DE3831399C2 - - Google Patents
Info
- Publication number
- DE3831399C2 DE3831399C2 DE19883831399 DE3831399A DE3831399C2 DE 3831399 C2 DE3831399 C2 DE 3831399C2 DE 19883831399 DE19883831399 DE 19883831399 DE 3831399 A DE3831399 A DE 3831399A DE 3831399 C2 DE3831399 C2 DE 3831399C2
- Authority
- DE
- Germany
- Prior art keywords
- reversing
- chamber
- pressure
- pressure source
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 claims description 26
- 239000003792 electrolyte Substances 0.000 claims description 25
- 239000000523 sample Substances 0.000 claims description 21
- 238000000576 coating method Methods 0.000 claims description 20
- 238000003869 coulometry Methods 0.000 claims description 8
- 238000013459 approach Methods 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 9
- 239000010931 gold Substances 0.000 description 9
- 229910052737 gold Inorganic materials 0.000 description 9
- 239000010970 precious metal Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910001020 Au alloy Inorganic materials 0.000 description 3
- 239000003353 gold alloy Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910002067 modern alloy Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/42—Measuring deposition or liberation of materials from an electrolyte; Coulometry, i.e. measuring coulomb-equivalent of material in an electrolyte
- G01N27/423—Coulometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
Landscapes
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Molecular Biology (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS88544A CS269125B1 (en) | 1988-01-29 | 1988-01-29 | Microscanner for coatings' thickness coulombmetering measuring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3831399A1 DE3831399A1 (de) | 1989-08-10 |
| DE3831399C2 true DE3831399C2 (cs) | 1991-09-19 |
Family
ID=5337694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19883831399 Granted DE3831399A1 (de) | 1988-01-29 | 1988-09-15 | Mikrosonde zur coulometrischen messung der dicke metallischer ueberzuege |
Country Status (2)
| Country | Link |
|---|---|
| CS (1) | CS269125B1 (cs) |
| DE (1) | DE3831399A1 (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3923160C2 (de) * | 1989-07-13 | 1996-07-11 | Helmut Fischer Gmbh & Co | Vorrichtung zur coulometrischen Messung der Dicke metallischer Überzüge |
| DE4338211C2 (de) * | 1993-11-10 | 1997-09-25 | Helmut Fischer Gmbh & Co | Vorrichtung und Verfahren zur coulometrischen Messung der Dicke metallischer Überzüge |
| US5749408A (en) * | 1996-07-31 | 1998-05-12 | Incre, L.L.C. | Method for freeform fabrication by molten metal deposition |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2658357C2 (de) * | 1976-12-23 | 1983-11-24 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Dickenmessvorrichtung für Zinnschichten |
| DE3046198C2 (de) * | 1980-12-08 | 1986-10-30 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Dickenmessvorrichtung für Zinnschichten |
| GB2090663B (en) * | 1980-12-29 | 1984-09-05 | Vyzk Ustav Ochrany Mat | Method and apparatus for coulometric measurement of metall |
| DD216803A1 (de) * | 1983-05-30 | 1984-12-19 | Univ Berlin Humboldt | Vorrichtung zur coulometrischen dickenbestimmung von metallschichten |
-
1988
- 1988-01-29 CS CS88544A patent/CS269125B1/cs unknown
- 1988-09-15 DE DE19883831399 patent/DE3831399A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3831399A1 (de) | 1989-08-10 |
| CS269125B1 (en) | 1990-04-11 |
| CS54488A1 (en) | 1989-09-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |