DE3518409A1 - Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels - Google Patents

Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels

Info

Publication number
DE3518409A1
DE3518409A1 DE19853518409 DE3518409A DE3518409A1 DE 3518409 A1 DE3518409 A1 DE 3518409A1 DE 19853518409 DE19853518409 DE 19853518409 DE 3518409 A DE3518409 A DE 3518409A DE 3518409 A1 DE3518409 A1 DE 3518409A1
Authority
DE
Germany
Prior art keywords
signal
temperature
flow
fluid
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19853518409
Other languages
German (de)
English (en)
Other versions
DE3518409C2 (enExample
Inventor
Masayuki Yokohama Sekimura
Shunji Ayase Kanagawa Shirouzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59103028A external-priority patent/JPS60247169A/ja
Priority claimed from JP59103030A external-priority patent/JPS60247171A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE3518409A1 publication Critical patent/DE3518409A1/de
Application granted granted Critical
Publication of DE3518409C2 publication Critical patent/DE3518409C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE19853518409 1984-05-22 1985-05-22 Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels Granted DE3518409A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59103028A JPS60247169A (ja) 1984-05-22 1984-05-22 半導体流速検出器
JP59103030A JPS60247171A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Publications (2)

Publication Number Publication Date
DE3518409A1 true DE3518409A1 (de) 1985-11-28
DE3518409C2 DE3518409C2 (enExample) 1988-05-19

Family

ID=26443694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19853518409 Granted DE3518409A1 (de) 1984-05-22 1985-05-22 Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels

Country Status (2)

Country Link
US (1) US4637253A (enExample)
DE (1) DE3518409A1 (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3833929A1 (de) * 1987-10-05 1989-04-20 Murata Manufacturing Co Thermisches durchfluss-messelement
EP0411518A3 (en) * 1989-08-03 1991-05-02 Pierburg Gmbh Measuring system to determine air mass flow
WO1991016605A1 (de) * 1990-04-14 1991-10-31 Robert Bosch Gmbh Verfahren und anordnung zum messen von strömenden luftmengen
WO1991019170A1 (en) * 1990-06-04 1991-12-12 Mcpherson's Limited Flow sensor and control system
WO1995020166A1 (en) * 1994-01-19 1995-07-27 Vincenzo Arrichiello Device for measuring the velocity of a flow of fluid
EP0522496A3 (en) * 1991-07-08 1996-05-08 Nippon Denso Co Thermal type flowmeter
DE19517236A1 (de) * 1995-05-15 1996-11-21 Ifm Electronic Gmbh Verfahren und Vorrichtung zur Überwachung der Strömung strömender Medien
DE10215954B4 (de) * 2001-08-22 2006-08-10 Mitsubishi Denki K.K. Durchflussmessvorrichtung

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU576321B2 (en) * 1983-06-17 1988-08-25 Institut De Recherche Et De Developpement Aerologique Marketing S.A. Measuring wind speed
JPH0810231B2 (ja) * 1987-03-31 1996-01-31 シャープ株式会社 フローセンサ
NL8702229A (nl) * 1987-09-18 1989-04-17 Bronkhorst High Tech Bv Richtingsgevoelige stroomsnelheidsmeter.
US4884443A (en) * 1987-12-23 1989-12-05 Siemens-Bendix Automotive Electronics L. P. Control and detection circuitry for mass airflow sensors
US4918995A (en) * 1988-01-04 1990-04-24 Gas Research Institute Electronic gas meter
US5237867A (en) * 1990-06-29 1993-08-24 Siemens Automotive L.P. Thin-film air flow sensor using temperature-biasing resistive element
US5217019A (en) * 1991-12-27 1993-06-08 Abbott Laboratories Apparatus and method for continuously monitoring cardiac output
JP2846518B2 (ja) * 1992-03-18 1999-01-13 株式会社日立製作所 空気流量検出器及びそれを使用したエンジン制御装置
US5620002A (en) * 1995-12-22 1997-04-15 Abbott Critical Care Systems Method for correcting thermal drift in cardiac output determination
US7167748B2 (en) * 1996-01-08 2007-01-23 Impulse Dynamics Nv Electrical muscle controller
US6182509B1 (en) 1996-06-26 2001-02-06 Simon Fraser University Accelerometer without proof mass
WO1997049998A1 (en) 1996-06-26 1997-12-31 Simon Fraser University Accelerometer without proof mass
US6589433B2 (en) 1996-06-26 2003-07-08 Simon Fraser University Accelerometer without proof mass
US6230570B1 (en) 1997-08-26 2001-05-15 John Paul Clark Turbulent spot flowmeter
US6502459B1 (en) * 2000-09-01 2003-01-07 Honeywell International Inc. Microsensor for measuring velocity and angular direction of an incoming air stream
US6795752B1 (en) 2000-11-03 2004-09-21 Memsic, Inc. Thermal convection accelerometer with closed-loop heater control
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
DE10217982A1 (de) * 2002-04-23 2003-11-06 Zweibrueder Optoelectronics Korkenzieher
US6871535B2 (en) * 2002-08-14 2005-03-29 Hewlett-Packard Development Company, L.P. Flow direction detector
ES2214122B1 (es) * 2002-12-20 2005-11-01 Universidad De Jaen Sensor de microflujo bidireccional.
DE102004039405B4 (de) * 2004-08-13 2007-02-01 Siemens Ag Sensorvorrichtung und Verfahren zum Ermitteln einer Seite eines Fahrzeugs, an der ein Rad mit einer Sensorvorrichtung angeordnet ist
DE102007023840B4 (de) * 2007-05-21 2012-02-09 Abb Ag Thermischer Massendurchflussmesser und Verfahren zu dessen Betrieb
US8002199B2 (en) 2008-12-12 2011-08-23 Habegger Millard A Highly sensitive airflow direction sensing
JP5696605B2 (ja) * 2011-07-01 2015-04-08 東京エレクトロン株式会社 基板処理装置のデータ取得方法及び基板処理装置
US9243943B2 (en) 2013-04-10 2016-01-26 International Business Machines Corporation Air-flow sensor for adapter slots in a data processing system
US20150292957A1 (en) * 2014-04-09 2015-10-15 Ecole Polytechnique Federale De Lausanne (Epfl) Method, computer program and apparatus for measuring a distribution of a physical variable in a region
GB2533936B (en) 2015-01-07 2017-10-25 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
EP3410930B1 (en) 2016-02-04 2019-11-27 Medyria AG Sensor arrangement and catheter comprising a sensor arrangement
DE102021211022A1 (de) * 2021-09-30 2023-03-30 Skf Lubrication Systems Germany Gmbh Fluidgeschwindigkeitssensoreinheit und/oder Fluidvolumenstromsensoreinheit und Bestimmungsverfahren

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3995481A (en) * 1973-02-07 1976-12-07 Environmental Instruments, Inc. Directional fluid flow transducer
US4391137A (en) * 1980-06-28 1983-07-05 K-V Associates, Inc. Groundwater flow meter
US4409828A (en) * 1980-04-11 1983-10-18 Nippon Soken, Inc. Gas flow measuring device
US4453405A (en) * 1982-05-24 1984-06-12 Trustees Of The University Of Pennsylvania Pyroelectric vorticimeter
US4471655A (en) * 1980-10-24 1984-09-18 Nippon Soken, Inc. Gas flow rate measuring apparatus
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3352154A (en) * 1965-06-16 1967-11-14 Robert S Djorup Heated element fluid flow sensor
US3680377A (en) * 1970-08-17 1972-08-01 Hewlett Packard Co Fluid flow meter
CA995483A (en) * 1973-02-16 1976-08-24 Her Majesty The Queen In Right Of Canada As Represented By The Minister Of National Defence Of Her Majesty's Canadian Government Transistor anemometer
US3992940A (en) * 1973-11-02 1976-11-23 Chrysler Corporation Solid state fluid flow sensor
NL7609696A (en) * 1976-08-31 1978-03-02 Brooks Instr Nederland B V Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3995481A (en) * 1973-02-07 1976-12-07 Environmental Instruments, Inc. Directional fluid flow transducer
US4409828A (en) * 1980-04-11 1983-10-18 Nippon Soken, Inc. Gas flow measuring device
US4391137A (en) * 1980-06-28 1983-07-05 K-V Associates, Inc. Groundwater flow meter
US4471655A (en) * 1980-10-24 1984-09-18 Nippon Soken, Inc. Gas flow rate measuring apparatus
US4453405A (en) * 1982-05-24 1984-06-12 Trustees Of The University Of Pennsylvania Pyroelectric vorticimeter
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
10-83 betreffend Thermischer Durchflußmesser "Thermoflux" *
Firmenprospekt Firma ROTA Apparate- und Maschinenbau Dr. Hennig GmbH und Co, KG *
US-Z: IEEE Transactions on electron Devices, Vol. ED-29, No. 1, Jan. 1982, S. 133-136 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3833929A1 (de) * 1987-10-05 1989-04-20 Murata Manufacturing Co Thermisches durchfluss-messelement
US5038609A (en) * 1987-10-05 1991-08-13 Murata Mfg., Co., Ltd. Thermal type flow detecting apparatus
EP0411518A3 (en) * 1989-08-03 1991-05-02 Pierburg Gmbh Measuring system to determine air mass flow
WO1991016605A1 (de) * 1990-04-14 1991-10-31 Robert Bosch Gmbh Verfahren und anordnung zum messen von strömenden luftmengen
WO1991019170A1 (en) * 1990-06-04 1991-12-12 Mcpherson's Limited Flow sensor and control system
EP0522496A3 (en) * 1991-07-08 1996-05-08 Nippon Denso Co Thermal type flowmeter
WO1995020166A1 (en) * 1994-01-19 1995-07-27 Vincenzo Arrichiello Device for measuring the velocity of a flow of fluid
DE19517236A1 (de) * 1995-05-15 1996-11-21 Ifm Electronic Gmbh Verfahren und Vorrichtung zur Überwachung der Strömung strömender Medien
DE19517236C2 (de) * 1995-05-15 1998-12-24 Ifm Electronic Gmbh Verfahren und Vorrichtung zur Überwachung der Strömung strömender Medien
DE10215954B4 (de) * 2001-08-22 2006-08-10 Mitsubishi Denki K.K. Durchflussmessvorrichtung

Also Published As

Publication number Publication date
DE3518409C2 (enExample) 1988-05-19
US4637253A (en) 1987-01-20

Similar Documents

Publication Publication Date Title
DE3518409C2 (enExample)
DE69523540T2 (de) Nach dem differentiellen stromprinzip arbeitender thermischer massendurchflussmesser
EP0106204B1 (de) Schaltung mit Hall-Feldsonde
DE68920847T2 (de) Korrektur für die Fluidzusammensetzung in einem Durchflussmesser.
DE2528038B2 (de) DurchfluBmeBsystem
EP0269781A1 (de) Vorrichtung zur Bestimmung des Massenstromes und der Durchflussrichtung
EP0129817B1 (de) Schaltung mit Hall-Generator
DE2940315C2 (de) Einrichtung zum Ermitteln des Drehwinkels eines Drehkörpers
DE3309404C2 (enExample)
DE4100318A1 (de) Verfahren und schaltungsanordnung zur hochfrequenzspannungs/strommessung
DE3230405C2 (enExample)
DE2307296C3 (de) Anordnung zur Messung von Temperaturen
DE19509535A1 (de) Verfahren zur Einstellung von Luftmassenstromsensoren sowie Vorrichtung zu seiner Durchführung
DE2405651B2 (de) Pyrometer
Geary Non-linear functional relationship between two variables when one variable is controlled
DE2830964C2 (de) Strömungsmitteldurchflußmesser mit Widerstandsmeßbrücke
DE3103051C2 (de) Vorrichtung zur Messung des Durchflusses eines strömenden Fluids
DE3905665C2 (de) Anordnung zur Messung des Massenstroms
EP0667509A2 (de) Temperaturkompensation bei Massenstromsensoren nach dem Prinzip des Hitzdraht-Anemometers
DE2702815B2 (de) Temperaturmeßvorrichtung
DE2441417A1 (de) Strahlungsfluss-messanordnung
DE102018210217B4 (de) Durchflussraten-Detektor
DE2729821A1 (de) Vorrichtung zum bestimmen des flusses eines gases
EP0939305A1 (de) Temperaturregler
DE4117133C1 (en) Thermoelectric power measuring converter - has resistance electronically controllable by instantaneous value of input signal and temp. sensor on common support heat-insulated from surroundings

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee