DE3447635C2 - - Google Patents

Info

Publication number
DE3447635C2
DE3447635C2 DE3447635A DE3447635A DE3447635C2 DE 3447635 C2 DE3447635 C2 DE 3447635C2 DE 3447635 A DE3447635 A DE 3447635A DE 3447635 A DE3447635 A DE 3447635A DE 3447635 C2 DE3447635 C2 DE 3447635C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3447635A
Other versions
DE3447635A1 (de
Inventor
Masaaki Fijisawa Jp Okunaka
Mitsuo Yokohama Jp Nakatani
Haruhiko Hiratsuka Jp Matsuyama
Hitoshi Fijisawa Jp Yokono
Tokio Katsuta Jp Isogai
Tadashi Tokio/Tokyo Jp Saitoh
Kunihiro Matsukuma
Sumiyuki Hitachi Jp Midorikawa
Satoru Yokohama Jp Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Energy and Industrial Technology Development Organization
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE3447635A1 publication Critical patent/DE3447635A1/de
Application granted granted Critical
Publication of DE3447635C2 publication Critical patent/DE3447635C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/003—Compounds containing elements of Groups 4 or 14 of the Periodic Table without C-Metal linkages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Paints Or Removers (AREA)
DE19843447635 1983-12-28 1984-12-28 Verfahren zur herstellung von solarzellen Granted DE3447635A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58246949A JPS60140880A (ja) 1983-12-28 1983-12-28 太陽電池の製造方法

Publications (2)

Publication Number Publication Date
DE3447635A1 DE3447635A1 (de) 1985-07-18
DE3447635C2 true DE3447635C2 (de) 1987-01-15

Family

ID=17156132

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843447635 Granted DE3447635A1 (de) 1983-12-28 1984-12-28 Verfahren zur herstellung von solarzellen

Country Status (4)

Country Link
US (1) US4643913A (de)
JP (1) JPS60140880A (de)
DE (1) DE3447635A1 (de)
FR (1) FR2557731B1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63119273A (ja) * 1986-11-06 1988-05-23 Sharp Corp 光電変換素子
DE3739174A1 (de) * 1987-11-19 1989-06-01 Huels Chemische Werke Ag Kondensierte acetessigsaeureester-titanchelate und verfahren zu deren herstellung
US5698451A (en) * 1988-06-10 1997-12-16 Mobil Solar Energy Corporation Method of fabricating contacts for solar cells
JPH03502627A (ja) * 1988-06-10 1991-06-13 エイエスイー・アメリカス・インコーポレーテッド 太陽電池用接点製作の改良された方法
US7323581B1 (en) 1990-07-06 2008-01-29 Advanced Technology Materials, Inc. Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition
US5840897A (en) * 1990-07-06 1998-11-24 Advanced Technology Materials, Inc. Metal complex source reagents for chemical vapor deposition
US5178685A (en) * 1991-06-11 1993-01-12 Mobil Solar Energy Corporation Method for forming solar cell contacts and interconnecting solar cells
JP3724592B2 (ja) * 1993-07-26 2005-12-07 ハイニックス セミコンダクター アメリカ インコーポレイテッド 半導体基板の平坦化方法
US5679815A (en) * 1994-09-16 1997-10-21 Advanced Technology Materials, Inc. Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same
US6015917A (en) 1998-01-23 2000-01-18 Advanced Technology Materials, Inc. Tantalum amide precursors for deposition of tantalum nitride on a substrate
DE19811878C2 (de) * 1998-03-18 2002-09-19 Siemens Solar Gmbh Verfahren und Ätzlösung zum naßchemischen pyramidalen Texturätzen von Siliziumoberflächen
AU751353B2 (en) * 1998-07-03 2002-08-15 Canon Kabushiki Kaisha Crystal growth process, semiconductor device, and its production process
US7012292B1 (en) * 1998-11-25 2006-03-14 Advanced Technology Materials, Inc Oxidative top electrode deposition process, and microelectronic device structure
EP1313744A4 (de) * 2000-08-28 2004-03-31 Advanced Tech Materials Reagenzzusammensetzung und verfahren zur bildung von metallschichten auf substraten mittels chemischer gasphasenabscheidung
US7163596B2 (en) * 2002-06-07 2007-01-16 E. I. Du Pont Nemours And Company Fibers and ribbons for use in the manufacture of solar cells
KR100878236B1 (ko) * 2002-06-12 2009-01-13 삼성전자주식회사 금속 패턴의 형성 방법 및 이를 이용한 박막 트랜지스터기판의 제조 방법
US6960675B2 (en) * 2003-10-14 2005-11-01 Advanced Technology Materials, Inc. Tantalum amide complexes for depositing tantalum-containing films, and method of making same
US7166732B2 (en) * 2004-06-16 2007-01-23 Advanced Technology Materials, Inc. Copper (I) compounds useful as deposition precursors of copper thin films
US20060092495A1 (en) * 2004-10-28 2006-05-04 Fuji Photo Film Co., Ltd. Anti-glare anti-reflection film, polarizing plate, and image display device
US9312557B2 (en) * 2005-05-11 2016-04-12 Schlumberger Technology Corporation Fuel cell apparatus and method for downhole power systems
TW200825200A (en) * 2006-12-05 2008-06-16 Advanced Tech Materials Metal aminotroponiminates, bis-oxazolinates and guanidinates
US7750173B2 (en) 2007-01-18 2010-07-06 Advanced Technology Materials, Inc. Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta205 thin films
US8294024B2 (en) * 2008-08-13 2012-10-23 E I Du Pont De Nemours And Company Processes for forming photovoltaic devices
US8840701B2 (en) * 2008-08-13 2014-09-23 E I Du Pont De Nemours And Company Multi-element metal powders for silicon solar cells
US20100037941A1 (en) * 2008-08-13 2010-02-18 E. I. Du Pont De Nemours And Company Compositions and processes for forming photovoltaic devices
US20100037948A1 (en) * 2008-08-14 2010-02-18 Integrated Digital Technologies, Inc. Solar cells provided with color modulation and method for fabricating the same
US8710355B2 (en) 2008-12-22 2014-04-29 E I Du Pont De Nemours And Company Compositions and processes for forming photovoltaic devices
US8294027B2 (en) 2010-01-19 2012-10-23 International Business Machines Corporation Efficiency in antireflective coating layers for solar cells
US8535971B2 (en) * 2010-02-12 2013-09-17 Heraeus Precious Metals North America Conshohocken Llc Method for applying full back surface field and silver busbar to solar cell
CN109014180B (zh) 2010-05-04 2021-08-24 太阳帕斯特有限责任公司 包含铅氧化物和碲氧化物的厚膜糊料及其在半导体装置制造中的用途
TWI745562B (zh) 2017-04-18 2021-11-11 美商太陽帕斯特有限責任公司 導電糊料組成物及用其製成的半導體裝置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IN152814B (de) * 1978-08-08 1984-04-14 Westinghouse Electric Corp
US4361598A (en) * 1979-08-10 1982-11-30 Westinghouse Electric Corp. Polymerized solutions for depositing optical oxide coatings
US4251285A (en) * 1979-08-14 1981-02-17 Westinghouse Electric Corp. Diffusion of dopant from optical coating and single step formation of PN junction in silicon solar cell and coating thereon
US4328260A (en) * 1981-01-23 1982-05-04 Solarex Corporation Method for applying antireflective coating on solar cell
JPS58128775A (ja) * 1982-01-28 1983-08-01 Toshiba Corp 太陽電池の製造方法

Also Published As

Publication number Publication date
JPH0441514B2 (de) 1992-07-08
FR2557731B1 (fr) 1988-10-28
DE3447635A1 (de) 1985-07-18
FR2557731A1 (fr) 1985-07-05
US4643913A (en) 1987-02-17
JPS60140880A (ja) 1985-07-25

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NEW ENERGY AND INDUSTRIAL TECHNOLOGY DEVELOPMENT O

8328 Change in the person/name/address of the agent

Free format text: PAGENBERG, J., DR.JUR. FROHWITTER, B., DIPL.-ING., RECHTSANWAELTE GEISSLER, B., DIPL.-PHYS.DR.JUR.,PAT.- U. RECHTSANW. KOWAL-WOLK, T., DR.-JUR. WOLHAENDLER, J. PLUTA, J., DR., RECHTSANWAELTE BARDEHLE, H., DIPL.-ING. DOST, W., DIPL.-CHEM. DR.RER.NAT. ALTENBURG, U., DIPL.-PHYS. HOFFMANN, W., DIPL.-PHYS. ROST, J., DIPL.-ING., PAT.-ANWAELTE, 8000 MUENCHEN