DE60011322D1 - Laservorrichtung - Google Patents

Laservorrichtung

Info

Publication number
DE60011322D1
DE60011322D1 DE60011322T DE60011322T DE60011322D1 DE 60011322 D1 DE60011322 D1 DE 60011322D1 DE 60011322 T DE60011322 T DE 60011322T DE 60011322 T DE60011322 T DE 60011322T DE 60011322 D1 DE60011322 D1 DE 60011322D1
Authority
DE
Germany
Prior art keywords
laser device
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60011322T
Other languages
English (en)
Other versions
DE60011322T2 (de
Inventor
Tadahiro Ohmi
Nobumasa Suzuki
Toshikuni Shinohara
Hiroshi Ohsawa
Masaki Hirayama
Nobuyoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE60011322D1 publication Critical patent/DE60011322D1/de
Application granted granted Critical
Publication of DE60011322T2 publication Critical patent/DE60011322T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0315—Waveguide lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE60011322T 1999-02-26 2000-02-25 Laservorrichtung Expired - Lifetime DE60011322T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05181499A JP4256520B2 (ja) 1999-02-26 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法
JP5181499 1999-02-26

Publications (2)

Publication Number Publication Date
DE60011322D1 true DE60011322D1 (de) 2004-07-15
DE60011322T2 DE60011322T2 (de) 2005-06-23

Family

ID=12897383

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60011322T Expired - Lifetime DE60011322T2 (de) 1999-02-26 2000-02-25 Laservorrichtung

Country Status (4)

Country Link
US (1) US6650678B1 (de)
EP (1) EP1032098B1 (de)
JP (1) JP4256520B2 (de)
DE (1) DE60011322T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60023964T2 (de) * 1999-02-01 2006-06-22 Ohmi, Tadahiro, Sendai Laservorrichtung, Belichtungsapparat unter Verwendung derselben und Herstellungsverfahren
JP3619141B2 (ja) 2000-11-10 2005-02-09 キヤノン株式会社 投影露光装置及びデバイス製造方法
JP4334225B2 (ja) * 2001-01-25 2009-09-30 東京エレクトロン株式会社 電子デバイス材料の製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4004249A (en) * 1976-01-22 1977-01-18 General Motors Corporation Optical waveguide laser pumped by guided electromagnetic wave
US4802183A (en) * 1982-04-07 1989-01-31 Board Of Trustees Of The Leland Stanford Junior University Microwave excited excimer laser and method
US4513424A (en) * 1982-09-21 1985-04-23 Waynant Ronald W Laser pumped by X-band microwaves
DE3912568A1 (de) * 1989-04-17 1990-10-18 Siemens Ag Gas-laser, insbesondere co(pfeil abwaerts)2(pfeil abwaerts)-laser
DE4112946A1 (de) * 1991-04-20 1992-10-22 Deutsche Forsch Luft Raumfahrt Gepulstes gasentladungslasersystem
US5255282A (en) * 1991-11-25 1993-10-19 Quantametrics Inc. Open waveguide excimer laser
US5450436A (en) * 1992-11-20 1995-09-12 Kabushiki Kaisha Komatsu Seisakusho Laser gas replenishing apparatus and method in excimer laser system
JP3382314B2 (ja) 1993-08-24 2003-03-04 キヤノン株式会社 通信装置及び通信装置の制御方法
US5900103A (en) * 1994-04-20 1999-05-04 Tokyo Electron Limited Plasma treatment method and apparatus
JP2816813B2 (ja) * 1994-04-12 1998-10-27 株式会社小松製作所 エキシマレーザ装置
JPH08220304A (ja) * 1995-02-13 1996-08-30 Tadahiro Omi 光学物品及びそれを用いた露光装置又は光学系並びにその製造方法
US5696428A (en) * 1995-06-07 1997-12-09 Lsi Logic Corporation Apparatus and method using optical energy for specifying and quantitatively controlling chemically-reactive components of semiconductor processing plasma etching gas
US6331994B1 (en) 1996-07-19 2001-12-18 Canon Kabushiki Kaisha Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube
JP3815578B2 (ja) * 1996-07-19 2006-08-30 忠弘 大見 エキシマレーザー発振装置
US6357385B1 (en) * 1997-01-29 2002-03-19 Tadahiro Ohmi Plasma device

Also Published As

Publication number Publication date
EP1032098B1 (de) 2004-06-09
EP1032098A2 (de) 2000-08-30
JP4256520B2 (ja) 2009-04-22
EP1032098A3 (de) 2001-09-12
US6650678B1 (en) 2003-11-18
DE60011322T2 (de) 2005-06-23
JP2000252565A (ja) 2000-09-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition