DE60116912D1 - Abstimmbare Fabry-Perot-Filter und Laser mit reduziertem Frequenzrauschen - Google Patents

Abstimmbare Fabry-Perot-Filter und Laser mit reduziertem Frequenzrauschen

Info

Publication number
DE60116912D1
DE60116912D1 DE60116912T DE60116912T DE60116912D1 DE 60116912 D1 DE60116912 D1 DE 60116912D1 DE 60116912 T DE60116912 T DE 60116912T DE 60116912 T DE60116912 T DE 60116912T DE 60116912 D1 DE60116912 D1 DE 60116912D1
Authority
DE
Germany
Prior art keywords
lasers
frequency noise
reduced frequency
tunable fabry
perot filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60116912T
Other languages
English (en)
Other versions
DE60116912T2 (de
Inventor
Rodney S Tucker
Wayne V Sorin
Douglas M Baney
Curt A Flory
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE60116912D1 publication Critical patent/DE60116912D1/de
Application granted granted Critical
Publication of DE60116912T2 publication Critical patent/DE60116912T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
    • H01S5/18363—Structure of the reflectors, e.g. hybrid mirrors comprising air layers
    • H01S5/18366—Membrane DBR, i.e. a movable DBR on top of the VCSEL
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
    • H01S5/18388—Lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Filters (AREA)
  • Semiconductor Lasers (AREA)
DE60116912T 2000-04-14 2001-03-08 Abstimmbare Fabry-Perot-Filter und Laser mit reduziertem Frequenzrauschen Expired - Fee Related DE60116912T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/549,267 US6724785B1 (en) 2000-04-14 2000-04-14 Tunable fabry-perot filters and lasers with reduced frequency noise
US549267 2000-04-14

Publications (2)

Publication Number Publication Date
DE60116912D1 true DE60116912D1 (de) 2006-04-13
DE60116912T2 DE60116912T2 (de) 2006-10-26

Family

ID=24192298

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60116912T Expired - Fee Related DE60116912T2 (de) 2000-04-14 2001-03-08 Abstimmbare Fabry-Perot-Filter und Laser mit reduziertem Frequenzrauschen

Country Status (4)

Country Link
US (1) US6724785B1 (de)
EP (1) EP1146377B1 (de)
JP (1) JP2001358402A (de)
DE (1) DE60116912T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003208179B2 (en) * 2002-03-08 2008-12-18 The University Of Western Australia Tunable cavity resonator and method of fabricating same
AUPS098002A0 (en) 2002-03-08 2002-03-28 University Of Western Australia, The Tunable cavity resonator, and method of fabricating same
KR100489801B1 (ko) * 2002-12-10 2005-05-16 한국전자통신연구원 파장가변 광 필터 및 그 제조방법
US7447891B2 (en) * 2003-04-30 2008-11-04 Hewlett-Packard Development Company, L.P. Light modulator with concentric control-electrode structure
TWI275222B (en) * 2003-05-23 2007-03-01 Rohm & Haas Elect Mat External cavity semi-conductor laser and method for fabrication thereof
US7061659B2 (en) * 2004-03-31 2006-06-13 Intel Corporation Thermally tuned filter having a pre-stressed membrane
US7623142B2 (en) * 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
EP1674823A1 (de) 2004-12-21 2006-06-28 Davidson Instruments, Inc. Abstimmbarer Laser für dynamisches Messen
US7733553B2 (en) * 2005-09-21 2010-06-08 Hewlett-Packard Development Company, L.P. Light modulator with tunable optical state
US20070211257A1 (en) * 2006-03-09 2007-09-13 Kearl Daniel A Fabry-Perot Interferometer Composite and Method
US7804600B1 (en) 2007-04-30 2010-09-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ring-laser gyroscope system using dispersive element(s)
JP5696519B2 (ja) * 2011-02-17 2015-04-08 セイコーエプソン株式会社 光モジュールおよび電子機器
CN112953433B (zh) * 2021-04-21 2024-06-11 中国科学院半导体研究所 一种多梁耦合的微机电谐振器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5022745A (en) 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
US5909280A (en) 1992-01-22 1999-06-01 Maxam, Inc. Method of monolithically fabricating a microspectrometer with integrated detector
FI103216B (fi) * 1995-07-07 1999-05-14 Vaisala Oyj Menetelmä NDIR-mittalaitteen lyhyen Fabry-Perot interferometrin ohjaam iseksi
JP2002500446A (ja) * 1997-12-29 2002-01-08 コアテック・インコーポレーテッド マイクロエレクトロメカニカル的に同調可能な共焦型の垂直キャビティ表面放出レーザ及びファブリー・ペローフィルタ
US6438149B1 (en) * 1998-06-26 2002-08-20 Coretek, Inc. Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
US6836366B1 (en) * 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same
US6400738B1 (en) * 2000-04-14 2002-06-04 Agilent Technologies, Inc. Tunable Fabry-Perot filters and lasers

Also Published As

Publication number Publication date
JP2001358402A (ja) 2001-12-26
EP1146377A3 (de) 2003-10-22
EP1146377A2 (de) 2001-10-17
US6724785B1 (en) 2004-04-20
EP1146377B1 (de) 2006-02-01
DE60116912T2 (de) 2006-10-26

Similar Documents

Publication Publication Date Title
EP1146325A3 (de) Abstimmbare Fabry-Perot-Filter und Laser mit Rückkopplungskreis zur Reduzierung des Frequenzgeräusches
DE60128970D1 (de) Oberflächenemittierender Laser mit vertikalem Resonator und eingebauter Mikrolinse
DE69902963D1 (de) Abstimmbare Laserquelle mit breitbandiger und kontinuierlicher Variation der Oszillationswellenlänge
DE60222138D1 (de) Abstimmbarer laser
DE69808342D1 (de) Laser mit externem resonator
DE69530497D1 (de) Passiv stabilisierter laser mit frequenzverdopplung innerhalb des resonators
DE60026037D1 (de) Dielektrischer resonator und dielektrisches filter
AU2002239673A1 (en) Tunable semiconductor laser having a cavity with wavelength selective mirror and mach-tehnder interferometer
DE60116912D1 (de) Abstimmbare Fabry-Perot-Filter und Laser mit reduziertem Frequenzrauschen
BR0207439B1 (pt) filtro multicomponente e cigarro.
DE60143710D1 (de) Seitlich gepumpter aktiver spiegel-festkörperlaser
DE69809482D1 (de) Langwelliger, oberflächenemittierender Laser mit vertikalem Resonator und Herstellungsverfahren
DE60102099D1 (de) Dielektrisches Resonatorfilter
DE69519794D1 (de) Diodengepumpter multi-axialmoden-laser mit frequenzverdoppler innerhalb des resonators
DE69502279D1 (de) Miniaturisierter, selbst-gütegeschalteter frequenzverdoppelter laser
DE69632860D1 (de) Diodengepumpter multiaxialmodenlaser mit frequenzverdoppler innerhalb des resonators
DE69732254D1 (de) Abstimmbarer diodenlaser mit externem resonator
DE60000178D1 (de) Oberflächenemittierender Vielfachlaser mit vertikalem Resonator und Herstellungsverfahren
DE10190215T1 (de) Abstimmbarer Laser mit stabilisiertem Gitter
FR2821495B1 (fr) Laser accordable de facon rapide et large
DE60221334D1 (de) Optisches Filter, Lasermodul und Wellenlängenverriegelungsmodul
DE59805493D1 (de) Laserresonator
DE60038203D1 (de) Laserverstärker und Laseroszillator
DE60108944D1 (de) Kanalselektiver Verstärker mit abstimmbarem Filter
FI990462A0 (fi) Resonaattorisuodatin

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee