DE3855305T3 - Schichten von Supraleiteroxyden mit hohem Tc und Verfahren zu deren Herstellung - Google Patents

Schichten von Supraleiteroxyden mit hohem Tc und Verfahren zu deren Herstellung Download PDF

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Publication number
DE3855305T3
DE3855305T3 DE3855305T DE3855305T DE3855305T3 DE 3855305 T3 DE3855305 T3 DE 3855305T3 DE 3855305 T DE3855305 T DE 3855305T DE 3855305 T DE3855305 T DE 3855305T DE 3855305 T3 DE3855305 T3 DE 3855305T3
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DE
Germany
Prior art keywords
layers
layer
substrate
superconductivity
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3855305T
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German (de)
English (en)
Other versions
DE3855305D1 (de
DE3855305T2 (de
Inventor
Praveen Nmn Briarcliff Manor Chaudhari
Richard Joseph Yorktown Heights Gambino
Roger Hilsen Koch
James Andrew Mahopac Lacey
Robert Benjamin Peekskill Laibowitz
Joseph Michael Viggiano
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International Business Machines Corp
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International Business Machines Corp
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Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21838570&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3855305(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE3855305D1 publication Critical patent/DE3855305D1/de
Publication of DE3855305T2 publication Critical patent/DE3855305T2/de
Application granted granted Critical
Publication of DE3855305T3 publication Critical patent/DE3855305T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0548—Processes for depositing or forming copper oxide superconductor layers by deposition and subsequent treatment, e.g. oxidation of pre-deposited material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials
    • H10N60/855—Ceramic superconductors
    • H10N60/857—Ceramic superconductors comprising copper oxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742—Annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
DE3855305T 1987-03-18 1988-03-04 Schichten von Supraleiteroxyden mit hohem Tc und Verfahren zu deren Herstellung Expired - Fee Related DE3855305T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US2758487A 1987-03-18 1987-03-18
US27584 1987-03-18

Publications (3)

Publication Number Publication Date
DE3855305D1 DE3855305D1 (de) 1996-06-27
DE3855305T2 DE3855305T2 (de) 1996-12-05
DE3855305T3 true DE3855305T3 (de) 2005-10-06

Family

ID=21838570

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3855305T Expired - Fee Related DE3855305T3 (de) 1987-03-18 1988-03-04 Schichten von Supraleiteroxyden mit hohem Tc und Verfahren zu deren Herstellung
DE3856357T Revoked DE3856357T2 (de) 1987-03-18 1988-03-04 Filme aus oxydischen Supraleitern mit hohem Tc

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE3856357T Revoked DE3856357T2 (de) 1987-03-18 1988-03-04 Filme aus oxydischen Supraleitern mit hohem Tc

Country Status (7)

Country Link
US (2) US5447906A (https=)
EP (2) EP0282839B2 (https=)
JP (1) JP2711253B2 (https=)
AT (2) ATE183021T1 (https=)
CA (1) CA1335954C (https=)
DE (2) DE3855305T3 (https=)
ES (1) ES2134370T3 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5204318A (en) * 1987-03-27 1993-04-20 Massachusetts Institute Of Technology Preparation of superconducting oxides and oxide-metal composites
JPH0753638B2 (ja) * 1987-03-30 1995-06-07 住友電気工業株式会社 超電導薄膜の形成方法
JPH0778000B2 (ja) * 1987-03-31 1995-08-23 住友電気工業株式会社 酸化物超電導薄膜の製造方法
JPS63244529A (ja) * 1987-03-30 1988-10-12 Sumitomo Electric Ind Ltd 超電導薄膜の形成方法
CA1332324C (en) * 1987-03-30 1994-10-11 Jun Shioya Method for producing thin film of oxide superconductor
JP2702711B2 (ja) * 1987-04-13 1998-01-26 松下電器産業株式会社 薄膜超電導体の製造方法
FR2625614A1 (fr) * 1987-05-22 1989-07-07 Massachusetts Inst Technology Pellicules minces d'oxydes supraconducteurs
DE3886586T2 (de) * 1987-05-26 1994-04-28 Sumitomo Electric Industries Verfahren zur Herstellung einer dünnen Schicht aus supraleitendem Mischoxid.
DE3815185A1 (de) * 1987-08-05 1989-02-16 Siemens Ag Verfahren zur herstellung einer hybridstruktur mit halbleitendem und supraleitendem material
KR910007382B1 (ko) * 1987-08-07 1991-09-25 가부시기가이샤 히다찌세이사꾸쇼 초전도 재료 및 초전도 박막의 제조방법
US4914080A (en) * 1988-01-27 1990-04-03 Fujitsu Limited Method for fabricating superconductive film
US8309118B2 (en) * 2001-09-28 2012-11-13 Mcneil-Ppc, Inc. Film forming compositions containing sucralose
EP1422313A1 (de) 2002-11-05 2004-05-26 Theva Dünnschichttechnik GmbH Vorrichtung und Verfahren zum Aufdampfen eines Beschichtungsmaterials im Vakuum mit kontinuierlicher Materialnachführung
US20050159298A1 (en) * 2004-01-16 2005-07-21 American Superconductor Corporation Oxide films with nanodot flux pinning centers
EP1843988B1 (en) * 2004-12-23 2013-02-13 Superconductor Technologies, Inc. Rf-properties-optimized compositions of (re)ba2cu3o7-d thin film superconductors
US8954125B2 (en) 2011-07-28 2015-02-10 International Business Machines Corporation Low-loss superconducting devices
WO2017136925A1 (en) * 2016-02-08 2017-08-17 Thunder Bay Regional Health Research Institute Amorphous lead oxide based energy detection devices and methods of manufacture thereof
WO2017176952A1 (en) 2016-04-08 2017-10-12 Schlumberger Technology Corporation Polymer gel for water control applications
US11788183B2 (en) 2020-05-20 2023-10-17 Hrl Laboratories, Llc Method for growing crystalline optical films on Si substrates which may optionally have an extremely small optical loss in the infra-red spectrum with hydrogenation of the crystalline optical films

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4316785A (en) * 1979-11-05 1982-02-23 Nippon Telegraph & Telephone Public Corporation Oxide superconductor Josephson junction and fabrication method therefor
JPS60173885A (ja) * 1984-02-18 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 酸化物超伝導材料およびその製造方法
JPS6161556A (ja) * 1984-08-31 1986-03-29 Norinosuke Kojima ダイアル式電話機利用の自動通報装置
JPS6161555A (ja) * 1984-08-31 1986-03-29 Norinosuke Kojima ダイアル式電話機利用の自動通報方法
US6638894B1 (en) * 1987-01-09 2003-10-28 Lucent Technologies Inc. Devices and systems based on novel superconducting material
US5151406A (en) * 1987-02-26 1992-09-29 Sumitomo Electric Industries, Ltd. Laminated superconductor
JP2567386B2 (ja) * 1987-02-26 1996-12-25 住友電気工業株式会社 超電導導体
JP2645489B2 (ja) * 1987-03-12 1997-08-25 株式会社 半導体エネルギー研究所 超電導体の作製方法
EP0282360B1 (en) * 1987-03-12 1995-11-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing components of superconducting ceramic oxide materials
JPS63241823A (ja) * 1987-03-27 1988-10-07 Nissin Electric Co Ltd 超電導薄膜の製造方法
CA1332324C (en) * 1987-03-30 1994-10-11 Jun Shioya Method for producing thin film of oxide superconductor

Also Published As

Publication number Publication date
JP2711253B2 (ja) 1998-02-10
DE3855305D1 (de) 1996-06-27
DE3856357T2 (de) 2000-02-24
ATE183021T1 (de) 1999-08-15
EP0282839B1 (en) 1996-05-22
DE3855305T2 (de) 1996-12-05
ATE138501T1 (de) 1996-06-15
DE3856357D1 (de) 1999-09-09
ES2134370T3 (es) 1999-10-01
EP0282839B2 (en) 2005-03-09
EP0282839A2 (en) 1988-09-21
EP0662724B1 (en) 1999-08-04
US5447906A (en) 1995-09-05
EP0662724A2 (en) 1995-07-12
JPS63237313A (ja) 1988-10-03
EP0662724A3 (https=) 1995-08-09
EP0282839A3 (en) 1990-07-25
CA1335954C (en) 1995-06-20
US5863869A (en) 1999-01-26

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8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee