DE3667895D1 - Einrichtung zur erzeugung eines im wesentlichen homogenen plasmas. - Google Patents

Einrichtung zur erzeugung eines im wesentlichen homogenen plasmas.

Info

Publication number
DE3667895D1
DE3667895D1 DE8686100107T DE3667895T DE3667895D1 DE 3667895 D1 DE3667895 D1 DE 3667895D1 DE 8686100107 T DE8686100107 T DE 8686100107T DE 3667895 T DE3667895 T DE 3667895T DE 3667895 D1 DE3667895 D1 DE 3667895D1
Authority
DE
Germany
Prior art keywords
generating
substantially homogeneous
homogeneous plasma
plasma
homogeneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686100107T
Other languages
German (de)
English (en)
Inventor
Suryadevara Vijayakumar Babu
Ronald Stephen Horwath
Neng-Hsing Lu
John Andrew Welsh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3667895D1 publication Critical patent/DE3667895D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/09—Treatments involving charged particles
    • H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • ing And Chemical Polishing (AREA)
DE8686100107T 1985-01-17 1986-01-07 Einrichtung zur erzeugung eines im wesentlichen homogenen plasmas. Expired - Lifetime DE3667895D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/692,145 US4618477A (en) 1985-01-17 1985-01-17 Uniform plasma for drill smear removal reactor

Publications (1)

Publication Number Publication Date
DE3667895D1 true DE3667895D1 (de) 1990-02-01

Family

ID=24779435

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686100107T Expired - Lifetime DE3667895D1 (de) 1985-01-17 1986-01-07 Einrichtung zur erzeugung eines im wesentlichen homogenen plasmas.

Country Status (4)

Country Link
US (1) US4618477A (enExample)
EP (1) EP0188206B1 (enExample)
JP (1) JPS61164224A (enExample)
DE (1) DE3667895D1 (enExample)

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Publication number Priority date Publication date Assignee Title
JPS61202438A (ja) * 1985-03-06 1986-09-08 Ulvac Corp グロ−放電安定化方法
JPS61272928A (ja) * 1985-05-29 1986-12-03 Ulvac Corp ドライエツチング方法
US4828668A (en) * 1986-03-10 1989-05-09 Semiconductor Energy Laboratory Co., Ltd. Sputtering system for deposition on parallel substrates
DE3629000C1 (de) * 1986-08-27 1987-10-29 Nukem Gmbh Verfahren und Vorrichtung zum Ausbilden einer Schicht durch plasmachemischen Prozess
US4885074A (en) * 1987-02-24 1989-12-05 International Business Machines Corporation Plasma reactor having segmented electrodes
KR930003136B1 (ko) * 1987-10-14 1993-04-22 후루가와덴기 고오교오 가부시기가이샤 프라즈마 cvd에 의한 박막 형성장치
KR920003431B1 (ko) * 1988-02-05 1992-05-01 가부시끼가이샤 한도다이 에네르기 겐뀨쇼 플라즈마 처리 방법 및 장치
JPH01239917A (ja) * 1988-03-22 1989-09-25 Semiconductor Energy Lab Co Ltd プラズマ処理方法
JPH01243429A (ja) * 1988-03-24 1989-09-28 Semiconductor Energy Lab Co Ltd プラズマ処理方法
US4950377A (en) * 1988-09-23 1990-08-21 Siemens Aktiengesellschaft Apparatus and method for reactive ion etching
FR2647293B1 (fr) * 1989-05-18 1996-06-28 Defitech Sa Reacteur a plasma perfectionne muni de moyens de couplage d'ondes electromagnetiques
DE3933619C2 (de) * 1989-10-07 1993-12-23 Fraunhofer Ges Forschung Vorrichtungen zur elektrischen Anregung eines Gases mit Mikrowellenenergie
DE69032952T2 (de) * 1989-11-15 1999-09-30 Haruhisa Kinoshita Trocken-Behandlungsvorrichtung
JP2948842B2 (ja) * 1989-11-24 1999-09-13 日本真空技術株式会社 インライン型ｃｖｄ装置
US5020476A (en) * 1990-04-17 1991-06-04 Ds Research, Inc. Distributed source assembly
US5225375A (en) * 1991-05-20 1993-07-06 Process Technology (1988) Limited Plasma enhanced chemical vapor processing of semiconductor substrates
FR2731370B1 (fr) * 1995-03-07 1997-06-06 Cie Generale D Optique Essilor Procede pour le depot assiste par plasma d'au moins une couche mince sur un substrat a deux faces, et reacteur correspondant
WO1997044461A2 (en) * 1996-05-22 1997-11-27 Novopharm Biotech, Inc. Antigen binding fragments that specifically detect cancer cells, nucleotides encoding the fragments, and use thereof for the prophylaxis and detection of cancers
JP3196657B2 (ja) * 1996-09-18 2001-08-06 松下電器産業株式会社 表面処理装置及び表面処理方法
JPH10214822A (ja) * 1997-01-30 1998-08-11 Nec Corp プラズマエッチング装置およびエッチング方法
US7115722B1 (en) 1997-05-22 2006-10-03 Viventia Biotech, Inc. Antigen binding fragments that specifically detect cancer cells, nucleotides encoding the fragments, and use thereof for the prophylaxis and detection of cancers
US20020122807A1 (en) * 1998-07-07 2002-09-05 Dan Michael D. Antigen binding fragments, designated 4B5, that specifically detect cancer cells, nucleotides encoding the fragments, and use thereof for the prophylaxis and detection of cancers
JP4659238B2 (ja) * 2001-03-06 2011-03-30 株式会社カネカ 半導体層の製膜方法
US20030048591A1 (en) * 2001-09-10 2003-03-13 Saturn Vac Co., Ltd. Desmearing process/apparatus for pulse-type D.C. plasma
JP4584722B2 (ja) * 2005-01-13 2010-11-24 シャープ株式会社 プラズマ処理装置および同装置により製造された半導体素子
US20090169341A1 (en) * 2008-01-01 2009-07-02 Dongguan Anwell Digital Machinery Ltd. Method and system for handling objects in chambers
US20110209746A1 (en) * 2009-09-06 2011-09-01 Hanzhong Zhang Tubular Photovoltaic Device and Method of Making
JP6452199B2 (ja) * 2015-07-16 2019-01-16 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1122558A (en) * 1966-03-22 1968-08-07 Allis Chalmers Mfg Co Process for producing cf and ccif
US3461054A (en) * 1966-03-24 1969-08-12 Bell Telephone Labor Inc Cathodic sputtering from a cathodically biased target electrode having an rf potential superimposed on the cathodic bias
US3600126A (en) * 1968-02-05 1971-08-17 Emil J Hellund Asepsis process and apparatus
US3702258A (en) * 1969-03-05 1972-11-07 Eastman Kodak Co Web treatment method
US3860507A (en) * 1972-11-29 1975-01-14 Rca Corp Rf sputtering apparatus and method
US4013532A (en) * 1975-03-03 1977-03-22 Airco, Inc. Method for coating a substrate
US4233109A (en) * 1976-01-16 1980-11-11 Zaidan Hojin Handotai Kenkyu Shinkokai Dry etching method
JPS5846057B2 (ja) * 1979-03-19 1983-10-14 富士通株式会社 プラズマ処理方法
US4285800A (en) * 1979-04-18 1981-08-25 Branson International Plasma Corp. Gas plasma reactor for circuit boards and the like
US4264813A (en) * 1979-06-29 1981-04-28 International Business Machines Corportion High intensity ion source using ionic conductors
US4289598A (en) * 1980-05-03 1981-09-15 Technics, Inc. Plasma reactor and method therefor
US4474659A (en) * 1982-05-28 1984-10-02 Fazal Fazlin Plated-through-hole method

Also Published As

Publication number Publication date
JPS61164224A (ja) 1986-07-24
US4618477A (en) 1986-10-21
EP0188206A3 (en) 1987-10-07
EP0188206A2 (en) 1986-07-23
JPH0365892B2 (enExample) 1991-10-15
EP0188206B1 (en) 1989-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee