DE3274009D1 - High-performance vibration filter - Google Patents
High-performance vibration filterInfo
- Publication number
- DE3274009D1 DE3274009D1 DE8282107380T DE3274009T DE3274009D1 DE 3274009 D1 DE3274009 D1 DE 3274009D1 DE 8282107380 T DE8282107380 T DE 8282107380T DE 3274009 T DE3274009 T DE 3274009T DE 3274009 D1 DE3274009 D1 DE 3274009D1
- Authority
- DE
- Germany
- Prior art keywords
- vibration filter
- performance vibration
- performance
- filter
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/18—Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP82107380A EP0100785B1 (de) | 1982-08-13 | 1982-08-13 | Hochleistungsvibrationsfilter |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3274009D1 true DE3274009D1 (en) | 1986-12-04 |
Family
ID=8189179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8282107380T Expired DE3274009D1 (en) | 1982-08-13 | 1982-08-13 | High-performance vibration filter |
Country Status (4)
Country | Link |
---|---|
US (1) | US4605194A (de) |
EP (1) | EP0100785B1 (de) |
JP (1) | JPS5934041A (de) |
DE (1) | DE3274009D1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH088727B2 (ja) * | 1984-12-10 | 1996-01-29 | エヌティエヌ株式会社 | 磁気浮上式直線スライダ |
GB2186946A (en) * | 1986-02-25 | 1987-08-26 | Rank Taylor Hobson Ltd | Vibration isolation means |
JPS63268404A (ja) * | 1987-04-24 | 1988-11-07 | Nippon Telegr & Teleph Corp <Ntt> | 磁気浮上式搬送装置 |
US5549270A (en) * | 1989-08-16 | 1996-08-27 | Minus K Technology, Inc. | Vibration isolation system |
US5310157A (en) * | 1989-08-16 | 1994-05-10 | Minus K Technology, Inc. | Vibration isolation system |
WO1992002743A1 (en) * | 1990-08-10 | 1992-02-20 | Mitsubishi Jukogyo Kabushiki Kaisha | Vibration-damping apparatus |
JPH0497737U (de) * | 1990-10-25 | 1992-08-24 | ||
US5267720A (en) * | 1991-12-06 | 1993-12-07 | Sperry Marine Inc. | Structureborne noise isolator |
US5419528A (en) * | 1993-05-13 | 1995-05-30 | Mcdonnell Douglas Corporation | Vibration isolation mounting system |
DE69533270T2 (de) * | 1994-01-25 | 2005-08-04 | Minus K Technology, Inc., Inglewood | Schwingungsdämpfungssystem |
US6215892B1 (en) * | 1995-11-30 | 2001-04-10 | Chromavision Medical Systems, Inc. | Method and apparatus for automated image analysis of biological specimens |
WO1997027454A1 (en) * | 1996-01-26 | 1997-07-31 | Dwbh Ventures Limited | Alignment tool for determining orientation with respect to gravity with motion dampening mechanism |
US6035980A (en) * | 1996-04-08 | 2000-03-14 | Delta Tooling Co., Ltd. | Magnetic spring having damping characteristics and vibration mechanism having same |
JP3725272B2 (ja) * | 1996-12-27 | 2005-12-07 | 株式会社デルタツーリング | 振動発生機構 |
JPH1130274A (ja) * | 1997-05-15 | 1999-02-02 | Delta Tsuuring:Kk | 磁気バネを有する振動機構 |
KR100281474B1 (ko) | 1997-05-16 | 2001-02-01 | 후지타 히토시 | 자기스프링을구비한에너지출력기구 |
US5927680A (en) * | 1997-07-01 | 1999-07-27 | Mcdonnell Douglas Corporation | Rate gyro isolation assembly |
US6785217B1 (en) | 1998-01-27 | 2004-08-31 | Wistron Corporation | Method and device for reducing vibration of a high speed disk drive |
US20080216447A1 (en) * | 2007-03-05 | 2008-09-11 | Tian-Tsz Hung | Positioning Device For Window Frame |
WO2013034753A1 (en) * | 2011-09-09 | 2013-03-14 | Mapper Lithography Ip B.V. | Vibration isolation module and substrate processing system |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE152678C (de) * | ||||
US118919A (en) * | 1871-09-12 | Improvement in wagon-seats | ||
US1795313A (en) * | 1926-10-11 | 1931-03-10 | Kimble Electric Company | Electric-motor support |
US2018756A (en) * | 1932-08-18 | 1935-10-29 | Standard Oil Dev Co | Compound seismograph |
DE673210C (de) * | 1935-04-02 | 1939-03-17 | Schaeffer & Budenberg G M B H | Elastische Aufhaengevorrichtung fuer Messgeraete |
GB519587A (en) * | 1937-09-27 | 1940-04-01 | Salvatore Crescimanno | Device for stabilizing indicating instruments suspended by springs |
GB570243A (en) * | 1942-03-23 | 1945-06-28 | Cecil Stanley Robinson | Improvements in vibration-suppressing supports |
US2390328A (en) * | 1943-06-25 | 1945-12-04 | Standard Oil Dev Co | Directional seismograph pickup |
GB686514A (en) * | 1950-07-08 | 1953-01-28 | British Thomson Houston Co Ltd | Improvements in and relating to resilient mountings |
US3223400A (en) * | 1963-10-21 | 1965-12-14 | Deister Machine Company | Vibration isolation mount |
DE1234037B (de) * | 1964-10-27 | 1967-02-09 | Continental Elektro Ind Ag | Einrichtung zur Messung von Bodenschwingungen |
US3493905A (en) * | 1965-12-30 | 1970-02-03 | Gen Electric | Hysteresis damper |
US3412376A (en) * | 1967-05-10 | 1968-11-19 | Mark Products | Low-frequency seismometer |
US3845929A (en) * | 1969-06-10 | 1974-11-05 | Bell & Howell Co | Stabilizing mechanism |
US3592422A (en) * | 1969-07-29 | 1971-07-13 | Nasa | Vibration isolation system using compression springs |
US3744746A (en) * | 1971-09-23 | 1973-07-10 | Whirlpool Co | Suspension rod assembly for automatic washer |
US3868082A (en) * | 1973-07-16 | 1975-02-25 | Lkb Produkter Ab | Device in a microtome for damping of vibrations |
FR2266060A1 (en) * | 1974-03-27 | 1975-10-24 | Huot De Longchamp Jacques | Shock absorbing mount for fragile pparatus - has four spring mounted support rods to give six degrees of freedom |
JPS57190142A (en) * | 1981-05-15 | 1982-11-22 | Makoto Nandate | Kinematic vibro-absorber using magnetic damping |
-
1982
- 1982-08-13 DE DE8282107380T patent/DE3274009D1/de not_active Expired
- 1982-08-13 EP EP82107380A patent/EP0100785B1/de not_active Expired
-
1983
- 1983-06-10 JP JP58102944A patent/JPS5934041A/ja active Granted
- 1983-06-17 US US06/505,533 patent/US4605194A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0100785B1 (de) | 1986-10-29 |
EP0100785A1 (de) | 1984-02-22 |
JPH0115734B2 (de) | 1989-03-20 |
US4605194A (en) | 1986-08-12 |
JPS5934041A (ja) | 1984-02-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |