DE3873373T2 - Schaltkreis zur erzeugung von referenzspannungen fuer halbleitervorrichtung. - Google Patents
Schaltkreis zur erzeugung von referenzspannungen fuer halbleitervorrichtung.Info
- Publication number
- DE3873373T2 DE3873373T2 DE8888102448T DE3873373T DE3873373T2 DE 3873373 T2 DE3873373 T2 DE 3873373T2 DE 8888102448 T DE8888102448 T DE 8888102448T DE 3873373 T DE3873373 T DE 3873373T DE 3873373 T2 DE3873373 T2 DE 3873373T2
- Authority
- DE
- Germany
- Prior art keywords
- cell
- dummy
- dummy cell
- memory
- contact holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 25
- 238000009792 diffusion process Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
- Dram (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62035807A JPS63204598A (ja) | 1987-02-20 | 1987-02-20 | 半導体記憶装置のレフアレンス電位発生回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3873373D1 DE3873373D1 (de) | 1992-09-10 |
DE3873373T2 true DE3873373T2 (de) | 1993-01-07 |
Family
ID=12452200
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888102448T Expired - Fee Related DE3873373T2 (de) | 1987-02-20 | 1988-02-19 | Schaltkreis zur erzeugung von referenzspannungen fuer halbleitervorrichtung. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0279453B1 (ko) |
JP (1) | JPS63204598A (ko) |
KR (1) | KR910000651B1 (ko) |
DE (1) | DE3873373T2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112310105B (zh) * | 2020-10-30 | 2022-05-13 | 长江存储科技有限责任公司 | 半导体器件的制作方法及半导体器件 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3938108A (en) * | 1975-02-03 | 1976-02-10 | Intel Corporation | Erasable programmable read-only memory |
US4342102A (en) * | 1980-06-18 | 1982-07-27 | Signetics Corporation | Semiconductor memory array |
JPS59168992A (ja) * | 1983-03-15 | 1984-09-22 | Sanyo Electric Co Ltd | 不揮発性メモリ及びそのアドレス方式 |
DE3472502D1 (en) * | 1983-09-16 | 1988-08-04 | Fujitsu Ltd | Plural-bit-per-cell read-only memory |
-
1987
- 1987-02-20 JP JP62035807A patent/JPS63204598A/ja active Pending
-
1988
- 1988-02-16 KR KR1019880001611A patent/KR910000651B1/ko not_active IP Right Cessation
- 1988-02-19 DE DE8888102448T patent/DE3873373T2/de not_active Expired - Fee Related
- 1988-02-19 EP EP88102448A patent/EP0279453B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR910000651B1 (ko) | 1991-01-31 |
EP0279453A1 (en) | 1988-08-24 |
JPS63204598A (ja) | 1988-08-24 |
DE3873373D1 (de) | 1992-09-10 |
EP0279453B1 (en) | 1992-08-05 |
KR880010419A (ko) | 1988-10-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |