DE3485381D1 - Durchflussmessgeraet. - Google Patents

Durchflussmessgeraet.

Info

Publication number
DE3485381D1
DE3485381D1 DE8484200722T DE3485381T DE3485381D1 DE 3485381 D1 DE3485381 D1 DE 3485381D1 DE 8484200722 T DE8484200722 T DE 8484200722T DE 3485381 T DE3485381 T DE 3485381T DE 3485381 D1 DE3485381 D1 DE 3485381D1
Authority
DE
Germany
Prior art keywords
onto
measuring channel
fluid
series circuit
sensor elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8484200722T
Other languages
German (de)
English (en)
Inventor
Wijbren Jouwsma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bronkhorst High-Tech BV
Original Assignee
Bronkhorst High-Tech BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bronkhorst High-Tech BV filed Critical Bronkhorst High-Tech BV
Application granted granted Critical
Publication of DE3485381D1 publication Critical patent/DE3485381D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Paper (AREA)
DE8484200722T 1983-05-18 1984-05-17 Durchflussmessgeraet. Expired - Lifetime DE3485381D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8301765 1983-05-18

Publications (1)

Publication Number Publication Date
DE3485381D1 true DE3485381D1 (de) 1992-02-06

Family

ID=19841875

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484200722T Expired - Lifetime DE3485381D1 (de) 1983-05-18 1984-05-17 Durchflussmessgeraet.

Country Status (5)

Country Link
US (1) US4616505A (en, 2012)
EP (1) EP0131318B1 (en, 2012)
JP (1) JPS59231417A (en, 2012)
AT (1) ATE70911T1 (en, 2012)
DE (1) DE3485381D1 (en, 2012)

Families Citing this family (47)

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GB2173905A (en) * 1985-04-12 1986-10-22 Radyne Ltd Fluid-flow monitoring apparatus
AT396998B (de) * 1985-12-09 1994-01-25 Ottosensors Corp Messeinrichtungen und rohranschluss sowie verfahren zur herstellung einer messeinrichtung und verfahren zur verbindung von rohren mit einer messeinrichtung bzw. zur herstellung von rohranschlüssen
CA1255923A (en) * 1985-12-23 1989-06-20 Dimitri Petrov Non-obstructive thermodynamic flow meter
JPS6385364A (ja) * 1986-09-29 1988-04-15 Sharp Corp フローセンサ
DE3713981A1 (de) * 1987-04-27 1988-11-17 Robert Buck Waermeuebergangsmessgeraet, insbesondere stroemungswaechter
DE3905524A1 (de) * 1989-02-23 1990-08-30 Weber Guenther Elementanordnung fuer kalorimetrische stroemungssensoren
DE4005227A1 (de) * 1990-02-20 1991-08-22 Friedrich Hoersch Flusswaechter
FR2670579A1 (fr) * 1990-12-14 1992-06-19 Schlumberger Ind Sa Capteur semi-conducteur de debit.
US5259243A (en) * 1991-01-04 1993-11-09 Dxl International, Inc. Flow sensor
US5189910A (en) * 1991-04-26 1993-03-02 Honda Engineering Co., Ltd. Fluid speed measuring probe
US5682899A (en) * 1991-05-16 1997-11-04 Ami-Med Corporation Apparatus and method for continuous cardiac output monitoring
DE4219551C2 (de) * 1991-06-13 1996-04-18 Mks Japan Inc Massenströmungssensor
JP2643665B2 (ja) * 1991-06-13 1997-08-20 日本エム・ケー・エス 株式会社 流量センサ
DE4335332A1 (de) * 1993-10-18 1995-04-20 Bitop Gmbh Verfahren und Vorrichtung zur insbesondere nicht invasiven Ermittlung mindestens eines interessierenden Parameters eines Fluid-Rohr-Systems
US5509424A (en) * 1994-01-28 1996-04-23 Aws Salim Nashef Continuous cardiac output monitoring system
RU2125242C1 (ru) * 1995-11-15 1999-01-20 Ракетно-космическая корпорация "Энергия" им.С.П.Королева Способ определения расхода и датчик для измерения расхода
US5792952A (en) * 1996-05-23 1998-08-11 Varian Associates, Inc. Fluid thermal mass flow sensor
DE69709132T2 (de) * 1997-12-30 2002-07-18 Qualiflow S.A., Montpellier Verfahren zur Schaffung eines Mikro-Thermoelement-Sensors für die Massendurchflussmessung und entsprechende Vorrichtung dazu
DE69714747T2 (de) * 1997-12-30 2003-04-30 Qualiflow S.A., Montpellier Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser
DE19808248A1 (de) * 1998-02-27 1999-09-02 Pierburg Ag Meßvorrichtung zur Messung der Masse eines strömenden Mediums
US6208254B1 (en) 1999-09-15 2001-03-27 Fluid Components Intl Thermal dispersion mass flow rate and liquid level switch/transmitter
AU4868901A (en) * 2000-05-04 2001-11-12 Sensirion Ag Flow sensor
JP3754678B2 (ja) * 2003-04-16 2006-03-15 株式会社フジキン 耐食金属製熱式質量流量センサとこれを用いた流体供給機器
NL1023404C2 (nl) * 2003-05-13 2004-11-16 Berkin Bv Inrichting voor het regelen van het massadebiet van een vloeistofstroom in een vloeistofkanaal.
JP2005300187A (ja) * 2004-04-06 2005-10-27 Keyence Corp 分流式流量センサ装置
JP4079116B2 (ja) * 2004-04-30 2008-04-23 オムロン株式会社 流量計
US7181963B2 (en) * 2004-06-30 2007-02-27 Codman & Shurtleff, Inc Thermal flow sensor having streamlined packaging
US7069779B2 (en) * 2004-06-30 2006-07-04 Codman & Shurtleff, Inc. Thermal flow sensor having an inverted substrate
US20060000272A1 (en) * 2004-06-30 2006-01-05 Beat Neuenschwander Thermal flow sensor having an asymmetric design
US7036369B2 (en) * 2004-06-30 2006-05-02 Codman & Shurtleff, Inc. Thermal flow sensor having recesses in a substrate
DE502005001562D1 (de) * 2004-10-25 2007-11-08 Alstom Technology Ltd Vorrichtung zur schnellen Messung von Temperaturen in einem Heissgasstrom
US7331224B2 (en) * 2004-12-07 2008-02-19 Honeywell International Inc. Tilt-insensitive flow sensor
US7755466B2 (en) 2006-04-26 2010-07-13 Honeywell International Inc. Flip-chip flow sensor
JP4888040B2 (ja) * 2006-10-18 2012-02-29 株式会社島津製作所 熱式質量流量計
JP4940938B2 (ja) * 2006-12-25 2012-05-30 株式会社島津製作所 熱式質量流量計
US8850872B2 (en) 2009-05-08 2014-10-07 Opw Fuel Management Systems, Inc. Line leak detector and method of using same
US8316695B2 (en) * 2009-05-08 2012-11-27 Delaware Capital Formation, Inc. Line leak detector and method of using same
US8943887B2 (en) * 2009-12-18 2015-02-03 Waters Technologies Corporation Thermal-based flow sensing apparatuses and methods for high-performance liquid chromatography
US10107662B2 (en) 2015-01-30 2018-10-23 Honeywell International Inc. Sensor assembly
WO2016175843A1 (en) * 2015-04-30 2016-11-03 Hewlett-Packard Development Company, L.P. Microfluidic flow sensor
DE102016116101A1 (de) * 2016-08-30 2018-03-01 Innovative Sensor Technology Ist Ag Sensorelement und thermischer Strömungssensor zur Messung einer physikalischen Größe eines Messmediums
CN110022715B (zh) 2016-11-30 2022-02-11 Ykk株式会社 拉链用拉头
US10409295B2 (en) * 2016-12-31 2019-09-10 Applied Materials, Inc. Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
DE102017120941B4 (de) 2017-09-11 2025-04-30 Endress + Hauser Wetzer Gmbh + Co. Kg Thermisches Durchflussmessgerät und Verfahren zum Betreiben eines thermischen Durchflussmessgeräts
EP3762688A4 (en) 2018-03-06 2021-12-08 Ezmems Ltd. DIRECT IMPLEMENTATION OF SENSORS IN TUBES
DE102018130547A1 (de) * 2018-11-30 2020-06-04 Innovative Sensor Technology Ist Ag Sensorelement, Verfahren zu dessen Herstellung und thermischer Strömungssensor
JP2021131323A (ja) 2020-02-20 2021-09-09 サーパス工業株式会社 流量計および流量計の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL83702C (en, 2012) * 1946-05-21 1900-01-01
US3336804A (en) * 1964-03-09 1967-08-22 Heinz F Poppendiek Means and techniques useful in fluid flow determinations
US3438254A (en) * 1965-10-19 1969-04-15 United Control Corp Fluid flow detector
GB1414112A (en) * 1973-07-23 1975-11-19 Tylan Corp Mass flow meter
US3931736A (en) * 1974-06-28 1976-01-13 Rca Corporation Improved fluid flow sensor configuration
US4160969A (en) * 1976-12-27 1979-07-10 The Garrett Corporation Transducer and method of making
DE2925975A1 (de) * 1979-06-27 1981-01-15 Siemens Ag Mengendurchflussmesser
FR2468887A1 (fr) * 1979-11-06 1981-05-08 Renault Debimetre thermique pour fluide
DE3006584A1 (de) * 1980-02-22 1981-09-03 Degussa Ag, 6000 Frankfurt Thermischer durchflussmesser
US4471647A (en) * 1980-04-18 1984-09-18 Board Of Regents Of Stanford University Gas chromatography system and detector and method
US4335605A (en) * 1980-05-14 1982-06-22 Thermal Instrument Company Mass flow meter
DE3115656A1 (de) * 1981-04-18 1982-11-18 Robert Bosch Gmbh, 7000 Stuttgart Elektrischer widerstand mit mindestens einer auf einem traeger aufgebrachten widerstandsschicht und verfahren zur herstellung eines elektrischen widerstandes

Also Published As

Publication number Publication date
JPH0432974B2 (en, 2012) 1992-06-01
ATE70911T1 (de) 1992-01-15
EP0131318A1 (en) 1985-01-16
JPS59231417A (ja) 1984-12-26
EP0131318B1 (en) 1991-12-27
US4616505A (en) 1986-10-14

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Legal Events

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