DE3462955D1 - Electron beam exposure method and apparatus - Google Patents

Electron beam exposure method and apparatus

Info

Publication number
DE3462955D1
DE3462955D1 DE8484300569T DE3462955T DE3462955D1 DE 3462955 D1 DE3462955 D1 DE 3462955D1 DE 8484300569 T DE8484300569 T DE 8484300569T DE 3462955 T DE3462955 T DE 3462955T DE 3462955 D1 DE3462955 D1 DE 3462955D1
Authority
DE
Germany
Prior art keywords
electron beam
exposure method
beam exposure
electron
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484300569T
Other languages
English (en)
Inventor
Kenji Syaruman Musas Sugishima
Kenji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3462955D1 publication Critical patent/DE3462955D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
DE8484300569T 1983-01-31 1984-01-30 Electron beam exposure method and apparatus Expired DE3462955D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58014086A JPS59150422A (ja) 1983-01-31 1983-01-31 露光処理方法

Publications (1)

Publication Number Publication Date
DE3462955D1 true DE3462955D1 (en) 1987-05-07

Family

ID=11851290

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484300569T Expired DE3462955D1 (en) 1983-01-31 1984-01-30 Electron beam exposure method and apparatus

Country Status (4)

Country Link
US (1) US4678919A (de)
EP (1) EP0115952B1 (de)
JP (1) JPS59150422A (de)
DE (1) DE3462955D1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61177718A (ja) * 1985-02-04 1986-08-09 Hitachi Ltd 電子線描画装置
US4846552A (en) * 1986-04-16 1989-07-11 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating high efficiency binary planar optical elements
JP2540168B2 (ja) * 1987-09-25 1996-10-02 三菱電機株式会社 ビ―ム偏向位置補正装置
JPH0779075B2 (ja) * 1990-02-21 1995-08-23 株式会社東芝 電子ビーム露光装置
US5329130A (en) * 1991-08-06 1994-07-12 Fujitsu Limited Charged particle beam exposure method and apparatus
US5646403A (en) * 1994-10-28 1997-07-08 Nikon Corporation Scanning electron microscope
US5773836A (en) * 1996-10-28 1998-06-30 International Business Machines Corporation Method for correcting placement errors in a lithography system
GB2339960B (en) * 1998-07-16 2001-01-17 Advantest Corp Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial surface unevenness of the specimen
JP2000091225A (ja) 1998-07-16 2000-03-31 Advantest Corp 荷電粒子ビ―ム露光装置及び露光方法
WO2000060415A1 (de) * 1999-04-01 2000-10-12 Sigma-C Gmbh Verfahren zur korrektur von abbildungsfehlern
JP2004361507A (ja) * 2003-06-02 2004-12-24 Renesas Technology Corp フォトマスクの製造方法およびフォトマスク描画システム
JP5087258B2 (ja) * 2005-11-04 2012-12-05 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画方法、荷電粒子ビーム描画装置、位置ずれ量計測方法及び位置計測装置
JP4891804B2 (ja) * 2007-02-21 2012-03-07 日本電子株式会社 パターン描画方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5398781A (en) * 1976-11-25 1978-08-29 Jeol Ltd Electron ray exposure unit
US4137459A (en) * 1978-02-13 1979-01-30 International Business Machines Corporation Method and apparatus for applying focus correction in E-beam system
JPS55102228A (en) * 1979-01-29 1980-08-05 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
NL7904580A (nl) * 1979-06-12 1980-12-16 Philips Nv Inrichting voor het schrijven van patronen in een laag op een substraat met een bundel elektrisch geladen deeltjes.
JPS5536990A (en) * 1979-07-16 1980-03-14 Toshiba Corp Apparatus for applying electron beam
JPS5621321A (en) * 1979-07-27 1981-02-27 Fujitsu Ltd Automatically setting method of focus and exposure coefficient of electron beam exposure apparatus
JPS5693318A (en) * 1979-12-10 1981-07-28 Fujitsu Ltd Electron beam exposure device
JPS56124234A (en) * 1980-03-05 1981-09-29 Hitachi Ltd Correcting method for electron beam deflection
JPS5787131A (en) * 1980-11-20 1982-05-31 Jeol Ltd Exposing method of electron beam

Also Published As

Publication number Publication date
US4678919A (en) 1987-07-07
JPH0352210B2 (de) 1991-08-09
EP0115952A1 (de) 1984-08-15
EP0115952B1 (de) 1987-04-01
JPS59150422A (ja) 1984-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee