DE3920193A1 - Verfahren zur schichtdickenmessung von polymerschichten im nanometerbereich - Google Patents

Verfahren zur schichtdickenmessung von polymerschichten im nanometerbereich

Info

Publication number
DE3920193A1
DE3920193A1 DE19893920193 DE3920193A DE3920193A1 DE 3920193 A1 DE3920193 A1 DE 3920193A1 DE 19893920193 DE19893920193 DE 19893920193 DE 3920193 A DE3920193 A DE 3920193A DE 3920193 A1 DE3920193 A1 DE 3920193A1
Authority
DE
Germany
Prior art keywords
polymer
light beam
light
polymer layer
layer thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19893920193
Other languages
German (de)
English (en)
Other versions
DE3920193C2 (enExample
Inventor
Hans Dr Guesten
Guenther Dr Heinrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to DE19893920193 priority Critical patent/DE3920193A1/de
Publication of DE3920193A1 publication Critical patent/DE3920193A1/de
Application granted granted Critical
Publication of DE3920193C2 publication Critical patent/DE3920193C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0666—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using an exciting beam and a detection beam including surface acoustic waves [SAW]

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE19893920193 1989-06-21 1989-06-21 Verfahren zur schichtdickenmessung von polymerschichten im nanometerbereich Granted DE3920193A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19893920193 DE3920193A1 (de) 1989-06-21 1989-06-21 Verfahren zur schichtdickenmessung von polymerschichten im nanometerbereich

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19893920193 DE3920193A1 (de) 1989-06-21 1989-06-21 Verfahren zur schichtdickenmessung von polymerschichten im nanometerbereich

Publications (2)

Publication Number Publication Date
DE3920193A1 true DE3920193A1 (de) 1991-01-10
DE3920193C2 DE3920193C2 (enExample) 1991-05-02

Family

ID=6383168

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19893920193 Granted DE3920193A1 (de) 1989-06-21 1989-06-21 Verfahren zur schichtdickenmessung von polymerschichten im nanometerbereich

Country Status (1)

Country Link
DE (1) DE3920193A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2806479A1 (fr) * 2000-07-03 2001-09-21 Commissariat Energie Atomique Procede et dispositif de detection de couches minces
CN120928880A (zh) * 2025-10-11 2025-11-11 国网安徽省电力有限公司庐江县供电公司 一种开关柜的温控仪表的控制方法及系统

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10102623C2 (de) * 2001-01-20 2003-04-10 Geesthacht Gkss Forschung Verfahren und Vorrichtung zur Bestimmung des Molekulargewichts von Polymeren

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3510314A1 (de) * 1985-03-22 1986-09-25 Harald Michael Robert Dr. 6604 Fechingen Petry Verfahren und vorrichtung zur beruehrungslosen pruefung von materialien auf inhomogenitaeten

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3510314A1 (de) * 1985-03-22 1986-09-25 Harald Michael Robert Dr. 6604 Fechingen Petry Verfahren und vorrichtung zur beruehrungslosen pruefung von materialien auf inhomogenitaeten

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2806479A1 (fr) * 2000-07-03 2001-09-21 Commissariat Energie Atomique Procede et dispositif de detection de couches minces
CN120928880A (zh) * 2025-10-11 2025-11-11 国网安徽省电力有限公司庐江县供电公司 一种开关柜的温控仪表的控制方法及系统

Also Published As

Publication number Publication date
DE3920193C2 (enExample) 1991-05-02

Similar Documents

Publication Publication Date Title
DE3814662C1 (en) Method for the measurement of contact angle
EP0011708B1 (de) Verfahren und Vorrichtung zur Messung der Ebenheit, der Rauhigkeit oder des Krümmungsradius einer Messfläche
DE69116366T2 (de) Verfahren zur durchführung der messung der resonanz von oberflächenplasmonen und sensor zum gebrauch in diesem verfahren
DE69226228T2 (de) Optisches Rastertunnelmikroskop
US3604927A (en) Total reflection fluorescence spectroscopy
DE3532563C2 (enExample)
DE19914994A1 (de) Verfahren und Vorrichtung zur Oberflächenprüfung
DE3240234C2 (de) Oberflächenprofil-Interferometer
JPH0252205A (ja) 膜厚測定方法
DE4115704C2 (de) Verfahren zum Messen von Glanzprofilen
EP0618441A2 (de) Vorrichtung zur lateral aufgelösten Untersuchung einer lateral heterogenen ultradünnen Objektschicht
EP0270578A1 (de) Volumen-messverfahren für oberflächenvertiefungen
JPH01213552A (ja) 改良された反射光度計
DE3920193C2 (enExample)
DE4200088A1 (de) Verfahren und vorrichtung zum nachweis physikalisch-chemischer oder biochemischer wechselwirkungen
US3506827A (en) Method of masking fluorescence in fluorescent dye tracer inspection process materials
DE112021001987T5 (de) Bewertung von Strömungseigenschaften in physischen Medien
DE4220932C2 (de) Verfahren zur Herstellung eines Chemosensors
Itaya et al. Dynamic fluorescence microprobe method utilizing total internal reflection phenomenon
JPS601502A (ja) ホトレジスト膜測定装置
DE4104013A1 (de) Anordnung zum nachweis der lokalen erwaermung von festkoerperflaechen nach dem prinzip der photothermischen strahlablenkung
US3530295A (en) Tracer processes employing ultraviolet absorber materials
JPS6117940A (ja) 高濃度懸濁液中等の粒子の分散状態測定方法及び装置
KR20050047165A (ko) 레이저 빔을 이용한 접촉각 측정장치
DE68904771T2 (de) Optischer messapparat.

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee