DE3485434D1 - Keramischer verbundkoerper und seine herstellung. - Google Patents

Keramischer verbundkoerper und seine herstellung.

Info

Publication number
DE3485434D1
DE3485434D1 DE8484111292T DE3485434T DE3485434D1 DE 3485434 D1 DE3485434 D1 DE 3485434D1 DE 8484111292 T DE8484111292 T DE 8484111292T DE 3485434 T DE3485434 T DE 3485434T DE 3485434 D1 DE3485434 D1 DE 3485434D1
Authority
DE
Germany
Prior art keywords
production
ceramic composite
composite body
ceramic
composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8484111292T
Other languages
English (en)
Inventor
Shun-Ichiro Kabushiki K Tanaka
Kazuo Kabushiki Kaisha T Ikeda
Akio Kabushiki Kaisha T Sayano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3485434D1 publication Critical patent/DE3485434D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/122—Metallic interlayers based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/124—Metallic interlayers based on copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/59—Aspects relating to the structure of the interlayer
    • C04B2237/592—Aspects relating to the structure of the interlayer whereby the interlayer is not continuous, e.g. not the whole surface of the smallest substrate is covered by the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/64—Forming laminates or joined articles comprising grooves or cuts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
DE8484111292T 1983-09-30 1984-09-21 Keramischer verbundkoerper und seine herstellung. Expired - Lifetime DE3485434D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58182093A JPS6077178A (ja) 1983-09-30 1983-09-30 窒化物セラミックス接合体およびその製造方法

Publications (1)

Publication Number Publication Date
DE3485434D1 true DE3485434D1 (de) 1992-02-20

Family

ID=16112226

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484111292T Expired - Lifetime DE3485434D1 (de) 1983-09-30 1984-09-21 Keramischer verbundkoerper und seine herstellung.

Country Status (4)

Country Link
US (1) US5125557A (de)
EP (1) EP0142673B1 (de)
JP (1) JPS6077178A (de)
DE (1) DE3485434D1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0208842A3 (de) * 1985-06-12 1988-07-20 Kernforschungszentrum Karlsruhe Gmbh Verfahren zum Herstellen einer festen Bindung zweier Teile
DE3661067D1 (en) * 1985-08-14 1988-12-08 Buchtal Gmbh Large-size ceramic slab with retaining components provided on the side away from the visual side
FR2599896B1 (fr) * 1986-06-06 1988-10-21 Comp Generale Electricite Procede pour solidariser par thermocompression un tube en alumine beta ou beta seconde et un support en ceramique isolante dans un generateur electrochimique sodium-soufre et generateurs electrochimiques en faisant application
JPH0680873B2 (ja) * 1986-07-11 1994-10-12 株式会社東芝 回路基板
JPH0739236Y2 (ja) * 1986-10-30 1995-09-06 日本特殊陶業株式会社 アルミナ質基板と窒化アルミニウム基板の接合部
US6413589B1 (en) 1988-11-29 2002-07-02 Chou H. Li Ceramic coating method
US5248079A (en) * 1988-11-29 1993-09-28 Li Chou H Ceramic bonding method
JPH0710645A (ja) * 1993-10-08 1995-01-13 Toshiba Corp 窒化アルミニウム接合体およびその製造方法
AT400909B (de) * 1994-01-17 1996-04-25 Plansee Ag Verfahren zur herstellung einer kühleinrichtung
JPH07101784A (ja) * 1994-06-06 1995-04-18 Toshiba Corp 窒化アルミニウム接合体およびその製造方法
US6286206B1 (en) 1997-02-25 2001-09-11 Chou H. Li Heat-resistant electronic systems and circuit boards
US5937514A (en) 1997-02-25 1999-08-17 Li; Chou H. Method of making a heat-resistant system
US6676492B2 (en) 1998-12-15 2004-01-13 Chou H. Li Chemical mechanical polishing
US6458017B1 (en) 1998-12-15 2002-10-01 Chou H. Li Planarizing method
US6976904B2 (en) * 1998-07-09 2005-12-20 Li Family Holdings, Ltd. Chemical mechanical polishing slurry
US6586704B1 (en) 2001-05-15 2003-07-01 The United States Of America As Represented By The United States Department Of Energy Joining of materials using laser heating
JP4077181B2 (ja) * 2001-09-27 2008-04-16 本田技研工業株式会社 金属用又はセラミック用接合材及び金属又はセラミックの接合方法
US20050097893A1 (en) * 2003-11-07 2005-05-12 General Electric Company Method and apparatus for increasing a durability of a body
US7028462B2 (en) * 2003-11-07 2006-04-18 General Electric Company Method and apparatus for arresting a crack within a body
FR2872072B1 (fr) * 2004-06-24 2006-09-29 Snecma Propulsion Solide Sa Procede de brasage de pieces en materiau composite thermostructural siliciure
DE102004044942A1 (de) * 2004-09-16 2006-03-30 Esk Ceramics Gmbh & Co. Kg Verfahren zum verformungsarmen Diffusionsschweißen von keramischen Komponenten
US7857194B2 (en) * 2007-05-01 2010-12-28 University Of Dayton Method of joining metals to ceramic matrix composites
JP4471002B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP4471004B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP4471003B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
DE102009008926B4 (de) * 2009-02-13 2022-06-15 Danfoss Silicon Power Gmbh Verfahren zur Schaffung einer hochtemperatur- und temperaturwechselfesten Verbindung eines Halbleiterbausteins mit einem Verbindungspartner und einer Kontaktlasche unter Verwendung eines temperaturbeaufschlagenden Verfahrens
US10406774B2 (en) 2016-10-17 2019-09-10 U.S. Department Of Energy Diffusion bonding of silicon carbide using iridium and hermetic silicon carbide-iridium bonds
CN114956850B (zh) * 2022-04-14 2023-05-02 天诺光电材料股份有限公司 一种利用金属线纳米薄膜制备覆铜氮化物陶瓷板的方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2857663A (en) * 1954-02-09 1958-10-28 Gen Electric Metallic bond
DE1646934A1 (de) * 1965-07-23 1971-08-05 Rosenthal Ag Verfahren zur Herstellung festhaftender Metallschichten auf Keramikflaechen
DE2543140C3 (de) * 1975-09-26 1978-05-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen vonlesten Lötverbindungen zwischen Teilen aus keramischen hochtemperaturbeständigen Werkstoffen und hochschmelzenden Metallen
JPS54149646U (de) * 1978-04-11 1979-10-18
US4226932A (en) * 1979-07-05 1980-10-07 Gte Automatic Electric Laboratories Incorporated Titanium nitride as one layer of a multi-layered coating intended to be etched
US4357382A (en) * 1980-11-06 1982-11-02 Fansteel Inc. Coated cemented carbide bodies
US4448853A (en) * 1981-04-15 1984-05-15 Bbc Brown, Boveri & Company, Limited Layered active brazing material and method for producing it
JPS5879880A (ja) * 1981-11-02 1983-05-13 大同特殊鋼株式会社 接合方法
JPS5891087A (ja) * 1981-11-26 1983-05-30 旭硝子株式会社 セラミツクス部材と金属部材の接合体
JPS5891088A (ja) * 1981-11-27 1983-05-30 トヨタ自動車株式会社 セラミツクと金属との接合方法
JPS58120578A (ja) * 1982-01-05 1983-07-18 松下電器産業株式会社 無機質基材の選択性鑞付け方法
JPS58140381A (ja) * 1982-02-12 1983-08-20 日本特殊陶業株式会社 窒化珪素焼結体表面の金属化法
JPS5957973A (ja) * 1982-09-25 1984-04-03 日本特殊陶業株式会社 金属・セラミツクス複合体
JPS59137373A (ja) * 1983-01-20 1984-08-07 日本特殊陶業株式会社 セラミツクの接合方法
JPS59232693A (ja) * 1983-06-17 1984-12-27 Ngk Spark Plug Co Ltd セラミツクと金属等との接合用クラツドろう材及びこれを用いたセラミツクと金属等との複合体
JPS6065773A (ja) * 1983-09-16 1985-04-15 株式会社荏原製作所 窒化物系セラミツクスを接合してなる金属製品並びにその製造方法
US4824008A (en) * 1986-09-16 1989-04-25 Lanxide Technology Company, Lp Surface bonding of ceramic bodies

Also Published As

Publication number Publication date
EP0142673A1 (de) 1985-05-29
JPH0474306B2 (de) 1992-11-25
US5125557A (en) 1992-06-30
JPS6077178A (ja) 1985-05-01
EP0142673B1 (de) 1992-01-08

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