DE3475244D1 - Multicharged ion source with several electron cyclotron resonance regions - Google Patents

Multicharged ion source with several electron cyclotron resonance regions

Info

Publication number
DE3475244D1
DE3475244D1 DE8484402460T DE3475244T DE3475244D1 DE 3475244 D1 DE3475244 D1 DE 3475244D1 DE 8484402460 T DE8484402460 T DE 8484402460T DE 3475244 T DE3475244 T DE 3475244T DE 3475244 D1 DE3475244 D1 DE 3475244D1
Authority
DE
Germany
Prior art keywords
ion source
cyclotron resonance
electron cyclotron
several electron
resonance regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484402460T
Other languages
English (en)
Inventor
Bernard Jacquot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE3475244D1 publication Critical patent/DE3475244D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
DE8484402460T 1983-12-07 1984-11-30 Multicharged ion source with several electron cyclotron resonance regions Expired DE3475244D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8319572A FR2556498B1 (fr) 1983-12-07 1983-12-07 Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique

Publications (1)

Publication Number Publication Date
DE3475244D1 true DE3475244D1 (en) 1988-12-22

Family

ID=9294945

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484402460T Expired DE3475244D1 (en) 1983-12-07 1984-11-30 Multicharged ion source with several electron cyclotron resonance regions

Country Status (5)

Country Link
US (1) US4631438A (de)
EP (1) EP0145586B1 (de)
JP (1) JPS60140635A (de)
DE (1) DE3475244D1 (de)
FR (1) FR2556498B1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616384B2 (ja) * 1984-06-11 1994-03-02 日本電信電話株式会社 マイクロ波イオン源
US4727293A (en) * 1984-08-16 1988-02-23 Board Of Trustees Operating Michigan State University Plasma generating apparatus using magnets and method
CA1247757A (en) * 1985-05-03 1988-12-28 The Australian National University Method and apparatus for producing large volume magnetoplasmas
JPS6276137A (ja) * 1985-09-30 1987-04-08 Hitachi Ltd イオン源
FR2592518B1 (fr) * 1985-12-26 1988-02-12 Commissariat Energie Atomique Sources d'ions a resonance cyclotronique electronique
FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques
FR2601498B1 (fr) * 1986-07-10 1988-10-07 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique
JP2667826B2 (ja) * 1987-03-18 1997-10-27 株式会社日立製作所 マイクロ波多価イオン源
US4947085A (en) * 1987-03-27 1990-08-07 Mitsubishi Denki Kabushiki Kaisha Plasma processor
US4778561A (en) * 1987-10-30 1988-10-18 Veeco Instruments, Inc. Electron cyclotron resonance plasma source
US5208512A (en) * 1990-10-16 1993-05-04 International Business Machines Corporation Scanned electron cyclotron resonance plasma source
US5189446A (en) * 1991-05-17 1993-02-23 International Business Machines Corporation Plasma wafer processing tool having closed electron cyclotron resonance
DK0585229T3 (da) * 1991-05-21 1995-12-27 Materials Research Corp Blødætsningsmodul til clusterværktøj og tilhørende ECR-plasmagenerator
FR2681186B1 (fr) * 1991-09-11 1993-10-29 Commissariat A Energie Atomique Source d'ions a resonance cyclotronique electronique et a injection coaxiale d'ondes electromagnetiques.
DE4200235C1 (de) * 1992-01-08 1993-05-06 Hoffmeister, Helmut, Dr., 4400 Muenster, De
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen
FR2861947B1 (fr) * 2003-11-04 2007-11-09 Commissariat Energie Atomique Dispositif pour controler la temperature electronique dans un plasma rce
US20100290575A1 (en) 2009-05-15 2010-11-18 Rosenthal Glenn B Particle beam isotope generator apparatus, system and method
ES2696227B2 (es) * 2018-07-10 2019-06-12 Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat Fuente de iones interna para ciclotrones de baja erosion

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3665245A (en) * 1969-10-27 1972-05-23 Research Corp Quadrupole ionization gauge
US4223246A (en) * 1977-07-01 1980-09-16 Raytheon Company Microwave tubes incorporating rare earth magnets
US4393333A (en) * 1979-12-10 1983-07-12 Hitachi, Ltd. Microwave plasma ion source
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
JPS5947421B2 (ja) * 1980-03-24 1984-11-19 株式会社日立製作所 マイクロ波イオン源
US4507588A (en) * 1983-02-28 1985-03-26 Board Of Trustees Operating Michigan State University Ion generating apparatus and method for the use thereof

Also Published As

Publication number Publication date
EP0145586B1 (de) 1988-11-17
JPS60140635A (ja) 1985-07-25
FR2556498A1 (fr) 1985-06-14
EP0145586A3 (en) 1985-07-10
EP0145586A2 (de) 1985-06-19
JPH0479460B2 (de) 1992-12-16
FR2556498B1 (fr) 1986-09-05
US4631438A (en) 1986-12-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee