DE4026061C1 - - Google Patents
Info
- Publication number
- DE4026061C1 DE4026061C1 DE4026061A DE4026061A DE4026061C1 DE 4026061 C1 DE4026061 C1 DE 4026061C1 DE 4026061 A DE4026061 A DE 4026061A DE 4026061 A DE4026061 A DE 4026061A DE 4026061 C1 DE4026061 C1 DE 4026061C1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- platinum
- rhodium
- range
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 53
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 26
- 239000010948 rhodium Substances 0.000 claims abstract description 26
- 229910052703 rhodium Inorganic materials 0.000 claims abstract description 25
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000002360 preparation method Methods 0.000 claims abstract description 11
- 238000007650 screen-printing Methods 0.000 claims abstract description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 238000001035 drying Methods 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 239000012777 electrically insulating material Substances 0.000 claims description 3
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 claims description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 2
- 239000000395 magnesium oxide Substances 0.000 claims description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- YWFDDXXMOPZFFM-UHFFFAOYSA-H rhodium(3+);trisulfate Chemical compound [Rh+3].[Rh+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O YWFDDXXMOPZFFM-UHFFFAOYSA-H 0.000 claims description 2
- 239000002241 glass-ceramic Substances 0.000 claims 2
- 229960005363 aluminium oxide Drugs 0.000 claims 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 101100346656 Drosophila melanogaster strat gene Proteins 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- -1 Platinum Metals Chemical class 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- OLNTVTPDXPETLC-XPWALMASSA-N ezetimibe Chemical compound N1([C@@H]([C@H](C1=O)CC[C@H](O)C=1C=CC(F)=CC=1)C=1C=CC(O)=CC=1)C1=CC=C(F)C=C1 OLNTVTPDXPETLC-XPWALMASSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1
- 229910003452 thorium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
- H01C7/022—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient mainly consisting of non-metallic substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/232—Adjusting the temperature coefficient; Adjusting value of resistance by adjusting temperature coefficient of resistance
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
- Conductive Materials (AREA)
- Thermistors And Varistors (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4026061A DE4026061C1 (enrdf_load_stackoverflow) | 1990-08-17 | 1990-08-17 | |
| DE59103868T DE59103868D1 (de) | 1990-08-17 | 1991-02-19 | Verfahren zur Herstellung eines elektrischen Messwiderstandes. |
| EP91102300A EP0471138B1 (de) | 1990-08-17 | 1991-02-19 | Verfahren zur Herstellung eines elektrischen Messwiderstandes |
| AT91102300T ATE115761T1 (de) | 1990-08-17 | 1991-02-19 | Verfahren zur herstellung eines elektrischen messwiderstandes. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4026061A DE4026061C1 (enrdf_load_stackoverflow) | 1990-08-17 | 1990-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE4026061C1 true DE4026061C1 (enrdf_load_stackoverflow) | 1992-02-13 |
Family
ID=6412421
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE4026061A Expired - Lifetime DE4026061C1 (enrdf_load_stackoverflow) | 1990-08-17 | 1990-08-17 | |
| DE59103868T Expired - Fee Related DE59103868D1 (de) | 1990-08-17 | 1991-02-19 | Verfahren zur Herstellung eines elektrischen Messwiderstandes. |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE59103868T Expired - Fee Related DE59103868D1 (de) | 1990-08-17 | 1991-02-19 | Verfahren zur Herstellung eines elektrischen Messwiderstandes. |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0471138B1 (enrdf_load_stackoverflow) |
| AT (1) | ATE115761T1 (enrdf_load_stackoverflow) |
| DE (2) | DE4026061C1 (enrdf_load_stackoverflow) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4300084A1 (de) * | 1993-01-06 | 1994-07-07 | Heraeus Sensor Gmbh | Widerstandsthermometer mit einem Meßwiderstand |
| DE4330447A1 (de) * | 1993-09-09 | 1995-03-23 | Heraeus Sensor Gmbh | Temperatur-Sensor mit einer in einem Metallmantel angeordnetem mineralisolierten Zuleitung |
| DE4445243A1 (de) * | 1993-12-27 | 1995-06-29 | Ngk Insulators Ltd | Temperaturfühler |
| DE19540194C1 (de) * | 1995-10-30 | 1997-02-20 | Heraeus Sensor Gmbh | Widerstandsthermometer aus einem Metall der Platingruppe |
| EP0973020A1 (de) | 1998-07-16 | 2000-01-19 | Heraeus Electro-Nite International N.V. | Elektrischer Temperatur-Sensor mit Mehrfachschicht |
| DE19945641A1 (de) * | 1999-09-23 | 2001-04-05 | Abb Research Ltd | Strombegrenzendes Widerstandselement |
| DE102007023434A1 (de) * | 2007-05-16 | 2008-11-20 | Innovative Sensor Technology Ist Ag | Widerstandsthermometer |
| DE102007046900A1 (de) | 2007-09-28 | 2009-04-30 | Heraeus Sensor Technology Gmbh | 1200°C-Schichtwiderstand |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19542516C1 (de) * | 1995-11-15 | 1997-04-17 | Heraeus Sensor Gmbh | Temperatur-Sensor |
| AT405591B (de) | 1997-10-03 | 1999-09-27 | Schaffler & Co | Heizelement und verfahren zu dessen herstellung |
| SK284764B6 (sk) * | 1999-01-18 | 2005-11-03 | Slovenská Technická Univerzita, Materiálovotechnologická | Spôsob tepelného spracovania platinových drôtov na zabezpečenie stabilizácie elektrického odporu |
| CN100359306C (zh) * | 2004-04-19 | 2008-01-02 | 重庆大学 | 薄膜电路热流计传感器 |
| CN100359305C (zh) * | 2004-04-19 | 2008-01-02 | 重庆大学 | 平面绕线型热流计测头 |
| ATE430797T1 (de) | 2005-06-17 | 2009-05-15 | Merz Pharma Gmbh & Co Kgaa | Vorrichtung und verfahren zur fermentativen herstellung biologisch wirksamer verbindungen |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1180215B (de) * | 1962-05-18 | 1964-10-22 | Duerrwaechter E Dr Doduco | Loesung von Resinaten der Edelmetalle und/oder Unedelmetalle in Chlorkohlenwasserstoffen zur Erzeugung von auf Traegerwerkstoffen ein-gebrannten duennen Edelmetallschichten bzw. Unedelmetalloxydschichten fuer elektrotechnische Zwecke |
| DE1806756B2 (de) * | 1968-11-02 | 1975-08-07 | Telefunken Patentverwertungsgesellschaft Mbh, 7900 Ulm | Verfahren zur Herstellung von ohmschen Widerständen in Dickschichttechnik auf Moduln |
| US4050052A (en) * | 1975-06-21 | 1977-09-20 | W. C. Heraeus Gmbh | Electrical temperature measuring resistor structure, particularly for resistance thermometers |
| US4375056A (en) * | 1980-02-29 | 1983-02-22 | Leeds & Northrup Company | Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture |
| US4469717A (en) * | 1980-02-29 | 1984-09-04 | Leeds & Northrup Company | Thin film resistance thermometer with a predetermined temperature coefficient of resistance and its method of manufacture |
| DE3426804C2 (de) * | 1984-07-10 | 1987-01-22 | W.C. Heraeus Gmbh, 6450 Hanau | Substrat für gedruckte Schaltungen |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL83232C (enrdf_load_stackoverflow) * | 1950-06-20 | |||
| US4766411A (en) * | 1986-05-29 | 1988-08-23 | U.S. Philips Corporation | Use of compositionally modulated multilayer thin films as resistive material |
-
1990
- 1990-08-17 DE DE4026061A patent/DE4026061C1/de not_active Expired - Lifetime
-
1991
- 1991-02-19 EP EP91102300A patent/EP0471138B1/de not_active Expired - Lifetime
- 1991-02-19 AT AT91102300T patent/ATE115761T1/de not_active IP Right Cessation
- 1991-02-19 DE DE59103868T patent/DE59103868D1/de not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1180215B (de) * | 1962-05-18 | 1964-10-22 | Duerrwaechter E Dr Doduco | Loesung von Resinaten der Edelmetalle und/oder Unedelmetalle in Chlorkohlenwasserstoffen zur Erzeugung von auf Traegerwerkstoffen ein-gebrannten duennen Edelmetallschichten bzw. Unedelmetalloxydschichten fuer elektrotechnische Zwecke |
| DE1806756B2 (de) * | 1968-11-02 | 1975-08-07 | Telefunken Patentverwertungsgesellschaft Mbh, 7900 Ulm | Verfahren zur Herstellung von ohmschen Widerständen in Dickschichttechnik auf Moduln |
| US4050052A (en) * | 1975-06-21 | 1977-09-20 | W. C. Heraeus Gmbh | Electrical temperature measuring resistor structure, particularly for resistance thermometers |
| DE2527739C3 (de) * | 1975-06-21 | 1978-08-31 | W.C. Heraeus Gmbh, 6450 Hanau | Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer |
| US4375056A (en) * | 1980-02-29 | 1983-02-22 | Leeds & Northrup Company | Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture |
| US4469717A (en) * | 1980-02-29 | 1984-09-04 | Leeds & Northrup Company | Thin film resistance thermometer with a predetermined temperature coefficient of resistance and its method of manufacture |
| DE3426804C2 (de) * | 1984-07-10 | 1987-01-22 | W.C. Heraeus Gmbh, 6450 Hanau | Substrat für gedruckte Schaltungen |
Non-Patent Citations (2)
| Title |
|---|
| AT-Z: "E und M", Jg. 103, H. 1, 1986, S. 22-26 * |
| Zeitschrift "Platinum Metals Revicer", Vol. 5, 1961, S. 58-65 * |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4300084A1 (de) * | 1993-01-06 | 1994-07-07 | Heraeus Sensor Gmbh | Widerstandsthermometer mit einem Meßwiderstand |
| DE4330447A1 (de) * | 1993-09-09 | 1995-03-23 | Heraeus Sensor Gmbh | Temperatur-Sensor mit einer in einem Metallmantel angeordnetem mineralisolierten Zuleitung |
| DE4445243C2 (de) * | 1993-12-27 | 2002-03-21 | Ngk Insulators Ltd | Temperaturfühler |
| DE4445243A1 (de) * | 1993-12-27 | 1995-06-29 | Ngk Insulators Ltd | Temperaturfühler |
| US5823680A (en) * | 1993-12-27 | 1998-10-20 | Ngk Insulators, Ltd. | Temperature sensor |
| DE19540194C1 (de) * | 1995-10-30 | 1997-02-20 | Heraeus Sensor Gmbh | Widerstandsthermometer aus einem Metall der Platingruppe |
| EP0772031A1 (de) * | 1995-10-30 | 1997-05-07 | Heraeus Sensor GmbH | Widerstandsthermometer |
| US5831512A (en) * | 1995-10-30 | 1998-11-03 | Heraeus Sensor-Nite Gmbh | Resistance thermometer |
| EP0973020A1 (de) | 1998-07-16 | 2000-01-19 | Heraeus Electro-Nite International N.V. | Elektrischer Temperatur-Sensor mit Mehrfachschicht |
| DE19945641A1 (de) * | 1999-09-23 | 2001-04-05 | Abb Research Ltd | Strombegrenzendes Widerstandselement |
| DE102007023434A1 (de) * | 2007-05-16 | 2008-11-20 | Innovative Sensor Technology Ist Ag | Widerstandsthermometer |
| US8106740B2 (en) | 2007-05-16 | 2012-01-31 | Innovative Sensor Technology Ist Ag | Resistance thermometer |
| DE102007023434B4 (de) * | 2007-05-16 | 2017-07-06 | Innovative Sensor Technology Ist Ag | Widerstandsthermometer |
| DE102007046900A1 (de) | 2007-09-28 | 2009-04-30 | Heraeus Sensor Technology Gmbh | 1200°C-Schichtwiderstand |
| DE102007046900B4 (de) * | 2007-09-28 | 2011-07-21 | Heraeus Sensor Technology GmbH, 63450 | Hochtemperatursensor und ein Verfahren zu dessen Herstellung |
| US8183974B2 (en) | 2007-09-28 | 2012-05-22 | Heracus Sensor Technology GmbH | 1200° C. film resistor |
| DE102007046900C5 (de) | 2007-09-28 | 2018-07-26 | Heraeus Sensor Technology Gmbh | Hochtemperatursensor und ein Verfahren zu dessen Herstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| DE59103868D1 (de) | 1995-01-26 |
| ATE115761T1 (de) | 1994-12-15 |
| EP0471138A2 (de) | 1992-02-19 |
| EP0471138B1 (de) | 1994-12-14 |
| EP0471138A3 (en) | 1992-06-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8100 | Publication of patent without earlier publication of application | ||
| D1 | Grant (no unexamined application published) patent law 81 | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |