DE3427833C2 - Amorphe Silicium Solar-Batterie - Google Patents
Amorphe Silicium Solar-BatterieInfo
- Publication number
- DE3427833C2 DE3427833C2 DE3427833A DE3427833A DE3427833C2 DE 3427833 C2 DE3427833 C2 DE 3427833C2 DE 3427833 A DE3427833 A DE 3427833A DE 3427833 A DE3427833 A DE 3427833A DE 3427833 C2 DE3427833 C2 DE 3427833C2
- Authority
- DE
- Germany
- Prior art keywords
- amorphous silicon
- transparent conductive
- solar battery
- conductive film
- silicon solar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 title claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 15
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 8
- 229910001887 tin oxide Inorganic materials 0.000 claims description 6
- 230000000052 comparative effect Effects 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- FAPDDOBMIUGHIN-UHFFFAOYSA-K antimony trichloride Chemical compound Cl[Sb](Cl)Cl FAPDDOBMIUGHIN-UHFFFAOYSA-K 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
- H10F77/247—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers comprising indium tin oxide [ITO]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
- H10F77/42—Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
- H10F77/48—Back surface reflectors [BSR]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58142556A JPS6034076A (ja) | 1983-08-05 | 1983-08-05 | 非晶質シリコン太陽電池 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3427833A1 DE3427833A1 (de) | 1985-02-21 |
| DE3427833C2 true DE3427833C2 (de) | 1994-02-24 |
Family
ID=15318081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3427833A Expired - Lifetime DE3427833C2 (de) | 1983-08-05 | 1984-07-27 | Amorphe Silicium Solar-Batterie |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4675469A (enExample) |
| JP (1) | JPS6034076A (enExample) |
| AU (1) | AU548553B2 (enExample) |
| DE (1) | DE3427833C2 (enExample) |
| FR (1) | FR2550386B1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068663A (ja) * | 1983-09-26 | 1985-04-19 | Komatsu Denshi Kinzoku Kk | アモルフアスシリコン太陽電池 |
| US4956685A (en) * | 1984-12-21 | 1990-09-11 | Licentia Patent-Verwaltungs Gmbh | Thin film solar cell having a concave n-i-p structure |
| JPH0784651B2 (ja) * | 1986-06-20 | 1995-09-13 | ティーディーケイ株式会社 | 透明導電膜およびその製造方法 |
| US4769086A (en) * | 1987-01-13 | 1988-09-06 | Atlantic Richfield Company | Thin film solar cell with nickel back |
| AU662360B2 (en) * | 1991-10-22 | 1995-08-31 | Canon Kabushiki Kaisha | Photovoltaic device |
| DE69942501D1 (de) * | 1998-07-06 | 2010-07-29 | Nissha Printing | Durchsichtige leitfähige folie für durchsichtige berührungsempfindliche tafel, durchsichtige berührungsempfindliche tafel mit durchsichtiger leitfähiger folie und verfahren zur herstellung einer durchsichtige leitfähige folie |
| JP2001060702A (ja) * | 1999-06-18 | 2001-03-06 | Nippon Sheet Glass Co Ltd | 光電変換装置用基板およびこれを用いた光電変換装置 |
| JP2009513018A (ja) * | 2005-10-20 | 2009-03-26 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 溶液から調製されるナノクリスタル太陽電池 |
| CN101552299B (zh) * | 2008-04-02 | 2011-06-29 | 富士迈半导体精密工业(上海)有限公司 | 太阳能面板 |
| US20100139753A1 (en) * | 2008-12-05 | 2010-06-10 | Applied Materials, Inc. | Semiconductor device and method of producing a semiconductor device |
| WO2010063590A1 (en) * | 2008-12-05 | 2010-06-10 | Applied Materials Inc. | Semiconductor device and method of producing a semiconductor device |
| EP2194583A1 (en) * | 2008-12-05 | 2010-06-09 | Applied Materials, Inc. | Semiconductor device and method of producing a semiconductor device |
| CN103280466B (zh) * | 2013-05-09 | 2015-07-29 | 南开大学 | 基于AlOx/Ag/ZnO结构的高反射高绒度背电极 |
| CN103887351A (zh) * | 2014-04-09 | 2014-06-25 | 南开大学 | 一种多孔氧化铝/氧化锌复合陷光背电极及其应用 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4147564A (en) * | 1977-11-18 | 1979-04-03 | Sri International | Method of controlled surface texturization of crystalline semiconductor material |
| JPS6041878B2 (ja) * | 1979-02-14 | 1985-09-19 | シャープ株式会社 | 薄膜太陽電池装置 |
| JPS5853869A (ja) * | 1981-09-26 | 1983-03-30 | Semiconductor Energy Lab Co Ltd | 光電変換装置作製方法 |
| JPS5857756A (ja) * | 1981-10-01 | 1983-04-06 | Agency Of Ind Science & Technol | 非晶質太陽電池 |
| IL67926A (en) * | 1982-03-18 | 1986-04-29 | Energy Conversion Devices Inc | Photo-voltaic device with radiation reflector means |
| US4442310A (en) * | 1982-07-15 | 1984-04-10 | Rca Corporation | Photodetector having enhanced back reflection |
| CA1209681A (en) * | 1982-08-04 | 1986-08-12 | Exxon Research And Engineering Company | Optically enhanced thin film photovoltaic device using lithography defined random surfaces |
-
1983
- 1983-08-05 JP JP58142556A patent/JPS6034076A/ja active Granted
-
1984
- 1984-07-23 AU AU30951/84A patent/AU548553B2/en not_active Expired
- 1984-07-27 DE DE3427833A patent/DE3427833C2/de not_active Expired - Lifetime
- 1984-08-03 FR FR848412295A patent/FR2550386B1/fr not_active Expired - Lifetime
-
1986
- 1986-01-29 US US06/823,589 patent/US4675469A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2550386B1 (fr) | 1990-01-05 |
| JPH0455351B2 (enExample) | 1992-09-03 |
| AU548553B2 (en) | 1985-12-19 |
| DE3427833A1 (de) | 1985-02-21 |
| AU3095184A (en) | 1985-02-07 |
| US4675469A (en) | 1987-06-23 |
| JPS6034076A (ja) | 1985-02-21 |
| FR2550386A1 (fr) | 1985-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3318852C2 (de) | Photodetektor und Verfahren zu seiner Herstellung | |
| DE3427833C2 (de) | Amorphe Silicium Solar-Batterie | |
| DE69532430T2 (de) | Ein Herstellungsverfahren einer Rückreflektorschicht für ein photovoltaisches Bauelement | |
| DE69814751T2 (de) | Herstellung einer dünnen Zinkoxidschicht | |
| DE3431603C2 (de) | Photoelektrischer Wandler | |
| DE2854652C2 (enExample) | ||
| DE19958878B4 (de) | Dünnschicht-Solarzelle | |
| DE69215176T2 (de) | Solarzelle und deren Herstellungsmethode | |
| DE3382709T2 (de) | Fotovoltaischer Wandler. | |
| EP0715358B2 (de) | Verfahren zur Herstellung einer Solarzelle mit Chalkopyrit-Absorberschicht und so hergestellte Solarzelle | |
| DE2632987C3 (de) | Fotovoltaisches Halbleiterbauelement und Verfahren zu seiner Herstellung | |
| DE69734860T2 (de) | Herstellungsverfahren von integrierten Dünnfilm-Solarzellen | |
| DE69311209T2 (de) | Verfahren und Vorrichtung zum Beheben von Kurzschlussbereichen in Halbleiterelementen | |
| DE2858777C2 (enExample) | ||
| EP0025872B1 (de) | Halbleiterbauelement für die Umsetzung solarer Strahlung in elektrische Energie | |
| DE69737924T2 (de) | Photoelektrischer Wandler | |
| DE3334316A1 (de) | Solarbatterie mit amorphem silicium | |
| DE2047175A1 (de) | Die vorliegende Erfindung bezieht sich auf eine Halbleitervorrichtung und ein Verfahren zu deren Herstellung | |
| EP0630524A1 (de) | Klimastabiles dünnschichtsolarmodul | |
| DE102007008217A1 (de) | Kaskaden-Solarzelle mit auf amorphem Silizium basierender Solarzelle | |
| DE69308074T2 (de) | Solarmodul aus amorphem Halbleiter mit verbesserter Passivierung | |
| DE3709153A1 (de) | Mehrlagige duennfilmsolarzelle | |
| DE102008017312A1 (de) | Photovoltaik-Solarzelle und Verfahren zu deren Herstellung | |
| DE3851402T2 (de) | Integrierte sonnenzelle und herstellungsverfahren. | |
| DE69033643T2 (de) | Erhöhung des Kurzschlussstroms durch Benutzung einer n-Schicht mit grosser Bandlücke in p-i-n photovoltaischen Zellen aus amorphem Silizium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |