DE3624217C2 - - Google Patents
Info
- Publication number
- DE3624217C2 DE3624217C2 DE3624217A DE3624217A DE3624217C2 DE 3624217 C2 DE3624217 C2 DE 3624217C2 DE 3624217 A DE3624217 A DE 3624217A DE 3624217 A DE3624217 A DE 3624217A DE 3624217 C2 DE3624217 C2 DE 3624217C2
- Authority
- DE
- Germany
- Prior art keywords
- metal oxide
- titanium dioxide
- gas sensor
- layer
- oxide layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 76
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 44
- 229910044991 metal oxide Inorganic materials 0.000 claims description 39
- 150000004706 metal oxides Chemical class 0.000 claims description 39
- 239000004408 titanium dioxide Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 26
- 229910052697 platinum Inorganic materials 0.000 claims description 16
- 229910000510 noble metal Inorganic materials 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 9
- 229910052703 rhodium Inorganic materials 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 78
- 239000007789 gas Substances 0.000 description 57
- 239000000843 powder Substances 0.000 description 21
- 239000000446 fuel Substances 0.000 description 15
- 239000001301 oxygen Substances 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 15
- 229910010413 TiO 2 Inorganic materials 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 230000004044 response Effects 0.000 description 13
- 238000002485 combustion reaction Methods 0.000 description 9
- 239000010948 rhodium Substances 0.000 description 9
- 238000012360 testing method Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 239000007784 solid electrolyte Substances 0.000 description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- 108010083687 Ion Pumps Proteins 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(iii) oxide Chemical compound O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- -1 oxygen ions Chemical class 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910000314 transition metal oxide Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000000543 intermediate Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60155889A JPH0692950B2 (ja) | 1985-07-17 | 1985-07-17 | ガス成分検出素子 |
| JP60184078A JPH0692951B2 (ja) | 1985-08-23 | 1985-08-23 | ガス成分検出素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3624217A1 DE3624217A1 (de) | 1987-01-29 |
| DE3624217C2 true DE3624217C2 (en, 2012) | 1988-12-29 |
Family
ID=26483787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19863624217 Granted DE3624217A1 (de) | 1985-07-17 | 1986-07-17 | Gassensorelement |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4786476A (en, 2012) |
| DE (1) | DE3624217A1 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3723051A1 (de) * | 1987-07-11 | 1989-01-19 | Kernforschungsz Karlsruhe | Halbleiter fuer einen resistiven gassensor mit hoher ansprechgeschwindigkeit |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3817052A1 (de) * | 1988-05-19 | 1989-11-30 | Draegerwerk Ag | Verfahren zur ueberwachung von patientendaten und schaltungsanordnung hierzu |
| GB9306594D0 (en) * | 1993-03-30 | 1993-05-26 | Univ Keele | Sensor |
| DE4333898C2 (de) * | 1993-10-05 | 1996-02-22 | Bosch Gmbh Robert | Meßfühler zur Erfassung von Gaszusammensetzungen |
| DE4334672C2 (de) * | 1993-10-12 | 1996-01-11 | Bosch Gmbh Robert | Sensor zum Nachweis von Stickoxid |
| US5827415A (en) * | 1994-09-26 | 1998-10-27 | The Board Of Trustees Of Leland Stanford Jun. Univ. | Oxygen sensor |
| DE4445359A1 (de) * | 1994-12-20 | 1996-06-27 | Bosch Gmbh Robert | Sensor zum Nachweis von brennbaren Gasen |
| US5948361A (en) * | 1996-08-27 | 1999-09-07 | Motorola, Inc. | Chemical sensor and method of making same |
| US6719950B2 (en) | 2001-11-14 | 2004-04-13 | Robert Bosch Corporation | Miniaturized exhaust gas sensor |
| US6812708B2 (en) * | 2002-06-04 | 2004-11-02 | Scott Technologies, Inc. | Combustible-gas measuring instrument |
| DE10319664A1 (de) * | 2003-05-02 | 2004-11-18 | Robert Bosch Gmbh | Sensor zur Detektion von Teilchen |
| DE102012108997A1 (de) * | 2012-09-24 | 2014-03-27 | Heinrich-Heine-Universität Düsseldorf | Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung |
| US10670554B2 (en) * | 2015-07-13 | 2020-06-02 | International Business Machines Corporation | Reconfigurable gas sensor architecture with a high sensitivity at low temperatures |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3576730A (en) * | 1968-04-19 | 1971-04-27 | Gen Electric | Nickel/nickel oxide reference electrodes for oxygen partial preddure measurements |
| US3751968A (en) * | 1971-01-22 | 1973-08-14 | Inficon Inc | Solid state sensor |
| SE387444B (sv) * | 1974-09-09 | 1976-09-06 | C M Svensson | Detektor for pavisande av vete |
| US4045178A (en) * | 1975-11-08 | 1977-08-30 | Matsushita Electric Industrial Co., Ltd. | Reducing gas sensor |
| JPS5439197A (en) * | 1977-09-02 | 1979-03-26 | Shibaura Denshi Seisakushiyo K | Method of making gas detector |
| EP0055104B1 (en) * | 1980-12-19 | 1986-04-16 | Matsushita Electric Industrial Co., Ltd. | Sensor element and method for fabricating same |
| JPS58148946A (ja) * | 1982-02-27 | 1983-09-05 | Nissan Motor Co Ltd | 空燃比検出器 |
| US4387165A (en) * | 1982-04-22 | 1983-06-07 | Youngblood James L | H2 S Detector having semiconductor and noncontinuous inert film deposited thereon |
| JPH05311226A (ja) * | 1992-05-07 | 1993-11-22 | Nippon Steel Corp | 溶融金属の減圧・真空脱ガス精錬方法 |
-
1986
- 1986-07-16 US US06/886,080 patent/US4786476A/en not_active Expired - Fee Related
- 1986-07-17 DE DE19863624217 patent/DE3624217A1/de active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3723051A1 (de) * | 1987-07-11 | 1989-01-19 | Kernforschungsz Karlsruhe | Halbleiter fuer einen resistiven gassensor mit hoher ansprechgeschwindigkeit |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3624217A1 (de) | 1987-01-29 |
| US4786476A (en) | 1988-11-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |