DE60009415D1 - Korrosionsbeständiges Bauteil und Verfahren zu dessen Herstellung - Google Patents

Korrosionsbeständiges Bauteil und Verfahren zu dessen Herstellung

Info

Publication number
DE60009415D1
DE60009415D1 DE60009415T DE60009415T DE60009415D1 DE 60009415 D1 DE60009415 D1 DE 60009415D1 DE 60009415 T DE60009415 T DE 60009415T DE 60009415 T DE60009415 T DE 60009415T DE 60009415 D1 DE60009415 D1 DE 60009415D1
Authority
DE
Germany
Prior art keywords
corrosion
production
resistant component
resistant
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60009415T
Other languages
English (en)
Inventor
Kiyoshi Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60009415D1 publication Critical patent/DE60009415D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5055—Fluorides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
DE60009415T 1999-09-30 2000-09-29 Korrosionsbeständiges Bauteil und Verfahren zu dessen Herstellung Expired - Lifetime DE60009415D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27775199A JP4166386B2 (ja) 1999-09-30 1999-09-30 耐蝕性部材およびその製造方法

Publications (1)

Publication Number Publication Date
DE60009415D1 true DE60009415D1 (de) 2004-05-06

Family

ID=17587834

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60009415T Expired - Lifetime DE60009415D1 (de) 1999-09-30 2000-09-29 Korrosionsbeständiges Bauteil und Verfahren zu dessen Herstellung

Country Status (4)

Country Link
US (1) US6524731B1 (de)
EP (1) EP1088803B1 (de)
JP (1) JP4166386B2 (de)
DE (1) DE60009415D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002293630A (ja) * 2001-03-29 2002-10-09 Toshiba Ceramics Co Ltd 耐プラズマ性部材およびその製造方法
JP2002313781A (ja) * 2001-04-11 2002-10-25 Sumitomo Electric Ind Ltd 基板処理装置
JP3894313B2 (ja) 2002-12-19 2007-03-22 信越化学工業株式会社 フッ化物含有膜、被覆部材及びフッ化物含有膜の形成方法
JP2005203734A (ja) * 2003-12-15 2005-07-28 Toshiba Ceramics Co Ltd 金属部材埋設セラミックス品とその製造方法
JP2006079731A (ja) * 2004-09-09 2006-03-23 Fuji Photo Film Co Ltd 光情報記録媒体
JP2007063070A (ja) * 2005-08-31 2007-03-15 Toshiba Ceramics Co Ltd 耐プラズマ性イットリア焼結体の製造方法
JP2008251742A (ja) * 2007-03-29 2008-10-16 Tokyo Electron Ltd 基板処理装置及びフォーカスリングを載置する基板載置台
US10242888B2 (en) 2007-04-27 2019-03-26 Applied Materials, Inc. Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance
US10622194B2 (en) 2007-04-27 2020-04-14 Applied Materials, Inc. Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
JP5416570B2 (ja) * 2009-12-15 2014-02-12 住友電気工業株式会社 加熱冷却デバイスおよびそれを搭載した装置
JP5876259B2 (ja) * 2011-04-14 2016-03-02 信越化学工業株式会社 窒化アルミニウム膜によって被覆された部材の製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1120817B8 (de) 1991-03-26 2007-10-10 Ngk Insulators, Ltd. Verwendung eines korrosion beständigen Substratshalters
FR2708626B1 (fr) * 1993-08-02 1998-06-05 Director General Agency Ind Film ultramince transparent et conducteur et procédé pour sa fabrication.
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
JPH07273053A (ja) 1994-03-31 1995-10-20 Tokyo Electron Ltd 処理装置及びアルミ系部材のコーティング方法
US5756222A (en) 1994-08-15 1998-05-26 Applied Materials, Inc. Corrosion-resistant aluminum article for semiconductor processing equipment
US6027792A (en) 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
JPH09328382A (ja) * 1996-06-04 1997-12-22 Mitsubishi Materials Corp 半導体製造装置用の窒化アルミニウム基材及びその製造方法
JPH09326384A (ja) * 1996-06-04 1997-12-16 Anelva Corp プラズマ処理装置
JPH10167859A (ja) * 1996-12-05 1998-06-23 Ngk Insulators Ltd セラミックス部品およびその製造方法
JP3559426B2 (ja) * 1997-05-30 2004-09-02 京セラ株式会社 耐食性部材
JP3362113B2 (ja) * 1997-07-15 2003-01-07 日本碍子株式会社 耐蝕性部材、ウエハー設置部材および耐蝕性部材の製造方法
JPH11236285A (ja) 1998-02-25 1999-08-31 Ngk Insulators Ltd 耐食性セラミックス部材の製造方法
JP3949268B2 (ja) * 1998-04-20 2007-07-25 日本碍子株式会社 耐食性セラミックス部材
JP4054148B2 (ja) * 1999-02-01 2008-02-27 日本碍子株式会社 耐食性部材の製造方法及び耐食性部材

Also Published As

Publication number Publication date
EP1088803A1 (de) 2001-04-04
JP4166386B2 (ja) 2008-10-15
JP2001097791A (ja) 2001-04-10
US6524731B1 (en) 2003-02-25
EP1088803B1 (de) 2004-03-31

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Legal Events

Date Code Title Description
8332 No legal effect for de