NL7609696A - Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back - Google Patents

Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back

Info

Publication number
NL7609696A
NL7609696A NL7609696A NL7609696A NL7609696A NL 7609696 A NL7609696 A NL 7609696A NL 7609696 A NL7609696 A NL 7609696A NL 7609696 A NL7609696 A NL 7609696A NL 7609696 A NL7609696 A NL 7609696A
Authority
NL
Netherlands
Prior art keywords
temp
chip
sensitive
transistors
flow speed
Prior art date
Application number
NL7609696A
Other languages
Dutch (nl)
Original Assignee
Brooks Instr Nederland B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Instr Nederland B V filed Critical Brooks Instr Nederland B V
Priority to NL7609696A priority Critical patent/NL7609696A/en
Publication of NL7609696A publication Critical patent/NL7609696A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)

Abstract

A direction sensitive flow speed meter measures a gas or a liquid flowing through a pipe. The circuit contains a chip with an integrated sensor section and signal processing sections. It can be heated up so that a temp. gradient is produced as a function of the flow speed. This temp. gradient is converted into an electrical signal. The sensor section of the chip (1) consists of two or more temp. sensitive transistors (T2 3 4) looked at from the measuring device, one of the transistors is at the front edge and another at the back edge of the chip. The temp. sensitive transistor on the front and back of the chip are balanced. If the flow is zero, the difference in output signals between the transistors at the front and back is zero.
NL7609696A 1976-08-31 1976-08-31 Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back NL7609696A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL7609696A NL7609696A (en) 1976-08-31 1976-08-31 Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7609696A NL7609696A (en) 1976-08-31 1976-08-31 Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back

Publications (1)

Publication Number Publication Date
NL7609696A true NL7609696A (en) 1978-03-02

Family

ID=19826827

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7609696A NL7609696A (en) 1976-08-31 1976-08-31 Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back

Country Status (1)

Country Link
NL (1) NL7609696A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4373386A (en) * 1979-07-09 1983-02-15 Brooks Instrument B.V. Direction sensitive flow velocity meter and sensing plate to be used on it
US4637253A (en) * 1984-05-22 1987-01-20 Kabushiki Kaisha Toshiba Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
NL1001340C2 (en) * 1995-10-04 1997-04-08 Zwaan Adrianus J Ventilation system provided with a ventilation device with an airflow direction sensor.
ES2214122A1 (en) * 2002-12-20 2004-09-01 Universidad De Jaen Bidirectional micro flow sensor for measuring gas flow direction of circuit in heater at e.g. medicine field, has heating structure located between NPN-type silicon structures, and metal structure fixed with tunnel on ceramic substrate
CN104950133A (en) * 2015-07-06 2015-09-30 浙江大学 Microfluidic flow rate sensor chip, detection system and detection method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4373386A (en) * 1979-07-09 1983-02-15 Brooks Instrument B.V. Direction sensitive flow velocity meter and sensing plate to be used on it
US4637253A (en) * 1984-05-22 1987-01-20 Kabushiki Kaisha Toshiba Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
NL1001340C2 (en) * 1995-10-04 1997-04-08 Zwaan Adrianus J Ventilation system provided with a ventilation device with an airflow direction sensor.
EP0767386A1 (en) * 1995-10-04 1997-04-09 Adrianus Jacobus Zwaan Ventilation system comprising a ventilating device with an air-flow direction sensor
ES2214122A1 (en) * 2002-12-20 2004-09-01 Universidad De Jaen Bidirectional micro flow sensor for measuring gas flow direction of circuit in heater at e.g. medicine field, has heating structure located between NPN-type silicon structures, and metal structure fixed with tunnel on ceramic substrate
CN104950133A (en) * 2015-07-06 2015-09-30 浙江大学 Microfluidic flow rate sensor chip, detection system and detection method
CN104950133B (en) * 2015-07-06 2017-12-15 浙江大学 Microfluid flow velocity sensing chip, detecting system and detection method

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Legal Events

Date Code Title Description
BC A request for examination has been filed
A85 Still pending on 85-01-01
BI The patent application has been withdrawn