DE3669951D1 - Einrichtung zur erzeugung einer homogenen gasstroemung in einer plasma-kammer. - Google Patents

Einrichtung zur erzeugung einer homogenen gasstroemung in einer plasma-kammer.

Info

Publication number
DE3669951D1
DE3669951D1 DE8686100108T DE3669951T DE3669951D1 DE 3669951 D1 DE3669951 D1 DE 3669951D1 DE 8686100108 T DE8686100108 T DE 8686100108T DE 3669951 T DE3669951 T DE 3669951T DE 3669951 D1 DE3669951 D1 DE 3669951D1
Authority
DE
Germany
Prior art keywords
generating
gas flow
plasma chamber
homogenous gas
homogenous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686100108T
Other languages
English (en)
Inventor
John Choung-Lin Lo
Neng-Hsing Lu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3669951D1 publication Critical patent/DE3669951D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/09—Treatments involving charged particles
    • H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • ing And Chemical Polishing (AREA)
DE8686100108T 1985-01-17 1986-01-07 Einrichtung zur erzeugung einer homogenen gasstroemung in einer plasma-kammer. Expired - Fee Related DE3669951D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/692,143 US4601807A (en) 1985-01-17 1985-01-17 Reactor for plasma desmear of high aspect ratio hole

Publications (1)

Publication Number Publication Date
DE3669951D1 true DE3669951D1 (de) 1990-05-03

Family

ID=24779427

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686100108T Expired - Fee Related DE3669951D1 (de) 1985-01-17 1986-01-07 Einrichtung zur erzeugung einer homogenen gasstroemung in einer plasma-kammer.

Country Status (4)

Country Link
US (1) US4601807A (de)
EP (1) EP0188207B1 (de)
JP (1) JPS61168923A (de)
DE (1) DE3669951D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061359A (en) * 1985-01-17 1991-10-29 International Business Machines Corporation Plasma processing apparatus including three bus structures
US4828668A (en) * 1986-03-10 1989-05-09 Semiconductor Energy Laboratory Co., Ltd. Sputtering system for deposition on parallel substrates
US4810322A (en) * 1986-11-03 1989-03-07 International Business Machines Corporation Anode plate for a parallel-plate reactive ion etching reactor
JPH01243429A (ja) * 1988-03-24 1989-09-28 Semiconductor Energy Lab Co Ltd プラズマ処理方法
JPH07110991B2 (ja) * 1989-10-02 1995-11-29 株式会社日立製作所 プラズマ処理装置およびプラズマ処理方法
EP0428161B1 (de) * 1989-11-15 1999-02-17 Kokusai Electric Co., Ltd. Trocken-Behandlungsvorrichtung
JPH0449523A (ja) * 1990-06-18 1992-02-18 Denki Kagaku Kogyo Kk 磁気記録媒体の製造法及びその装置
DE4117332C2 (de) * 1991-05-31 1995-11-23 Ivanovskij Ni Skij Eksperiment Verfahren zur Behandlung von laufendem Substrat mit Hilfe eines elektrischen Entladungsplasmas und Vorrichtung zu dessen Durchführung
US20030048591A1 (en) * 2001-09-10 2003-03-13 Saturn Vac Co., Ltd. Desmearing process/apparatus for pulse-type D.C. plasma
JP2005150632A (ja) * 2003-11-19 2005-06-09 Tokyo Electron Ltd 還元装置および還元方法
EP2274764A1 (de) * 2008-05-02 2011-01-19 Oerlikon Trading AG, Trübbach Vorrichtung zur plasmaverarbeitung und verfahren zur plasmaverarbeitung von substraten
JP4558067B2 (ja) * 2008-05-21 2010-10-06 シャープ株式会社 プラズマ処理装置
JP5257936B2 (ja) * 2009-01-22 2013-08-07 シャープ株式会社 プラズマ処理装置およびこれを用いた半導体素子の製造方法
US8278139B2 (en) * 2009-09-25 2012-10-02 Applied Materials, Inc. Passivating glue layer to improve amorphous carbon to metal adhesion

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545386A (en) * 1977-06-15 1979-01-16 Hitachi Ltd Surface processor for wafer
US4264393A (en) * 1977-10-31 1981-04-28 Motorola, Inc. Reactor apparatus for plasma etching or deposition
US4297162A (en) * 1979-10-17 1981-10-27 Texas Instruments Incorporated Plasma etching using improved electrode
US4282077A (en) * 1980-07-03 1981-08-04 General Dynamics, Pomona Division Uniform plasma etching system
US4425210A (en) * 1980-11-04 1984-01-10 Fazlin Fazal A Plasma desmearing apparatus and method
JPS5970766A (ja) * 1982-10-18 1984-04-21 Ulvac Corp プラズマｃｖｄ装置

Also Published As

Publication number Publication date
EP0188207B1 (de) 1990-03-28
EP0188207A3 (en) 1987-09-30
JPH0439223B2 (de) 1992-06-26
EP0188207A2 (de) 1986-07-23
US4601807A (en) 1986-07-22
JPS61168923A (ja) 1986-07-30

Similar Documents

Publication Publication Date Title
DE3667895D1 (de) Einrichtung zur erzeugung eines im wesentlichen homogenen plasmas.
DE3762563D1 (de) Vorrichtung zur erzeugung von ionen in gasstroemen.
DE59009056D1 (de) Vorrichtung zur Erzeugung von Röntgenstrahlung mit einer Plasmaquelle.
DE3669951D1 (de) Einrichtung zur erzeugung einer homogenen gasstroemung in einer plasma-kammer.
MX158273A (es) Mejoras en un aparato electrico generador de plasma mediante calentamiento de gases
DE68918941D1 (de) Gaszufuhr-mittel.
FR2580779B1 (fr) Appareil de ravitaillement en carburant gazeux
DE3650407D1 (de) Anordnung zur Stabilisierung einer Gas-Bezugselektrode.
DE3881999D1 (de) Gaserzeugende vorrichtung.
ATA408482A (de) Vorrichtung zur erzeugung eines mit dampf angereicherten gasstromes
DE3678859D1 (de) Vorrichtung zur erzeugung weicher roentgenstrahlen.
DK29186D0 (da) Apparat til indfoering af behandlingsgas i et behandlingskammer
DE3670750D1 (de) Vorrichtung zum anregen eines plasmas in einer gassaeule durch mikrowellen zur realisierung eines ionenlasers.
DE68910883D1 (de) Vorrichtung zur Erzeugung optischer Oberwellen.
DE68919101D1 (de) Gasabschaltungsvorrichtung.
DK490088A (da) Indretning til berigelse af sporstoffer i gasser
DE3685101D1 (de) Gleichrichterschaltung zur erzeugung eines eingeschraenkten ausgangsspannungsbereiches.
DE69323341D1 (de) Schaltung zur Erzeugung eines ausgeglichenen Puls-Pausenverhältnisses
AT382388B (de) Vorrichtung zur vergasung von brennstoffen
DE3672819D1 (de) Vorrichtung und verfahren zum beschichten in einer vakuumkammer durch lichtbogendampfniederschlag.
DE3684093D1 (de) Geraet zur aetzung unter mitwirkung eines plasmas.
DK81286A (da) Undersats til kogegrej
ATA243186A (de) Kammerofen mit gasumwaelzung
DE68914513D1 (de) Gerät zur Modifikation einer Plasmazusammensetzung und Remodellierung.
DK628889A (da) Apparat til rensning af gasser

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee