DE3518409C2 - - Google Patents

Info

Publication number
DE3518409C2
DE3518409C2 DE3518409A DE3518409A DE3518409C2 DE 3518409 C2 DE3518409 C2 DE 3518409C2 DE 3518409 A DE3518409 A DE 3518409A DE 3518409 A DE3518409 A DE 3518409A DE 3518409 C2 DE3518409 C2 DE 3518409C2
Authority
DE
Germany
Prior art keywords
temperature
measuring
semiconductor
flow
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3518409A
Other languages
German (de)
English (en)
Other versions
DE3518409A1 (de
Inventor
Masayuki Yokohama Jp Sekimura
Shunji Ayase Kanagawa Jp Shirouzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59103028A external-priority patent/JPS60247169A/ja
Priority claimed from JP59103030A external-priority patent/JPS60247171A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE3518409A1 publication Critical patent/DE3518409A1/de
Application granted granted Critical
Publication of DE3518409C2 publication Critical patent/DE3518409C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE19853518409 1984-05-22 1985-05-22 Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels Granted DE3518409A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59103028A JPS60247169A (ja) 1984-05-22 1984-05-22 半導体流速検出器
JP59103030A JPS60247171A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Publications (2)

Publication Number Publication Date
DE3518409A1 DE3518409A1 (de) 1985-11-28
DE3518409C2 true DE3518409C2 (enExample) 1988-05-19

Family

ID=26443694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19853518409 Granted DE3518409A1 (de) 1984-05-22 1985-05-22 Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels

Country Status (2)

Country Link
US (1) US4637253A (enExample)
DE (1) DE3518409A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004039405A1 (de) * 2004-08-13 2006-03-09 Siemens Ag Sensorvorrichtung, Verfahren, Vorrichtung und Sensorsystem zum Ermitteln einer Seite eines Fahrzeugs, an der ein Rad mit einer Sensorvorrichtung angeordnet ist

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AU576321B2 (en) * 1983-06-17 1988-08-25 Institut De Recherche Et De Developpement Aerologique Marketing S.A. Measuring wind speed
JPH0810231B2 (ja) * 1987-03-31 1996-01-31 シャープ株式会社 フローセンサ
NL8702229A (nl) * 1987-09-18 1989-04-17 Bronkhorst High Tech Bv Richtingsgevoelige stroomsnelheidsmeter.
JPH0663799B2 (ja) * 1987-10-05 1994-08-22 株式会社村田製作所 熱型流量検出装置
US4884443A (en) * 1987-12-23 1989-12-05 Siemens-Bendix Automotive Electronics L. P. Control and detection circuitry for mass airflow sensors
US4918995A (en) * 1988-01-04 1990-04-24 Gas Research Institute Electronic gas meter
DE3925644A1 (de) * 1989-08-03 1991-02-07 Pierburg Gmbh Messeinrichtung zum bestimmen des luftmassenstroms
DE4012081A1 (de) * 1990-04-14 1991-10-17 Bosch Gmbh Robert Verfahren und anordnung zum messen von luftmengen
WO1991019170A1 (en) * 1990-06-04 1991-12-12 Mcpherson's Limited Flow sensor and control system
US5237867A (en) * 1990-06-29 1993-08-24 Siemens Automotive L.P. Thin-film air flow sensor using temperature-biasing resistive element
EP0522496B1 (en) * 1991-07-08 2002-03-06 Denso Corporation Thermal type flowmeter
US5217019A (en) * 1991-12-27 1993-06-08 Abbott Laboratories Apparatus and method for continuously monitoring cardiac output
JP2846518B2 (ja) * 1992-03-18 1999-01-13 株式会社日立製作所 空気流量検出器及びそれを使用したエンジン制御装置
ITGE940008A1 (it) * 1994-01-19 1995-07-19 Vincenzo Arrichiello Dispositivo per la misurazione della velocita' di un flusso di fluido.
DE19517236C2 (de) * 1995-05-15 1998-12-24 Ifm Electronic Gmbh Verfahren und Vorrichtung zur Überwachung der Strömung strömender Medien
US5620002A (en) * 1995-12-22 1997-04-15 Abbott Critical Care Systems Method for correcting thermal drift in cardiac output determination
US7167748B2 (en) * 1996-01-08 2007-01-23 Impulse Dynamics Nv Electrical muscle controller
US6182509B1 (en) 1996-06-26 2001-02-06 Simon Fraser University Accelerometer without proof mass
WO1997049998A1 (en) 1996-06-26 1997-12-31 Simon Fraser University Accelerometer without proof mass
US6589433B2 (en) 1996-06-26 2003-07-08 Simon Fraser University Accelerometer without proof mass
US6230570B1 (en) 1997-08-26 2001-05-15 John Paul Clark Turbulent spot flowmeter
US6502459B1 (en) * 2000-09-01 2003-01-07 Honeywell International Inc. Microsensor for measuring velocity and angular direction of an incoming air stream
US6795752B1 (en) 2000-11-03 2004-09-21 Memsic, Inc. Thermal convection accelerometer with closed-loop heater control
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
JP3955747B2 (ja) * 2001-08-22 2007-08-08 三菱電機株式会社 流量測定装置
DE10217982A1 (de) * 2002-04-23 2003-11-06 Zweibrueder Optoelectronics Korkenzieher
US6871535B2 (en) * 2002-08-14 2005-03-29 Hewlett-Packard Development Company, L.P. Flow direction detector
ES2214122B1 (es) * 2002-12-20 2005-11-01 Universidad De Jaen Sensor de microflujo bidireccional.
DE102007023840B4 (de) * 2007-05-21 2012-02-09 Abb Ag Thermischer Massendurchflussmesser und Verfahren zu dessen Betrieb
US8002199B2 (en) 2008-12-12 2011-08-23 Habegger Millard A Highly sensitive airflow direction sensing
JP5696605B2 (ja) * 2011-07-01 2015-04-08 東京エレクトロン株式会社 基板処理装置のデータ取得方法及び基板処理装置
US9243943B2 (en) 2013-04-10 2016-01-26 International Business Machines Corporation Air-flow sensor for adapter slots in a data processing system
US20150292957A1 (en) * 2014-04-09 2015-10-15 Ecole Polytechnique Federale De Lausanne (Epfl) Method, computer program and apparatus for measuring a distribution of a physical variable in a region
GB2533936B (en) 2015-01-07 2017-10-25 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
EP3410930B1 (en) 2016-02-04 2019-11-27 Medyria AG Sensor arrangement and catheter comprising a sensor arrangement
DE102021211022A1 (de) * 2021-09-30 2023-03-30 Skf Lubrication Systems Germany Gmbh Fluidgeschwindigkeitssensoreinheit und/oder Fluidvolumenstromsensoreinheit und Bestimmungsverfahren

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3352154A (en) * 1965-06-16 1967-11-14 Robert S Djorup Heated element fluid flow sensor
US3680377A (en) * 1970-08-17 1972-08-01 Hewlett Packard Co Fluid flow meter
US3995481A (en) * 1973-02-07 1976-12-07 Environmental Instruments, Inc. Directional fluid flow transducer
CA995483A (en) * 1973-02-16 1976-08-24 Her Majesty The Queen In Right Of Canada As Represented By The Minister Of National Defence Of Her Majesty's Canadian Government Transistor anemometer
US3992940A (en) * 1973-11-02 1976-11-23 Chrysler Corporation Solid state fluid flow sensor
NL7609696A (en) * 1976-08-31 1978-03-02 Brooks Instr Nederland B V Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate
DE3024417A1 (de) * 1980-06-28 1982-01-21 William Buchanan Falmouth Mass. Kerfoot Verfahren und vorrichtung zur messung einer stroemungscharakteristik
US4471655A (en) * 1980-10-24 1984-09-18 Nippon Soken, Inc. Gas flow rate measuring apparatus
US4453405A (en) * 1982-05-24 1984-06-12 Trustees Of The University Of Pennsylvania Pyroelectric vorticimeter
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004039405A1 (de) * 2004-08-13 2006-03-09 Siemens Ag Sensorvorrichtung, Verfahren, Vorrichtung und Sensorsystem zum Ermitteln einer Seite eines Fahrzeugs, an der ein Rad mit einer Sensorvorrichtung angeordnet ist
DE102004039405B4 (de) * 2004-08-13 2007-02-01 Siemens Ag Sensorvorrichtung und Verfahren zum Ermitteln einer Seite eines Fahrzeugs, an der ein Rad mit einer Sensorvorrichtung angeordnet ist
US7277008B2 (en) 2004-08-13 2007-10-02 Siemens Aktiengesellschaft Sensor unit, method, device and sensor system for determining a side of a vehicle on which a wheel with a sensor unit is disposed

Also Published As

Publication number Publication date
US4637253A (en) 1987-01-20
DE3518409A1 (de) 1985-11-28

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee