DE60040256D1 - Excimer-Laservorrichtung - Google Patents
Excimer-LaservorrichtungInfo
- Publication number
- DE60040256D1 DE60040256D1 DE60040256T DE60040256T DE60040256D1 DE 60040256 D1 DE60040256 D1 DE 60040256D1 DE 60040256 T DE60040256 T DE 60040256T DE 60040256 T DE60040256 T DE 60040256T DE 60040256 D1 DE60040256 D1 DE 60040256D1
- Authority
- DE
- Germany
- Prior art keywords
- laser device
- excimer laser
- excimer
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/047—Details of housings; Mounting of active magnetic bearings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0388—Compositions, materials or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11397299A JP3766230B2 (ja) | 1999-04-21 | 1999-04-21 | エキシマレーザ装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60040256D1 true DE60040256D1 (de) | 2008-10-30 |
Family
ID=14625839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60040256T Expired - Lifetime DE60040256D1 (de) | 1999-04-21 | 2000-04-20 | Excimer-Laservorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6366039B1 (de) |
EP (1) | EP1047162B1 (de) |
JP (1) | JP3766230B2 (de) |
KR (1) | KR100654409B1 (de) |
DE (1) | DE60040256D1 (de) |
TW (1) | TW444423B (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001111138A (ja) * | 1999-10-04 | 2001-04-20 | Ebara Corp | エキシマレーザ装置 |
EP1119082A3 (de) * | 2000-01-18 | 2004-05-26 | Ushiodenki Kabushiki Kaisha | Querstromventilator für einen durch Entladung angeregten Gaslaser |
JP2001234929A (ja) * | 2000-02-21 | 2001-08-31 | Ebara Corp | 磁気軸受及び循環ファン装置 |
JP2001352114A (ja) * | 2000-06-08 | 2001-12-21 | Ebara Corp | エキシマレーザ装置用磁気軸受装置 |
EP1188932A3 (de) * | 2000-09-19 | 2003-05-02 | Ntn Corporation | Lagersystem für Laser-Excimer-Lüfter |
JP2002345210A (ja) * | 2001-05-11 | 2002-11-29 | Ebara Corp | 電動機装置及びエキシマレーザ装置 |
JP4656058B2 (ja) * | 2004-04-21 | 2011-03-23 | 三菱電機株式会社 | ガスレーザ発振器およびガスレーザ加工機 |
JP4146867B2 (ja) * | 2006-06-22 | 2008-09-10 | ファナック株式会社 | ガスレーザ発振器 |
JP6063199B2 (ja) * | 2012-10-15 | 2017-01-18 | ギガフォトン株式会社 | 放電励起式ガスレーザ装置 |
CN107210573A (zh) * | 2015-03-12 | 2017-09-26 | 极光先进雷射株式会社 | 放电激励式气体激光装置 |
WO2017094099A1 (ja) | 2015-12-01 | 2017-06-08 | ギガフォトン株式会社 | エキシマレーザ装置 |
CN114183468B (zh) * | 2021-12-08 | 2022-11-15 | 珠海格力电器股份有限公司 | 压缩机、空调器 |
CN114183932A (zh) * | 2021-12-17 | 2022-03-15 | 珠海格力电器股份有限公司 | 一种燃气热水器、风机转速检测方法及装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5377215A (en) * | 1992-11-13 | 1994-12-27 | Cymer Laser Technologies | Excimer laser |
CA2190697C (en) | 1996-01-31 | 2000-07-25 | Donald Glenn Larson | Blower motor with adjustable timing |
US6026103A (en) * | 1999-04-13 | 2000-02-15 | Cymer, Inc. | Gas discharge laser with roller bearings and stable magnetic axial positioning |
-
1999
- 1999-04-21 JP JP11397299A patent/JP3766230B2/ja not_active Expired - Lifetime
-
2000
- 2000-04-18 TW TW089107213A patent/TW444423B/zh not_active IP Right Cessation
- 2000-04-19 US US09/553,466 patent/US6366039B1/en not_active Expired - Lifetime
- 2000-04-20 KR KR1020000021029A patent/KR100654409B1/ko active IP Right Grant
- 2000-04-20 DE DE60040256T patent/DE60040256D1/de not_active Expired - Lifetime
- 2000-04-20 EP EP00108648A patent/EP1047162B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1047162A2 (de) | 2000-10-25 |
US6366039B1 (en) | 2002-04-02 |
KR20000077056A (ko) | 2000-12-26 |
JP3766230B2 (ja) | 2006-04-12 |
TW444423B (en) | 2001-07-01 |
EP1047162A3 (de) | 2003-10-01 |
JP2000307175A (ja) | 2000-11-02 |
KR100654409B1 (ko) | 2006-12-05 |
EP1047162B1 (de) | 2008-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |