DE3445342A1 - Laserstrahlbelichtungssystem - Google Patents

Laserstrahlbelichtungssystem

Info

Publication number
DE3445342A1
DE3445342A1 DE19843445342 DE3445342A DE3445342A1 DE 3445342 A1 DE3445342 A1 DE 3445342A1 DE 19843445342 DE19843445342 DE 19843445342 DE 3445342 A DE3445342 A DE 3445342A DE 3445342 A1 DE3445342 A1 DE 3445342A1
Authority
DE
Germany
Prior art keywords
recording
control
laser beam
light modulator
location
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19843445342
Other languages
German (de)
English (en)
Other versions
DE3445342C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tomonari Inage
Tokuhisa Ito
Masatoshi Marui
Yujo Tokio/Tokyo Matsui
Hideaki Ohno
Hiroaki Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP58234745A external-priority patent/JPS60124939A/ja
Priority claimed from JP58234744A external-priority patent/JPS60124938A/ja
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Publication of DE3445342A1 publication Critical patent/DE3445342A1/de
Application granted granted Critical
Publication of DE3445342C2 publication Critical patent/DE3445342C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/02—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
    • G06K15/12—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
    • G06K15/1204—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers involving the fast moving of an optical beam in the main scanning direction
    • G06K15/1219—Detection, control or error compensation of scanning velocity or position, e.g. synchronisation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Laser Beam Printer (AREA)
DE19843445342 1983-12-12 1984-12-12 Laserstrahlbelichtungssystem Granted DE3445342A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP58234745A JPS60124939A (ja) 1983-12-12 1983-12-12 レ−ザ露光装置
JP58234744A JPS60124938A (ja) 1983-12-12 1983-12-12 レ−ザ露光装置

Publications (2)

Publication Number Publication Date
DE3445342A1 true DE3445342A1 (de) 1985-06-20
DE3445342C2 DE3445342C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-14

Family

ID=26531736

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843445342 Granted DE3445342A1 (de) 1983-12-12 1984-12-12 Laserstrahlbelichtungssystem

Country Status (1)

Country Link
DE (1) DE3445342A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3628528A1 (de) * 1985-08-26 1987-03-05 Canon Kk Laserstrahldrucker
DE3710577A1 (de) * 1986-04-01 1987-10-08 Brother Ind Ltd Optisches drucksystem
DE3801708A1 (de) * 1987-01-28 1988-08-11 Chinon Ind Inc Punktreihenmatrix-drucker
EP0415236A3 (en) * 1989-08-31 1991-11-06 Kabushiki Kaisha Toshiba Optical unit for use in laser beam printer or the like
EP0902945A4 (en) * 1996-05-31 1999-09-22 Cinram Inc POINT SIZE SETTING SYSTEM IN AN OPTICAL RECORDING SYSTEM

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19806664C1 (de) * 1998-02-18 1999-04-08 Fraunhofer Ges Forschung Korrigierender Bildpunkttaktgenerator und digitale Belichtungseinrichtung mit einem korrigierenden Bildpunkttaktgenerator

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3905705A (en) * 1972-01-31 1975-09-16 Techmet Co Optical measuring apparatus
DE2511716A1 (de) * 1974-03-22 1975-10-02 Ibm Optischer drucker mit seriellem pufferspeicher, welcher binaerwoerter unterschiedlicher laenge verarbeitet
DE2365916A1 (de) * 1972-11-27 1976-12-30 Xerox Corp Vorrichtung zum aufzeichnen von information
DD144322A1 (de) * 1979-06-13 1980-10-08 Wolfgang Putzker Laserdrucker,insbesondere fuer mikrofilmaufzeichnungen
DE3028319A1 (de) * 1979-07-26 1981-02-19 Fuji Photo Film Co Ltd Einrichtung zur korrektur der teilung der abtastzeilen eines lichtstrahl-aufzeichnungssystems
US4353617A (en) 1980-11-18 1982-10-12 Canon Kabushiki Kaisha Optical system capable of continuously varying the diameter of a beam spot
US4408826A (en) 1980-08-05 1983-10-11 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for scanning a laser beam including means for focusing a scale scanning beam and a read/write scanning beam on the same facet of a polygon scanning mirror
DE3219894A1 (de) * 1982-05-27 1983-12-01 Danfoss A/S, 6430 Nordborg Inkremental-digital-umsetzer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3905705A (en) * 1972-01-31 1975-09-16 Techmet Co Optical measuring apparatus
DE2365916A1 (de) * 1972-11-27 1976-12-30 Xerox Corp Vorrichtung zum aufzeichnen von information
DE2511716A1 (de) * 1974-03-22 1975-10-02 Ibm Optischer drucker mit seriellem pufferspeicher, welcher binaerwoerter unterschiedlicher laenge verarbeitet
DD144322A1 (de) * 1979-06-13 1980-10-08 Wolfgang Putzker Laserdrucker,insbesondere fuer mikrofilmaufzeichnungen
DE3028319A1 (de) * 1979-07-26 1981-02-19 Fuji Photo Film Co Ltd Einrichtung zur korrektur der teilung der abtastzeilen eines lichtstrahl-aufzeichnungssystems
US4408826A (en) 1980-08-05 1983-10-11 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for scanning a laser beam including means for focusing a scale scanning beam and a read/write scanning beam on the same facet of a polygon scanning mirror
US4353617A (en) 1980-11-18 1982-10-12 Canon Kabushiki Kaisha Optical system capable of continuously varying the diameter of a beam spot
DE3219894A1 (de) * 1982-05-27 1983-12-01 Danfoss A/S, 6430 Nordborg Inkremental-digital-umsetzer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3628528A1 (de) * 1985-08-26 1987-03-05 Canon Kk Laserstrahldrucker
DE3710577A1 (de) * 1986-04-01 1987-10-08 Brother Ind Ltd Optisches drucksystem
DE3801708A1 (de) * 1987-01-28 1988-08-11 Chinon Ind Inc Punktreihenmatrix-drucker
EP0415236A3 (en) * 1989-08-31 1991-11-06 Kabushiki Kaisha Toshiba Optical unit for use in laser beam printer or the like
EP0902945A4 (en) * 1996-05-31 1999-09-22 Cinram Inc POINT SIZE SETTING SYSTEM IN AN OPTICAL RECORDING SYSTEM

Also Published As

Publication number Publication date
DE3445342C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-14

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Owner name: PENTAX CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee