D1 DE60030178 D1 DE 60030178D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- optical probe
- field optical
- probe
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/06—SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Biophysics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Optical Head (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36170199 | 1999-12-20 | ||
JP36170199 | 1999-12-20 | ||
JP2000130826 | 2000-04-28 | ||
JP2000130826 | 2000-04-28 | ||
JP2000352778 | 2000-11-20 | ||
JP2000352778A JP4472863B2 (ja) | 1999-12-20 | 2000-11-20 | 近視野光プローブおよびその近視野光プローブを用いた近視野光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60030178D1 true DE60030178D1 (de) | 2006-09-28 |
DE60030178T2 DE60030178T2 (de) | 2007-07-19 |
Family
ID=27341656
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60030178T Expired - Fee Related DE60030178T2 (de) | 1999-12-20 | 2000-12-20 | Herstellungsverfahren für eine optische Nahfeldsonde |
DE60035250T Expired - Fee Related DE60035250T2 (de) | 1999-12-20 | 2000-12-20 | Optische Nahfeldsonde und optisches Scanning-Nahfeld-Mikroskop |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60035250T Expired - Fee Related DE60035250T2 (de) | 1999-12-20 | 2000-12-20 | Optische Nahfeldsonde und optisches Scanning-Nahfeld-Mikroskop |
Country Status (4)
Country | Link |
---|---|
US (1) | US6768095B2 (de) |
EP (2) | EP1111426B1 (de) |
JP (1) | JP4472863B2 (de) |
DE (2) | DE60030178T2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308002A (ja) * | 2000-02-15 | 2001-11-02 | Canon Inc | フォトマスクを用いたパターン作製方法、及びパターン作製装置 |
GB2368675A (en) * | 2000-05-02 | 2002-05-08 | Ford Motor Co | Online invention disclosure system and docket system |
JP2002005810A (ja) * | 2000-06-16 | 2002-01-09 | Canon Inc | プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置 |
KR100441894B1 (ko) * | 2002-01-26 | 2004-07-27 | 한국전자통신연구원 | 마이크로 집적형 근접장 광기록 헤드 및 이를 이용한광기록 장치 |
US8288154B2 (en) * | 2002-10-21 | 2012-10-16 | Alegis Microsystems | Nanomotion sensing system and method |
KR100499029B1 (ko) * | 2002-10-22 | 2005-07-01 | 한국전자통신연구원 | 광 정보 저장장치의 헤드에 적용 가능한 캔티레버형근접장 탐침 구조 및 그 제작 방법 |
DE10303961B4 (de) * | 2003-01-31 | 2005-03-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Sonde für ein optisches Nahfeldmikroskop und Verfahren zu deren Herstellung |
US7637960B2 (en) * | 2005-11-15 | 2009-12-29 | University Of Houston | Short and thin silicon cantilever with tip and fabrication thereof |
KR100869377B1 (ko) * | 2006-05-08 | 2008-11-19 | 주식회사 엘지화학 | 병렬 연결 구조의 중첩식 이차전지 |
US7975316B2 (en) * | 2007-01-17 | 2011-07-05 | Osaka University | Atomic force microscope and interaction force measurement method using atomic force microscope |
KR100936748B1 (ko) * | 2007-05-29 | 2010-01-21 | 한양대학교 산학협력단 | 탐침 현미경의 자동 랜딩 방법 및 이를 이용하는 자동 랜딩장치 |
JP4949293B2 (ja) * | 2008-02-21 | 2012-06-06 | セイコーインスツル株式会社 | ティップ型プローブ製造方法、ティップ型プローブ及びティップ型プローブ製造装置 |
US8151368B2 (en) * | 2008-05-12 | 2012-04-03 | Japan Science And Technology Agency | Dynamic mode AFM apparatus |
US8214916B2 (en) * | 2009-01-26 | 2012-07-03 | Nanoink, Inc. | Large area, homogeneous array fabrication including leveling with use of bright spots |
WO2010096593A2 (en) * | 2009-02-18 | 2010-08-26 | Northwestern University | Beam pen lithography |
CN102221525B (zh) * | 2010-04-14 | 2015-04-15 | 深圳迈瑞生物医疗电子股份有限公司 | 一种样本检测光学系统、样本分析装置 |
DE202010013458U1 (de) | 2010-09-23 | 2010-12-30 | Eberhard-Karls-Universität Tübingen | Sonde für aperturlose Nahfeldmikroskopie und/oder für Ramanspektroskopie |
CN102012439B (zh) * | 2010-10-12 | 2013-08-07 | 中国科学院苏州纳米技术与纳米仿生研究所 | 硅基自锐式afm探针的制备方法 |
WO2013112608A1 (en) | 2012-01-23 | 2013-08-01 | The Regents Of The University Of Michigan | Photoconductive device with plasmonic electrodes |
CN104903793A (zh) | 2012-10-29 | 2015-09-09 | 西北大学 | 热启动和投影平版印刷系统和方法 |
US11300773B2 (en) * | 2014-09-29 | 2022-04-12 | Agilent Technologies, Inc. | Mid-infrared scanning system |
JP6671745B2 (ja) * | 2015-09-30 | 2020-03-25 | 国立大学法人北陸先端科学技術大学院大学 | 近接場プローブ構造および走査プローブ顕微鏡 |
TWI579534B (zh) * | 2015-12-16 | 2017-04-21 | 和碩聯合科技股份有限公司 | 壓力感測系統 |
EP3612812A4 (de) * | 2017-04-20 | 2021-01-06 | The Regents of the University of California | Systeme und verfahren für hochfrequenznanoskopie |
EP3722741A1 (de) * | 2019-04-08 | 2020-10-14 | Nokia Technologies Oy | Vorrichtung mit einem ausleger |
US11906424B2 (en) | 2019-10-01 | 2024-02-20 | The Regents Of The University Of California | Method for identifying chemical and structural variations through terahertz time-domain spectroscopy |
EP4052458A4 (de) | 2019-10-31 | 2023-11-29 | The Regents of the University of California | Verfahren und systeme zur detektion des wasserstatus bei pflanzen mittels terahertzstrahlung |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5289004A (en) * | 1990-03-27 | 1994-02-22 | Olympus Optical Co., Ltd. | Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light |
JP3268797B2 (ja) | 1991-10-09 | 2002-03-25 | オリンパス光学工業株式会社 | 光導入装置 |
JP3213436B2 (ja) * | 1993-05-24 | 2001-10-02 | シャープ株式会社 | 光プローブ素子、光プローブ素子を用いた記録再生装置、および光プローブ素子の製造方法 |
US5354985A (en) | 1993-06-03 | 1994-10-11 | Stanford University | Near field scanning optical and force microscope including cantilever and optical waveguide |
JPH0792173A (ja) * | 1993-09-24 | 1995-04-07 | Agency Of Ind Science & Technol | 原子間力顕微鏡用カンチレバーとその製造方法 |
US5633455A (en) * | 1993-10-05 | 1997-05-27 | Board Of Trustees Of The Leland Stanford, Jr. University | Method of detecting particles of semiconductor wafers |
JP3047030B2 (ja) | 1993-11-05 | 2000-05-29 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡 |
US5675532A (en) * | 1994-07-28 | 1997-10-07 | Kabushiki Kaisha Toshiba | Recording medium and recording/reproduction method |
US5479024A (en) * | 1994-08-11 | 1995-12-26 | The Regents Of The University Of California | Method and apparatus for performing near-field optical microscopy |
US5489774A (en) | 1994-09-20 | 1996-02-06 | The Board Of Trustees Of The Leland Stanford University | Combined atomic force and near field scanning optical microscope with photosensitive cantilever |
US5581083A (en) * | 1995-05-11 | 1996-12-03 | The Regents Of The University Of California | Method for fabricating a sensor on a probe tip used for atomic force microscopy and the like |
US5838005A (en) | 1995-05-11 | 1998-11-17 | The Regents Of The University Of California | Use of focused ion and electron beams for fabricating a sensor on a probe tip used for scanning multiprobe microscopy and the like |
US5936237A (en) * | 1995-07-05 | 1999-08-10 | Van Der Weide; Daniel Warren | Combined topography and electromagnetic field scanning probe microscope |
JP3618896B2 (ja) | 1996-03-29 | 2005-02-09 | キヤノン株式会社 | 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置 |
JPH10325840A (ja) | 1997-05-23 | 1998-12-08 | Seiko Instr Inc | 偏光を利用した走査型近視野顕微鏡 |
JP4412620B2 (ja) | 1997-12-15 | 2010-02-10 | セイコーインスツル株式会社 | 光導波路プローブ |
JP3554233B2 (ja) * | 1998-10-28 | 2004-08-18 | キヤノン株式会社 | 光プローブの製造方法 |
-
2000
- 2000-11-20 JP JP2000352778A patent/JP4472863B2/ja not_active Expired - Lifetime
- 2000-12-19 US US09/740,664 patent/US6768095B2/en not_active Expired - Fee Related
- 2000-12-20 EP EP00311436A patent/EP1111426B1/de not_active Expired - Lifetime
- 2000-12-20 DE DE60030178T patent/DE60030178T2/de not_active Expired - Fee Related
- 2000-12-20 EP EP04078523A patent/EP1519388B1/de not_active Expired - Lifetime
- 2000-12-20 DE DE60035250T patent/DE60035250T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4472863B2 (ja) | 2010-06-02 |
EP1519388A1 (de) | 2005-03-30 |
EP1111426A3 (de) | 2003-03-19 |
US6768095B2 (en) | 2004-07-27 |
US20010011704A1 (en) | 2001-08-09 |
EP1111426A2 (de) | 2001-06-27 |
DE60035250T2 (de) | 2007-11-22 |
JP2002014030A (ja) | 2002-01-18 |
EP1111426B1 (de) | 2007-06-20 |
DE60030178T2 (de) | 2007-07-19 |
DE60035250D1 (de) | 2007-08-02 |
EP1519388B1 (de) | 2006-08-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60030178D1 (de) | Herstellungsverfahren für eine optische Nahfeldsonde | |
DE60042503D1 (de) | Aufzeichnungsverfahren für optisches Aufzeichnungsmedium | |
DE69942446D1 (de) | Optische koppler für multimodefasern | |
DE50107714D1 (de) | Anordnung und verfahren für eine optische informationsübertragung | |
GB0121741D0 (en) | Multi-parameter fiber optic probes | |
DE69928474D1 (de) | Optiche sonde für nahfeld-messungen | |
DE60010259D1 (de) | Feststellvorrichtung für optische fasern | |
DE69832110D1 (de) | Herstellungsverfahren für eine Prüfnadel für Halbleitergeräte | |
NO994363D0 (no) | Fiberoptisk probe for temperaturmÕlinger i biologiske media | |
DE69800492D1 (de) | Prüfvorrichtung für optische Komponenten | |
DE69834280D1 (de) | Herstellungsverfahren für einen rückstrahlenden Gegenstand | |
DE60313403D1 (de) | Design einer Sondenspitze für ein optisches Nahfeldmikroskop | |
DE60027113D1 (de) | Optische Prüfvorrichtung | |
DE60039466D1 (de) | Herstellungsverfahren und -Vorrichtung für optische Platte | |
DE60040128D1 (de) | Optischer mikro-ausleger, herstellungsverfahren für einen solchen und mikro-ausleger-halter | |
DE60026777D1 (de) | Optische Koppelvorrichtung und Verfahren zu deren Herstellung | |
DE69936978D1 (de) | Haltevorrichtung für optische fasern | |
DE50113754D1 (de) | Lichtleitfaserspule für eine faseroptische messeinrichtung und verfahren zu deren herstellung | |
DE60107273T2 (de) | Tragmechanismur für eine Haube | |
DE69521556D1 (de) | Herstellungsverfahren für eine optische Halbleitervorrichtung | |
DE60102089D1 (de) | Positionierelement für Lichtleitfasern | |
PT1356467E (pt) | Metodo para fabricar um meio de informacao optico | |
DE60222051D1 (de) | Herstellungsverfahren für optischen Wellenleiter | |
DE50009898D1 (de) | Steckerteil für eine optische Steckverbindung | |
DE60034287D1 (de) | Optische Überwachung für eine Koppelfeldstruktur |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |