DE60010462T2 - Verfahren zum Messen von Unebenheiten auf einem Ggenstand - Google Patents

Verfahren zum Messen von Unebenheiten auf einem Ggenstand Download PDF

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Publication number
DE60010462T2
DE60010462T2 DE60010462T DE60010462T DE60010462T2 DE 60010462 T2 DE60010462 T2 DE 60010462T2 DE 60010462 T DE60010462 T DE 60010462T DE 60010462 T DE60010462 T DE 60010462T DE 60010462 T2 DE60010462 T2 DE 60010462T2
Authority
DE
Germany
Prior art keywords
reference object
grid
camera
pixel
projecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60010462T
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German (de)
English (en)
Other versions
DE60010462D1 (de
Inventor
Alain Coulombe
Michel Cantin
Alexandre Nikitine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solvision Inc
Original Assignee
Solvision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solvision Inc filed Critical Solvision Inc
Application granted granted Critical
Publication of DE60010462D1 publication Critical patent/DE60010462D1/de
Publication of DE60010462T2 publication Critical patent/DE60010462T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Image Processing (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE60010462T 1999-07-14 2000-07-14 Verfahren zum Messen von Unebenheiten auf einem Ggenstand Expired - Fee Related DE60010462T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA002277855A CA2277855A1 (fr) 1999-07-14 1999-07-14 Methode et systeme de mesure de la hauteur des billes de soudure d'un circuit imprime
PCT/CA2000/000834 WO2001006210A1 (en) 1999-07-14 2000-07-14 Method and system for measuring the relief of an object

Publications (2)

Publication Number Publication Date
DE60010462D1 DE60010462D1 (de) 2004-06-09
DE60010462T2 true DE60010462T2 (de) 2005-04-21

Family

ID=4163790

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60010462T Expired - Fee Related DE60010462T2 (de) 1999-07-14 2000-07-14 Verfahren zum Messen von Unebenheiten auf einem Ggenstand

Country Status (13)

Country Link
US (2) USRE42899E1 (enExample)
EP (1) EP1192414B1 (enExample)
JP (1) JP4112858B2 (enExample)
KR (2) KR100815503B1 (enExample)
CN (1) CN1181313C (enExample)
AT (1) ATE266188T1 (enExample)
AU (1) AU6143300A (enExample)
CA (3) CA2277855A1 (enExample)
DE (1) DE60010462T2 (enExample)
HK (1) HK1047470B (enExample)
IL (2) IL147607A0 (enExample)
TW (1) TW544509B (enExample)
WO (1) WO2001006210A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010064635B4 (de) 2009-07-03 2024-03-14 Koh Young Technology Inc. Verfahren zum Untersuchen eines Messobjektes

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US7535560B2 (en) * 2007-02-26 2009-05-19 Aceris 3D Inspection Inc. Method and system for the inspection of integrated circuit devices having leads
US20100260409A1 (en) * 2007-09-16 2010-10-14 Machvision, Inc. Imaging measurement system with periodic pattern illumination and tdi
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US20140198185A1 (en) * 2013-01-17 2014-07-17 Cyberoptics Corporation Multi-camera sensor for three-dimensional imaging of a circuit board
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CN103673934A (zh) * 2013-12-31 2014-03-26 中国矿业大学 一种基于网格投影的pcb板平整度检测方法
CN104101611A (zh) * 2014-06-06 2014-10-15 华南理工大学 一种类镜面物体表面光学成像装置及其成像方法
US11248899B2 (en) * 2015-08-17 2022-02-15 Qso Interferometer Systems Ab Method and apparatus for deriving a topography of an object surface
CN107356214A (zh) * 2017-08-23 2017-11-17 苏州岸肯电子科技有限公司 一种玻璃平整度检测装置
US10701259B2 (en) * 2017-09-15 2020-06-30 Quality Vision International Inc. Video measuring system with dual-acting reticle projector for focusing and alignment
KR102632562B1 (ko) * 2018-08-22 2024-02-02 삼성전자주식회사 Si 기반 검사 장치와 검사 방법, 및 그 검사 방법을 포함한 반도체 소자 제조방법
CN112866549B (zh) * 2019-11-12 2022-04-12 Oppo广东移动通信有限公司 图像处理方法和装置、电子设备、计算机可读存储介质
TWI735330B (zh) 2020-09-03 2021-08-01 由田新技股份有限公司 球體高度量測系統及其方法
CN113358030B (zh) * 2021-07-15 2022-09-30 中国科学院长春光学精密机械与物理研究所 色散共焦测量系统及其误差修正方法
CN114111637B (zh) * 2021-11-25 2024-06-21 天津工业大学 一种基于虚拟双目的条纹结构光三维重建方法
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010064635B4 (de) 2009-07-03 2024-03-14 Koh Young Technology Inc. Verfahren zum Untersuchen eines Messobjektes

Also Published As

Publication number Publication date
KR20020060151A (ko) 2002-07-16
EP1192414A1 (en) 2002-04-03
JP4112858B2 (ja) 2008-07-02
WO2001006210A1 (en) 2001-01-25
CA2378867A1 (en) 2001-01-25
US7023559B1 (en) 2006-04-04
CN1375053A (zh) 2002-10-16
KR20070058652A (ko) 2007-06-08
CA2579563A1 (en) 2001-01-25
JP2003504634A (ja) 2003-02-04
USRE42899E1 (en) 2011-11-08
CA2378867C (en) 2007-05-29
DE60010462D1 (de) 2004-06-09
IL147607A (en) 2006-12-10
ATE266188T1 (de) 2004-05-15
KR100815503B1 (ko) 2008-03-20
KR100858521B1 (ko) 2008-09-12
CA2277855A1 (fr) 2001-01-14
TW544509B (en) 2003-08-01
HK1047470A1 (en) 2003-02-21
CN1181313C (zh) 2004-12-22
IL147607A0 (en) 2002-08-14
AU6143300A (en) 2001-02-05
EP1192414B1 (en) 2004-05-06
HK1047470B (en) 2005-01-14

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8327 Change in the person/name/address of the patent owner

Owner name: SOLVISION, INC., LONGUEUIL, QUEBEC, CA

8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: DRAUDT, A., DIPL.-ING., PAT.-ANW., 42289 WUPPERTAL

8339 Ceased/non-payment of the annual fee