DE60313403D1 - Design einer Sondenspitze für ein optisches Nahfeldmikroskop - Google Patents

Design einer Sondenspitze für ein optisches Nahfeldmikroskop

Info

Publication number
DE60313403D1
DE60313403D1 DE60313403T DE60313403T DE60313403D1 DE 60313403 D1 DE60313403 D1 DE 60313403D1 DE 60313403 T DE60313403 T DE 60313403T DE 60313403 T DE60313403 T DE 60313403T DE 60313403 D1 DE60313403 D1 DE 60313403D1
Authority
DE
Germany
Prior art keywords
design
near field
optical microscope
probe tip
field optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60313403T
Other languages
English (en)
Other versions
DE60313403T2 (de
Inventor
Kazuo Tanaka
Masahiro Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gifu University NUC
Original Assignee
Gifu University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gifu University NUC filed Critical Gifu University NUC
Application granted granted Critical
Publication of DE60313403D1 publication Critical patent/DE60313403D1/de
Publication of DE60313403T2 publication Critical patent/DE60313403T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/241—Light guide terminations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biophysics (AREA)
  • Optical Head (AREA)
  • Optical Integrated Circuits (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE60313403T 2002-07-25 2003-07-24 Design einer Sondenspitze für ein optisches Nahfeldmikroskop Expired - Fee Related DE60313403T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002217084 2002-07-25
JP2002217084 2002-07-25
JP2003018997A JP3668779B2 (ja) 2002-07-25 2003-01-28 光導波装置
JP2003018997 2003-01-28

Publications (2)

Publication Number Publication Date
DE60313403D1 true DE60313403D1 (de) 2007-06-06
DE60313403T2 DE60313403T2 (de) 2007-09-06

Family

ID=30002395

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60313403T Expired - Fee Related DE60313403T2 (de) 2002-07-25 2003-07-24 Design einer Sondenspitze für ein optisches Nahfeldmikroskop

Country Status (6)

Country Link
US (1) US6947634B2 (de)
EP (1) EP1385175B1 (de)
JP (1) JP3668779B2 (de)
CN (1) CN1284986C (de)
DE (1) DE60313403T2 (de)
SG (1) SG105581A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4289918B2 (ja) * 2003-05-01 2009-07-01 キヤノン株式会社 位置検出装置、及び該位置検出装置を有するアライメント装置
US7702195B2 (en) 2004-06-11 2010-04-20 Gifu Univeristy Optical waveguide
KR100868246B1 (ko) * 2004-06-11 2008-11-11 기후고꾸리츠 다이가꾸호오징 기후다이가꾸 광도파 장치
JP4574250B2 (ja) * 2004-06-30 2010-11-04 キヤノン株式会社 フォトマスク
WO2007018230A1 (ja) * 2005-08-10 2007-02-15 Osaka University 光プローブ
US8288157B2 (en) 2007-09-12 2012-10-16 Plc Diagnostics, Inc. Waveguide-based optical scanning systems
US9976192B2 (en) 2006-03-10 2018-05-22 Ldip, Llc Waveguide-based detection system with scanning light source
US9423397B2 (en) 2006-03-10 2016-08-23 Indx Lifecare, Inc. Waveguide-based detection system with scanning light source
US9528939B2 (en) 2006-03-10 2016-12-27 Indx Lifecare, Inc. Waveguide-based optical scanning systems
US7951583B2 (en) * 2006-03-10 2011-05-31 Plc Diagnostics, Inc. Optical scanning system
WO2007105593A1 (ja) 2006-03-13 2007-09-20 Nec Corporation フォトダイオード、およびその製造方法、ならびに光通信デバイスおよび光インタコネクションモジュール
US9046649B2 (en) 2006-08-31 2015-06-02 Micron Technology, Inc. Communication methods, methods of forming an interconnect, signal interconnects, integrated circuit structures, circuits, and data apparatuses
US7844142B2 (en) 2006-08-31 2010-11-30 Micron Technology, Inc. Communication methods, methods of forming an interconnect, signal interconnects, integrated circuit structures, circuits, and data apparatuses
KR100783365B1 (ko) 2006-09-29 2007-12-07 한국전자통신연구원 광도파로 소자
KR100846515B1 (ko) * 2007-03-19 2008-07-17 삼성전자주식회사 테이퍼진 ｃ-형 개구를 갖는 90도 굽어진 금속 도파로,상기 도파로의 제조 방법, 상기 도파로를 이용한 광전송모듈 및 상기 도파로를 채용한 열보조 자기기록 헤드
US8467637B2 (en) 2007-05-01 2013-06-18 Nec Corporation Waveguide path coupling-type photodiode
GB2461026B (en) 2008-06-16 2011-03-09 Plc Diagnostics Inc System and method for nucleic acids sequencing by phased synthesis
JP4520524B2 (ja) * 2008-11-04 2010-08-04 株式会社日立製作所 熱アシスト記録用磁気ヘッドスライダ及びそれを用いた熱アシスト記録装置
US8092704B2 (en) 2008-12-30 2012-01-10 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications
US7880996B2 (en) * 2008-12-31 2011-02-01 Hitachi Global Storage Technologies Netherlands B.V. Ridge wave-guide for thermal assisted magnetic recording
JPWO2010095333A1 (ja) * 2009-02-17 2012-08-23 コニカミノルタアドバンストレイヤー株式会社 近接場光発生器、光記録ヘッド及び光記録装置
EP2425286B1 (de) 2009-04-29 2020-06-24 Ldip, Llc Auf wellenleitern basierendes detektionssystem mit abtastlichtquelle
US10018566B2 (en) 2014-02-28 2018-07-10 Ldip, Llc Partially encapsulated waveguide based sensing chips, systems and methods of use
US9053722B1 (en) * 2014-07-23 2015-06-09 HGST Netherlands B.V. Split-ring resonator (SRR) NFT design for use in HAMR
WO2016138427A1 (en) 2015-02-27 2016-09-01 Indx Lifecare, Inc. Waveguide-based detection system with scanning light source
US9472230B1 (en) * 2015-04-20 2016-10-18 Headway Technologies, Inc. Plasmon generator including a main body and a front protrusion
CN107271470B (zh) * 2017-04-19 2019-03-29 电子科技大学 一种太赫兹波传输聚束系统
JP7031856B2 (ja) * 2018-02-14 2022-03-08 国立大学法人東京工業大学 ビーム偏向デバイス

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0185782B1 (de) * 1984-12-28 1989-03-15 International Business Machines Corporation Wellenleiter für ein optisches Nahfeldmikroskop
US5789742A (en) * 1996-10-28 1998-08-04 Nec Research Institute, Inc. Near-field scanning optical microscope probe exhibiting resonant plasmon excitation
JP3513448B2 (ja) * 1999-11-11 2004-03-31 キヤノン株式会社 光プローブ
EP1247122A1 (de) 1999-12-23 2002-10-09 Spectalis Corporation Optische wellenleiterstrukturen
US20020074493A1 (en) * 2000-07-27 2002-06-20 Hill Henry A. Multiple-source arrays for confocal and near-field microscopy
JP3574794B2 (ja) 2001-06-05 2004-10-06 独立行政法人 科学技術振興機構 プローブ及びその製造方法
WO2003001258A1 (en) 2001-06-22 2003-01-03 Spectalis Corp. Optical waveguide structures
JP4245117B2 (ja) 2001-06-22 2009-03-25 セイコーインスツル株式会社 光情報記録再生装置
US6549687B1 (en) * 2001-10-26 2003-04-15 Lake Shore Cryotronics, Inc. System and method for measuring physical, chemical and biological stimuli using vertical cavity surface emitting lasers with integrated tuner
NZ567227A (en) * 2003-03-13 2010-01-29 3M Innovative Properties Co Methods of improving skin quality through topical application of an immune response modifier such as imiquimod

Also Published As

Publication number Publication date
CN1482473A (zh) 2004-03-17
US6947634B2 (en) 2005-09-20
JP2004109965A (ja) 2004-04-08
DE60313403T2 (de) 2007-09-06
JP3668779B2 (ja) 2005-07-06
CN1284986C (zh) 2006-11-15
SG105581A1 (en) 2004-08-27
EP1385175A1 (de) 2004-01-28
EP1385175B1 (de) 2007-04-25
US20040062477A1 (en) 2004-04-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee