DE3231100A1 - Verfahren zur herstellung eines formkoerpers aus siliciumcarbid - Google Patents
Verfahren zur herstellung eines formkoerpers aus siliciumcarbidInfo
- Publication number
- DE3231100A1 DE3231100A1 DE19823231100 DE3231100A DE3231100A1 DE 3231100 A1 DE3231100 A1 DE 3231100A1 DE 19823231100 DE19823231100 DE 19823231100 DE 3231100 A DE3231100 A DE 3231100A DE 3231100 A1 DE3231100 A1 DE 3231100A1
- Authority
- DE
- Germany
- Prior art keywords
- silicon carbide
- carbon
- silicon
- powder
- calcined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 74
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 71
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 claims description 49
- 229910052710 silicon Inorganic materials 0.000 claims description 49
- 239000010703 silicon Substances 0.000 claims description 49
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 41
- 229910052799 carbon Inorganic materials 0.000 claims description 39
- 239000000843 powder Substances 0.000 claims description 35
- 239000000126 substance Substances 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 15
- 238000003776 cleavage reaction Methods 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 10
- 230000007017 scission Effects 0.000 claims description 10
- 239000011230 binding agent Substances 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 8
- 229920001568 phenolic resin Polymers 0.000 claims description 8
- 239000005011 phenolic resin Substances 0.000 claims description 7
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 7
- 239000002344 surface layer Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- 238000001354 calcination Methods 0.000 claims description 3
- 238000011065 in-situ storage Methods 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- 229920000515 polycarbonate Polymers 0.000 claims description 3
- 239000004417 polycarbonate Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229910000077 silane Inorganic materials 0.000 claims description 3
- 239000004793 Polystyrene Substances 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 239000003925 fat Substances 0.000 claims description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims description 2
- 229920000609 methyl cellulose Polymers 0.000 claims description 2
- 235000010981 methylcellulose Nutrition 0.000 claims description 2
- 239000003921 oil Substances 0.000 claims description 2
- 239000012188 paraffin wax Substances 0.000 claims description 2
- 235000019809 paraffin wax Nutrition 0.000 claims description 2
- 235000019271 petrolatum Nutrition 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 229920001225 polyester resin Polymers 0.000 claims description 2
- 239000004645 polyester resin Substances 0.000 claims description 2
- 229920002223 polystyrene Polymers 0.000 claims description 2
- 229920002050 silicone resin Polymers 0.000 claims description 2
- 230000004992 fission Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 49
- 238000001764 infiltration Methods 0.000 description 20
- 230000008595 infiltration Effects 0.000 description 20
- 239000000243 solution Substances 0.000 description 17
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- 239000003960 organic solvent Substances 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 13
- 238000011282 treatment Methods 0.000 description 13
- 238000005470 impregnation Methods 0.000 description 12
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 238000000465 moulding Methods 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000002845 discoloration Methods 0.000 description 4
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 238000000748 compression moulding Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000010002 mechanical finishing Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 208000031872 Body Remains Diseases 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- IKXDEFIEGAVNOZ-UHFFFAOYSA-N [SiH4].[C] Chemical compound [SiH4].[C] IKXDEFIEGAVNOZ-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000029142 excretion Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- VLKZOEOYAKHREP-UHFFFAOYSA-N hexane Substances CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56131237A JPS5832070A (ja) | 1981-08-21 | 1981-08-21 | 高密度炭化けい素焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3231100A1 true DE3231100A1 (de) | 1983-03-24 |
| DE3231100C2 DE3231100C2 (en, 2012) | 1991-05-16 |
Family
ID=15053207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823231100 Granted DE3231100A1 (de) | 1981-08-21 | 1982-08-20 | Verfahren zur herstellung eines formkoerpers aus siliciumcarbid |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5832070A (en, 2012) |
| DE (1) | DE3231100A1 (en, 2012) |
| FR (1) | FR2511665B1 (en, 2012) |
| GB (1) | GB2104103B (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618767A (en) * | 1994-01-05 | 1997-04-08 | Hoechst Ceramtec Aktiengesellschaft | Process for producing ceramic components of silicon carbide |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6016868A (ja) * | 1983-07-02 | 1985-01-28 | 黒崎窯業株式会社 | 炭化珪素焼結体の製造方法 |
| US4737327A (en) * | 1983-02-07 | 1988-04-12 | Kurosaki Refractories Co., Ltd. | Process for producing silicon carbide sintered product |
| JPS6169116A (ja) * | 1984-09-13 | 1986-04-09 | Toshiba Ceramics Co Ltd | シリコンウエハ−の連続ｃｖｄコ−テイング用サセプター |
| GB2177421B (en) * | 1985-05-20 | 1989-07-19 | Toshiba Ceramics Co | Sintered body of silicon carbide and method for manufacturing the same |
| US4833110A (en) * | 1986-09-16 | 1989-05-23 | Lanxide Technology Company, Lp | Method for producing composite ceramic structures |
| JP2620364B2 (ja) * | 1988-03-18 | 1997-06-11 | 本田技研工業株式会社 | セラミックス焼結体の製造方法 |
| JP2632218B2 (ja) * | 1989-07-20 | 1997-07-23 | 本田技研工業株式会社 | セラミック焼結体の製造方法 |
| GB2237819A (en) * | 1989-11-10 | 1991-05-15 | Atomic Energy Authority Uk | A method of producing a silicon carbide article |
| JPH05279123A (ja) * | 1992-02-04 | 1993-10-26 | Shin Etsu Chem Co Ltd | 半導体製造用炭化珪素質部材 |
| WO1994010101A1 (de) * | 1992-11-02 | 1994-05-11 | Lonza-Werke G.M.B.H. | Verfahren zur herstellung von formkörpern aus reaktionsgebundenem, siliciuminfiltriertem siliciumcarbid sowie pressmasse als zwischenprodukt |
| US5509555A (en) * | 1994-06-03 | 1996-04-23 | Massachusetts Institute Of Technology | Method for producing an article by pressureless reactive infiltration |
| JP5841392B2 (ja) * | 2011-09-30 | 2016-01-13 | 日本ファインセラミックス株式会社 | 複合材料の製造方法 |
| CN110790586B (zh) * | 2019-10-31 | 2020-10-13 | 中国科学院长春光学精密机械与物理研究所 | 一种反应烧结SiC陶瓷疏松芯部的致密化方法 |
| CN115032112B (zh) * | 2022-06-08 | 2025-03-25 | 广东电网有限责任公司 | 一种变压器油的游离碳含量测定方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1075489B (en, 2012) * | 1960-02-01 | |||
| US2938807A (en) * | 1957-08-13 | 1960-05-31 | James C Andersen | Method of making refractory bodies |
| US3205043A (en) * | 1962-04-04 | 1965-09-07 | Carborundum Co | Cold molded dense silicon carbide articles and method of making the same |
| US3495939A (en) * | 1966-06-10 | 1970-02-17 | Atomic Energy Authority Uk | Manufacture of dense bodies of silicon carbide |
| GB1495086A (en) * | 1974-11-11 | 1977-12-14 | Norton Co | Process for forming high density silicon carbide and products resulting therefrom |
| GB1579981A (en) * | 1976-02-26 | 1980-11-26 | Watanabe H | Method for producing silicon carbide sintered mouldings consisting mainly of sic |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1225235A (fr) * | 1959-05-13 | 1960-06-29 | Carborundum Co | Procédé de fabrication de pièces denses en carbure de silicium |
| CA1067524A (en) * | 1975-10-03 | 1979-12-04 | Jack E. Noakes | Method of forming a silicon carbide article i |
| JPS5924754B2 (ja) * | 1977-07-07 | 1984-06-12 | 信越化学工業株式会社 | 炭化けい素成型体の製造方法 |
-
1981
- 1981-08-21 JP JP56131237A patent/JPS5832070A/ja active Granted
-
1982
- 1982-08-19 GB GB08223926A patent/GB2104103B/en not_active Expired
- 1982-08-20 FR FR8214392A patent/FR2511665B1/fr not_active Expired
- 1982-08-20 DE DE19823231100 patent/DE3231100A1/de active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1075489B (en, 2012) * | 1960-02-01 | |||
| US2938807A (en) * | 1957-08-13 | 1960-05-31 | James C Andersen | Method of making refractory bodies |
| US3205043A (en) * | 1962-04-04 | 1965-09-07 | Carborundum Co | Cold molded dense silicon carbide articles and method of making the same |
| US3495939A (en) * | 1966-06-10 | 1970-02-17 | Atomic Energy Authority Uk | Manufacture of dense bodies of silicon carbide |
| GB1495086A (en) * | 1974-11-11 | 1977-12-14 | Norton Co | Process for forming high density silicon carbide and products resulting therefrom |
| GB1579981A (en) * | 1976-02-26 | 1980-11-26 | Watanabe H | Method for producing silicon carbide sintered mouldings consisting mainly of sic |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618767A (en) * | 1994-01-05 | 1997-04-08 | Hoechst Ceramtec Aktiengesellschaft | Process for producing ceramic components of silicon carbide |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2104103B (en) | 1986-02-12 |
| JPS5832070A (ja) | 1983-02-24 |
| FR2511665A1 (fr) | 1983-02-25 |
| FR2511665B1 (fr) | 1986-10-17 |
| DE3231100C2 (en, 2012) | 1991-05-16 |
| JPS6327305B2 (en, 2012) | 1988-06-02 |
| GB2104103A (en) | 1983-03-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |