FR2861947B1 - Dispositif pour controler la temperature electronique dans un plasma rce - Google Patents

Dispositif pour controler la temperature electronique dans un plasma rce

Info

Publication number
FR2861947B1
FR2861947B1 FR0312934A FR0312934A FR2861947B1 FR 2861947 B1 FR2861947 B1 FR 2861947B1 FR 0312934 A FR0312934 A FR 0312934A FR 0312934 A FR0312934 A FR 0312934A FR 2861947 B1 FR2861947 B1 FR 2861947B1
Authority
FR
France
Prior art keywords
nce
plasma
controlling
electron temperature
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0312934A
Other languages
English (en)
Other versions
FR2861947A1 (fr
Inventor
Denis Hitz
David Cormier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0312934A priority Critical patent/FR2861947B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to PCT/FR2004/002821 priority patent/WO2005046296A2/fr
Priority to EP04805372A priority patent/EP1680948A2/fr
Priority to CNA2004800318748A priority patent/CN1875668A/zh
Priority to KR1020067008618A priority patent/KR20060108650A/ko
Priority to US10/578,529 priority patent/US20070266948A1/en
Priority to JP2006537371A priority patent/JP2007511041A/ja
Publication of FR2861947A1 publication Critical patent/FR2861947A1/fr
Application granted granted Critical
Publication of FR2861947B1 publication Critical patent/FR2861947B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/02Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/02Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/16Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
    • H05H1/18Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
FR0312934A 2003-11-04 2003-11-04 Dispositif pour controler la temperature electronique dans un plasma rce Expired - Fee Related FR2861947B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0312934A FR2861947B1 (fr) 2003-11-04 2003-11-04 Dispositif pour controler la temperature electronique dans un plasma rce
EP04805372A EP1680948A2 (fr) 2003-11-04 2004-11-03 Dispositif pour contrôler la temperature electronique dans un plasma rce
CNA2004800318748A CN1875668A (zh) 2003-11-04 2004-11-03 控制电子回旋共振(rce)等离子体中电子温度的设备
KR1020067008618A KR20060108650A (ko) 2003-11-04 2004-11-03 Ecr 플라스마 내의 전자 온도 조절용 장치
PCT/FR2004/002821 WO2005046296A2 (fr) 2003-11-04 2004-11-03 Dispositif pour controler la temperature electronique dans un plasma rce
US10/578,529 US20070266948A1 (en) 2003-11-04 2004-11-03 Device for Controlling Electron Temperature in an Ecr Plasma
JP2006537371A JP2007511041A (ja) 2003-11-04 2004-11-03 Ecrプラズマ中の電子温度制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0312934A FR2861947B1 (fr) 2003-11-04 2003-11-04 Dispositif pour controler la temperature electronique dans un plasma rce

Publications (2)

Publication Number Publication Date
FR2861947A1 FR2861947A1 (fr) 2005-05-06
FR2861947B1 true FR2861947B1 (fr) 2007-11-09

Family

ID=34429886

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0312934A Expired - Fee Related FR2861947B1 (fr) 2003-11-04 2003-11-04 Dispositif pour controler la temperature electronique dans un plasma rce

Country Status (7)

Country Link
US (1) US20070266948A1 (fr)
EP (1) EP1680948A2 (fr)
JP (1) JP2007511041A (fr)
KR (1) KR20060108650A (fr)
CN (1) CN1875668A (fr)
FR (1) FR2861947B1 (fr)
WO (1) WO2005046296A2 (fr)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
US4447732A (en) * 1982-05-04 1984-05-08 The United States Of America As Represented By The United States Department Of Energy Ion source
FR2556498B1 (fr) * 1983-12-07 1986-09-05 Commissariat Energie Atomique Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique
US4717178A (en) * 1986-06-03 1988-01-05 Mueller Co. Frangible coupling for barrel sections of a fire hydrant
JPH0270064A (ja) * 1988-09-02 1990-03-08 Nippon Telegr & Teleph Corp <Ntt> プラズマバッチ処理装置
FR2681186B1 (fr) * 1991-09-11 1993-10-29 Commissariat A Energie Atomique Source d'ions a resonance cyclotronique electronique et a injection coaxiale d'ondes electromagnetiques.
US5391962A (en) * 1992-07-13 1995-02-21 The United States Of America As Represented By The Secretary Of The Army Electron beam driven negative ion source
JPH06333523A (ja) * 1993-05-26 1994-12-02 Nichimen Denshi Koken Kk Ecr放電イオン源
US5506475A (en) * 1994-03-22 1996-04-09 Martin Marietta Energy Systems, Inc. Microwave electron cyclotron electron resonance (ECR) ion source with a large, uniformly distributed, axially symmetric, ECR plasma volume
JPH1074600A (ja) * 1996-05-02 1998-03-17 Tokyo Electron Ltd プラズマ処理装置
US5703375A (en) * 1996-08-02 1997-12-30 Eaton Corporation Method and apparatus for ion beam neutralization
US6335535B1 (en) * 1998-06-26 2002-01-01 Nissin Electric Co., Ltd Method for implanting negative hydrogen ion and implanting apparatus

Also Published As

Publication number Publication date
WO2005046296A3 (fr) 2005-12-15
US20070266948A1 (en) 2007-11-22
WO2005046296A2 (fr) 2005-05-19
FR2861947A1 (fr) 2005-05-06
KR20060108650A (ko) 2006-10-18
JP2007511041A (ja) 2007-04-26
CN1875668A (zh) 2006-12-06
EP1680948A2 (fr) 2006-07-19

Similar Documents

Publication Publication Date Title
DE602005010766D1 (de) Intelligentes selbstbestimmendes E/A-Gerät
ATE444858T1 (de) Flüssigkeitsausstossvorrichtung
NO20035278D0 (no) Anordning for strömningsregulering
DE60315910D1 (de) Beleuchtungseinrichtung, Flüssigkristallvorrichtung, und elektronisches Gerät
DE60218420D1 (de) Plasma-Anzeigegerät
DE60300130D1 (de) Pegelregelungsvorrichtung
DE602004031311D1 (de) Temperatursteuerungsvorrichtung
DE50307239D1 (de) Ausschleuseinrichtung
DE602004013893D1 (de) Flüssigkeitsabgabesystem mit geschlossenem Kreislauf
DE50308931D1 (de) Schaltvorrichtung
DE60311084D1 (de) Flüssigkeitsspender
DE502004007672D1 (de) Flüssigkeits-kühlsystem
DE60326312D1 (de) Ophthalmologisches photographisches Gerät
DE60221633D1 (de) Flüssigkeitserhitzer
DK1493051T3 (da) Bagbelysningsindretning
DE60332303D1 (de) Plasmaanzeigevorrichtung
DE602004022830D1 (de) Anzeigevorrichtung und ansteuerungsverfahren dafür
FI20021743A (fi) Ohjausjärjestely
ITMI20030461A1 (it) Dispositivo di visualizzazione.
FR2861947B1 (fr) Dispositif pour controler la temperature electronique dans un plasma rce
ITMI20031928A1 (it) Dispositivo di controllo di flusso
AT500412B1 (de) Flüssigmetall-ionenquelle
DE60303742D1 (de) Steuereinrichtung
FI20021674A0 (fi) Päällystyslaite
DE60206977D1 (de) Flüssigkristallvorrichtung

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20130731