DE60000178T2 - Oberflächenemittierender Vielfachlaser mit vertikalem Resonator und Herstellungsverfahren - Google Patents
Oberflächenemittierender Vielfachlaser mit vertikalem Resonator und HerstellungsverfahrenInfo
- Publication number
- DE60000178T2 DE60000178T2 DE60000178T DE60000178T DE60000178T2 DE 60000178 T2 DE60000178 T2 DE 60000178T2 DE 60000178 T DE60000178 T DE 60000178T DE 60000178 T DE60000178 T DE 60000178T DE 60000178 T2 DE60000178 T2 DE 60000178T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- multiple laser
- vertical resonator
- emitting multiple
- emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/42—Arrays of surface emitting lasers
- H01S5/423—Arrays of surface emitting lasers having a vertical cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2054—Methods of obtaining the confinement
- H01S5/2077—Methods of obtaining the confinement using lateral bandgap control during growth, e.g. selective growth, mask induced
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11723999P | 1999-01-26 | 1999-01-26 | |
US09/370,667 US6560262B1 (en) | 1999-01-26 | 1999-08-09 | Vertical cavity surface emitting laser array and a process for making same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60000178D1 DE60000178D1 (de) | 2002-07-04 |
DE60000178T2 true DE60000178T2 (de) | 2003-01-30 |
Family
ID=26815079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60000178T Expired - Fee Related DE60000178T2 (de) | 1999-01-26 | 2000-01-19 | Oberflächenemittierender Vielfachlaser mit vertikalem Resonator und Herstellungsverfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US6560262B1 (de) |
EP (1) | EP1030420B1 (de) |
JP (1) | JP2000223792A (de) |
KR (1) | KR20000053620A (de) |
DE (1) | DE60000178T2 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2363901A (en) * | 2000-06-20 | 2002-01-09 | Mitel Semiconductor Ab | An optical emission device having quantum wells |
KR100727907B1 (ko) * | 2000-07-20 | 2007-06-14 | 삼성전자주식회사 | 다중 파장 표면광 레이저 및 그 제조방법 |
KR100754156B1 (ko) * | 2000-08-23 | 2007-09-03 | 삼성전자주식회사 | 다중 파장 표면광 레이저 및 그 제조방법 |
US6836321B2 (en) * | 2001-06-20 | 2004-12-28 | Lucent Technologies Inc. | Testing bottom-emitting VCSELs |
US20040255689A1 (en) * | 2003-04-03 | 2004-12-23 | Murray Sabrina L. | Flow rate test apparatus and method |
JP2005150472A (ja) * | 2003-11-17 | 2005-06-09 | Alps Electric Co Ltd | 波長可変光源及びその製造方法 |
US20070041416A1 (en) * | 2005-08-19 | 2007-02-22 | Koelle Bernhard U | Tunable long-wavelength VCSEL system |
EP2684263B1 (de) | 2011-03-09 | 2015-05-13 | Koninklijke Philips N.V. | Vcsel-array mit erhöhter effizienz |
CN102820616B (zh) * | 2012-08-31 | 2014-02-12 | 中国科学院半导体研究所 | 利用选择区域外延技术制作分布反馈激光器阵列的方法 |
JP2015103740A (ja) * | 2013-11-27 | 2015-06-04 | キヤノン株式会社 | 面発光レーザ、およびそれを用いた光干渉断層計 |
US10761195B2 (en) | 2016-04-22 | 2020-09-01 | OPSYS Tech Ltd. | Multi-wavelength LIDAR system |
KR102326493B1 (ko) | 2017-03-13 | 2021-11-17 | 옵시스 테크 엘티디 | 눈-안전 스캐닝 lidar 시스템 |
WO2019022941A1 (en) | 2017-07-28 | 2019-01-31 | OPSYS Tech Ltd. | VCSEL LIDAR TRANSMITTER WITH LOW ANGULAR DIVERGENCE |
CN107887790A (zh) * | 2017-09-27 | 2018-04-06 | 华东师范大学 | 一种多波长GaN基非对称量子阱面发射激光器及其制备方法 |
KR102589319B1 (ko) | 2017-11-15 | 2023-10-16 | 옵시스 테크 엘티디 | 잡음 적응형 솔리드-스테이트 lidar 시스템 |
US11906663B2 (en) | 2018-04-01 | 2024-02-20 | OPSYS Tech Ltd. | Noise adaptive solid-state LIDAR system |
JP6650961B2 (ja) * | 2018-04-25 | 2020-02-19 | キヤノン株式会社 | 面発光レーザ、およびそれを用いた光干渉断層計 |
CN112119481A (zh) | 2018-05-11 | 2020-12-22 | 加利福尼亚大学董事会 | 磷砷化镓包覆材料在砷化镓衬底上的外延生长 |
CN113692540A (zh) | 2019-04-09 | 2021-11-23 | 欧普赛斯技术有限公司 | 带激光控制的固态lidar发送器 |
WO2020242834A1 (en) | 2019-05-30 | 2020-12-03 | OPSYS Tech Ltd. | Eye-safe long-range lidar system using actuator |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5963568A (en) | 1996-07-01 | 1999-10-05 | Xerox Corporation | Multiple wavelength, surface emitting laser with broad bandwidth distributed Bragg reflectors |
US5960024A (en) * | 1998-03-30 | 1999-09-28 | Bandwidth Unlimited, Inc. | Vertical optical cavities produced with selective area epitaxy |
-
1999
- 1999-08-09 US US09/370,667 patent/US6560262B1/en not_active Expired - Lifetime
-
2000
- 2000-01-19 EP EP00300383A patent/EP1030420B1/de not_active Expired - Lifetime
- 2000-01-19 DE DE60000178T patent/DE60000178T2/de not_active Expired - Fee Related
- 2000-01-25 JP JP2000015646A patent/JP2000223792A/ja active Pending
- 2000-01-26 KR KR1020000003651A patent/KR20000053620A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP1030420B1 (de) | 2002-05-29 |
US6560262B1 (en) | 2003-05-06 |
KR20000053620A (ko) | 2000-08-25 |
EP1030420A1 (de) | 2000-08-23 |
JP2000223792A (ja) | 2000-08-11 |
DE60000178D1 (de) | 2002-07-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |